公开(公告)号：US09805909B1

公开(公告)日：2017-10-31

申请号：US15271105

申请日：2016-09-20

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Dror Shemesh ,  Lei Zhong

IPC: G01N23/22 ,  H01J37/244 ,  G01N23/225

CPC classification number: H01J37/244 ,  G01N23/203 ,  G01N23/2252 ,  G01N2223/053 ,  G01N2223/079 ,  G01N2223/102 ,  H01J2237/2445 ,  H01J2237/24592

Abstract: An inspection system that includes charged particle optics that irradiate a bottom of a hole with a charged particle beam propagated along an optical axis, an energy dispersive x-ray detector and a processor. The x-ray detector detects x-ray photons emitted from the bottom of the hole and generates detection signals indicative of the x-ray photons. The processor processes the detection signals to provide an estimate of the bottom of the hole.