公开(公告)号：US6128080A

公开(公告)日：2000-10-03

申请号：US870937

申请日：1997-06-06

Applicant: Gary R. Janik ,  Douglas W. Shepard ,  Steven P. Trainoff ,  David T. Phillips

Inventor： Gary R. Janik ,  Douglas W. Shepard ,  Steven P. Trainoff ,  David T. Phillips

IPC: G01N21/45 ,  G01B9/02

CPC classification number: G01N21/45

Abstract: A method and apparatus is disclosed for measuring the refractive index difference between a reference and sample liquid based on an interferometric design. The resultant device has an almost unlimited range of operation in contrast to a conventional interferometric refractometer of the so-called polarization type whose dynamic range is restricted to a relatively narrow range of refractive indices. The measurement of the refractive index difference between a sample and reference cell is achieved by measuring the angle through which the plane of polarization of a combined beam has rotated. For the conventional device, this angle is restricted to about .pi. radians which corresponds to a half wavelength shift between the reference and sample components of said combined beam. The extended range device disclosed permits this angle to be tracked and measured accurately over many rotations. The rotation tracking is achieved by one of three embodiments, the preferred of which involves the use of a liquid crystal retarder. The other two techniques incorporate, respectively, a rotating polarizer and a doubly split beam. All three embodiments permit the measurement of both the sine and cosine of the rotation angle and, thereby, allows a four quadrant arctangent calculation to yield the rotation angle directly. The error associated with such measurements is not a function of the rotation angle of the combined beams.

Abstract translation: 公开了一种用于基于干涉测量设计来测量参考和样品液体之间的折射率差的方法和装置。 与所谓的偏振型的常规干涉式折射计相反，所得到的装置具有几乎无限的操作范围，其中动态范围被限制在相对较窄的折射率范围。 通过测量组合光束的偏振平面旋转的角度来实现样品和参考单元之间的折射率差的测量。 对于常规装置，该角度限于对应于所述组合光束的参考和样本分量之间的半波长偏移的约π弧度。 所公开的扩展范围装置允许在许多旋转中精确地跟踪和测量该角度。 旋转跟踪由三个实施例中的一个实现，其中优选涉及使用液晶延迟器。 其他两种技术分别包括旋转偏振器和双分束。 所有三个实施例允许测量旋转角度的正弦和余弦两者，从而允许四象限反正切计算直接产生旋转角度。 与这种测量相关联的误差不是组合光束的旋转角度的函数。

公开(公告)号：US5900152A

公开(公告)日：1999-05-04

申请号：US854442

申请日：1997-05-12

Applicant: Gary R. Janik ,  Douglas W. Shepard ,  Steven T. Monser

Inventor： Gary R. Janik ,  Douglas W. Shepard ,  Steven T. Monser

IPC: G01N30/74 ,  B01D15/08

CPC classification number: G01N30/74

Abstract: A capillary tube used to transfer a liquid sample into a detection cell following separation by a chromatographic system is modified by plugging or otherwise severely restricting its flow. Near its plugged end, said tube is drilled to provide a plurality of holes or ports perpendicular thereto and penetrating to the central flowing core of said tube so as to direct outflow from the tube perpendicularly therefrom. The outer diameter of this somodified capillary tube is selected to be of a size comparable to, though smaller than, the detection cell diameter into which it transfers the flowing sample. In this manner, fluid transferred into a detection cell by said modified capillary tube will be split into a plurality of smaller streams flowing outwardly therefrom and striking the adjacent detector cell walls almost immediately. Because of the close proximity of the emerging split streams to the walls of the detection cell, the eddies produced thereby will be very small and the contents of the detection cell will be homogenized rapidly.

Abstract translation: 用于在通过色谱系统分离后将液体样品转移到检测单元中的毛细管通过堵塞或以其他方式严格限制其流动来改变。 在其堵塞端附近，所述管被钻孔以提供与其垂直的多个孔或孔，并穿透到所述管的中心流动芯，以便从管垂直地引导从管垂直流出。 该变细毛细管的外径被选择为与其传送流动样品的检测池直径相当的尺寸，尽管比其小。 以这种方式，通过所述改进的毛细管转移到检测单元中的流体将被分成多个从其向外流动的较小流，并几乎立即撞击相邻的检测器单元壁。 由于新出现的分流与检测单元的壁的紧密接近，因此产生的涡流将非常小，并且检测单元的内容物将迅速均匀化。

