公开(公告)号：US10895689B2

公开(公告)日：2021-01-19

申请号：US16199811

申请日：2018-11-26

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02B27/00 ,  G02B6/34 ,  G02B5/18

Abstract: Structures for a waveguide and methods of fabricating a structure for a waveguide. A grating coupler is formed that has an arrangement of grating structures. A conformal layer is arranged over the plurality of grating structures. The conformal layer is composed of a tunable material having a refractive index that changes with an applied voltage.

公开(公告)号：US10816872B1

公开(公告)日：2020-10-27

申请号：US16516658

申请日：2019-07-19

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02F1/313 ,  G02F1/295

Abstract: Structures for a grating coupler and methods of fabricating a structure for a grating coupler. The grating coupler includes a first plurality of grating structures and a second plurality of grating structures that alternate with the first plurality of grating structures in an interleaved arrangement. The first plurality of grating structures are composed of a dielectric material or a semiconductor material. The second plurality of grating structures are composed of a tunable material having a refractive index that changes with an applied voltage.

公开(公告)号：US10816728B1

公开(公告)日：2020-10-27

申请号：US16686782

申请日：2019-11-18

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02B6/13 ,  G02B6/43 ,  G02B6/126 ,  G02B6/122 ,  G02B6/12

Abstract: Structures for a polarizer and methods of fabricating a structure for a polarizer. A first waveguide core has a first width, and a polarizer includes a second waveguide core having a second width that is greater than the first width. The second waveguide core is coupled to the first waveguide core. The polarizer includes a layer that is positioned adjacent to a side surface of the second waveguide core. The layer is comprised of a material having a permittivity with an imaginary part that ranges from 0 to about 15.

公开(公告)号：US10816725B2

公开(公告)日：2020-10-27

申请号：US16134295

申请日：2018-09-18

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Abu Thomas

IPC: G02B6/122 ,  G02B6/125 ,  G02B6/12

Abstract: Structures with waveguides in multiple levels and methods of fabricating a structure that includes waveguides in multiple levels. A waveguide crossing has a first waveguide and a second waveguide arranged to intersect the first waveguide. A third waveguide is displaced vertically from the waveguide crossing, The third waveguide includes a portion having an overlapping arrangement with a portion of the first waveguide. The overlapping portions of the first and third waveguides are configured to transfer optical signals between the first waveguide and the third waveguide.

公开(公告)号：US10698159B2

公开(公告)日：2020-06-30

申请号：US16165600

申请日：2018-10-19

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02B6/136 ,  G02B6/122

Abstract: Structures that include a waveguide and methods of fabricating a structure that includes a waveguide. A first dielectric layer comprised of a first silicon nitride is formed. The waveguide is arranged over the first dielectric layer. A second dielectric layer is formed that is arranged over the waveguide. The second dielectric layer is composed of a second silicon nitride having a lower absorption of optical signals than the first silicon nitride.

公开(公告)号：US10670804B1

公开(公告)日：2020-06-02

申请号：US16234906

申请日：2018-12-28

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Abu Thomas ,  Ajey Poovannummoottil Jacob

IPC: G02B6/12 ,  G02B6/122 ,  G02B6/136

Abstract: Waveguiding structures and methods of fabricating a waveguiding structure. The waveguiding structure includes a waveguide and an array of semiconductor fins that are arranged at least in part inside the waveguide.

公开(公告)号：US20200166709A1

公开(公告)日：2020-05-28

申请号：US16199811

申请日：2018-11-26

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02B6/34

Abstract: Structures for a waveguide and methods of fabricating a structure for a waveguide. A grating coupler is formed that has an arrangement of grating structures. A conformal layer is arranged over the plurality of grating structures. The conformal layer is composed of a tunable material having a refractive index that changes with an applied voltage.

公开(公告)号：US10649245B1

公开(公告)日：2020-05-12

申请号：US16298446

申请日：2019-03-11

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Abu Thomas

IPC: G02F1/035 ,  G02F1/025 ,  G02F1/015

Abstract: Structures for an electro-optic modulator and methods of fabricating a structure for an electro-optic modulator. The electro-optic modulator is arranged over a portion of a first waveguide core. The electro-optic modulator may include an electrode, an active layer, a second waveguide core, and a dielectric layer that is arranged between the active layer and the second waveguide core. The active layer is composed of a material having a refractive index that is a function of a bias voltage applied between the electrode and the first waveguide core.

公开(公告)号：US10585219B2

公开(公告)日：2020-03-10

申请号：US16000249

申请日：2018-06-05

Applicant: GLOBALFOUNDRIES INC.

Inventor： Ajey Poovannummoottil Jacob ,  Yusheng Bian

IPC: G02B6/34 ,  G02B5/18 ,  G02B6/42 ,  G02B6/12 ,  G02B6/293 ,  G02B6/124

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to grating couplers with multiple configurations and methods of manufacture. A grating coupler structure includes: a polysilicon material with a first grating coupling pattern; a SiN material with second grating coupling pattern; a dielectric material covering the polysilicon material and the SiN material; and a back end of line (BEOL) multilayer stack over the dielectric material.

公开(公告)号：US10444433B1

公开(公告)日：2019-10-15

申请号：US16170262

申请日：2018-10-25

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Abu Thomas ,  Ajey Poovannummoottil Jacob ,  Kenneth J. Giewont ,  Karen Nummy ,  Andreas Stricker ,  Bo Peng

IPC: G02B6/122 ,  G02B6/136 ,  G02B6/12

Abstract: Structures that include a waveguide and methods of fabricating a structure that includes a waveguide. A tapered feature composed of a dielectric material is arranged over the waveguide. The tapered feature includes a sidewall that is angled relative to a longitudinal axis of the waveguide.