公开(公告)号：US07606677B1

公开(公告)日：2009-10-20

申请号：US10986269

申请日：2004-11-10

Applicant: Gary R. Janik ,  Eric Bouche ,  John Fielden

Inventor： Gary R. Janik ,  Eric Bouche ,  John Fielden

IPC: G06F3/01

CPC classification number: H01L22/20 ,  H01L22/12

Abstract: A metrology recipe includes dynamic instructions that allow a metrology tool to perform a secondary metrology operation on a test wafer when previous measurement data indicates a process issue with that test wafer. The metrology recipe can instruct the metrology tool to perform an efficient default metrology operation on all test wafers, and perform a more in-depth secondary metrology operation on only those wafers that warrant additional scrutiny. In this manner, critical metrology data can be captured with a minimum of effect on metrology throughput. The metrology data used to determine whether or not the secondary metrology operation is to be performed can be generated from default metrology operations within the same tool, or can be generated by measurements taken by a completely different tool. Such “external” metrology data can be received via a communications network, either directly or from a server on the network for processing the metrology data.

Abstract translation: 计量配方包括动态指令，允许计量工具在测试晶片上执行次级测量操作，以前的测量数据表明该测试晶片的过程问题。 计量配方可以指示计量工具在所有测试晶圆上执行有效的默认计量操作，并对仅需要额外检查的晶圆进行更深入的次级测量操作。 以这种方式，可以以最小的测量吞吐量影响来捕获关键测量数据。 用于确定是否要执行二次测量操作的计量数据可以由同一工具内的默认计量操作生成，也可以通过完全不同的工具进行测量来生成。 这样的“外部”计量学数据可以经由通信网络直接地或从网络上的服务器接收以处理度量数据。

公开(公告)号：US07196801B1

公开(公告)日：2007-03-27

申请号：US10771020

申请日：2004-02-03

Applicant: Gary R. Janik ,  Liang-Guo Wang ,  Christopher M. Pohlhammer

Inventor： Gary R. Janik ,  Liang-Guo Wang ,  Christopher M. Pohlhammer

IPC: G01B11/30

CPC classification number: G01B11/306

Abstract: A method for measuring a characteristic of a substrate, including directing an incident beam at an inspection grid of points on the substrate, receiving the reflected beam with a position sensitive detector, measuring the displacement of the reflected beam from its expected location, compiling a database of the displacement measurements, examining the database for effects of a pattern induced anomaly in the displacement measurements, producing an adjusted database, and deriving the characteristic of the substrate from the adjusted database. Thus, pattern induced errors from the displacement measurements are corrected. In this manner, problems with interpreting the reflection angles of a beam in substrate stress analysis equipment are overcome where distortions in the reflection angles are caused by deposition patterns on the substrates.

Abstract translation: 一种用于测量衬底的特性的方法，包括将入射光束定向在衬底上的点的检查栅格处，用位置敏感检测器接收反射光束，测量反射光束从其预期位置的位移，编译数据库 的位移测量，检查数据库中位移测量中模式引起的异常的影响，产生调整后的数据库，以及从调整后的数据库导出底物的特征。 因此，校正来自位移测量的图案诱导误差。 以这种方式，克服了在基板应力分析设备中解释光束的反射角度的问题，其中反射角的失真是由基板上的沉积图案引起的。

公开(公告)号：US07190441B1

公开(公告)日：2007-03-13

申请号：US11021555

申请日：2004-12-22

Applicant: James T. McWhirter ,  Liang-Guo Wang ,  Hidong Kwak ,  Haixing Zou ,  Dan Georgesco ,  Bernard Lautee ,  Jennming James Chen ,  Gary R. Janik ,  Patrick M. Maxton

Inventor： James T. McWhirter ,  Liang-Guo Wang ,  Hidong Kwak ,  Haixing Zou ,  Dan Georgesco ,  Bernard Lautee ,  Jennming James Chen ,  Gary R. Janik ,  Patrick M. Maxton

IPC: G01N1/00

CPC classification number: G01N1/32 ,  G01N1/2813 ,  H01L21/67028

Abstract: Methods and systems for preparing a sample for thin film analysis are provided. One system includes an energy beam source configured to generate an energy beam. The system also includes an energy beam delivery subsystem configured to direct the energy beam to a sample and to modify the energy beam such that the energy beam has a substantially flat-top profile on the sample. The energy beam removes a portion of a contaminant layer on the sample to expose an analysis area of a thin film on the sample. One method includes generating an energy beam and modifying the energy beam such that the energy beam has a substantially flat-top profile. The method also includes directing the energy beam to a sample. The energy beam removes a portion of a contaminant layer on the sample to expose an analysis area of a thin film on the sample.

Abstract translation: 提供了制备用于薄膜分析的样品的方法和系统。 一个系统包括被配置为产生能量束的能量束源。 该系统还包括能量束传送子系统，其配置成将能量束引导到样品并修改能量束，使得能量束在样品上具有基本上平顶的轮廓。 能量束去除样品上的污染物层的一部分以暴露样品上薄膜的分析区域。 一种方法包括产生能量束并修改能量束，使得能量束具有基本平坦的轮廓。 该方法还包括将能量束引导到样品。 能量束去除样品上的污染物层的一部分以暴露样品上薄膜的分析区域。

公开(公告)号：US07039158B1

公开(公告)日：2006-05-02

申请号：US10966468

申请日：2004-10-14

Applicant: Gary R. Janik ,  Jeffrey Moore

Inventor： Gary R. Janik ,  Jeffrey Moore

IPC: G01N23/223

CPC classification number: G01B15/02 ,  G01N23/20

Abstract: A thin film analysis system includes multi-technique analysis capability. Grazing incidence x-ray reflectometry (GXR) can be combined with x-ray fluorescence (XRF) using wavelength-dispersive x-ray spectrometry (WDX) detectors to obtain accurate thickness measurements with GXR and high-resolution composition measurements with XRF using WDX detectors. A single x-ray beam can simultaneously provide the reflected x-rays for GXR and excite the thin film to generate characteristic x-rays for XRF. XRF can be combined with electron microprobe analysis (EMP), enabling XRF for thicker films while allowing the use of the faster EMP for thinner films. The same x-ray detector(s) can be used for both XRF and EMP to minimize component count. EMP can be combined with GXR to obtain rapid composition analysis and accurate thickness measurements, with the two techniques performed simultaneously to maximize throughput.

公开(公告)号：US06999180B1

公开(公告)日：2006-02-14

申请号：US10405528

申请日：2003-04-02

Applicant: Gary R. Janik ,  Hidong Kwak ,  Ying Gao ,  Johannes D. De Veer

Inventor： Gary R. Janik ,  Hidong Kwak ,  Ying Gao ,  Johannes D. De Veer

IPC: G01B9/02 ,  G01B11/28

CPC classification number: G01B11/0675 ,  G01B11/2441

Abstract: An apparatus capable of measuring topography and transparent film thickness of a patterned metal-dielectric layer on a substrate without contact with the layer. A broadband interferometer measures an absolute phase of reflection at a plurality of wavelengths from a plurality of locations within a field of view on the metal-dielectric patterned layer on the substrate, and produces reflection phase data. An analyzer receives the reflection phase data and regresses the transparent film thickness and the topography at each of the plurality of locations from the reflection phase data. In this manner, the apparatus is not confused by the phase changes produced in the reflected light by the transparent layers, because the thickness of the transparent layers are determined by using the reflection phase data from multiple wavelengths. Further, the surface topography of the layer, whether it be opaque or transparent is also determinable. Thus, the present invention provides a means by which both transparent layer thickness and topography can be determined on an array surface of transparent and opaque layers, without contacting the surface of the layers.

Abstract translation: 一种能够测量衬底上图案化的金属 - 电介质层的形貌和透明膜厚度而不与该层接触的装置。 宽带干涉仪测量在基板上的金属 - 电介质图案层上的视场内的多个位置处的多个波长的绝对相位反射，并产生反射相位数据。 分析仪从反射相位数据接收反射相位数据并且在多个位置的每一个处回归透明膜厚度和形貌。 以这种方式，由于通过使用来自多个波长的反射相位数据来确定透明层的厚度，所以该装置不会被由透明层产生的反射光产生的相位变化所困惑。 此外，层的表面形貌，无论是不透明还是透明，也是可以确定的。 因此，本发明提供了一种在透明层和不透明层的阵列表面上可以确定透明层厚度和形貌的手段，而不与层的表面接触。

公开(公告)号：US5530540A

公开(公告)日：1996-06-25

申请号：US285367

申请日：1994-08-03

Applicant: Philip J. Wyatt ,  Gary R. Janik

Inventor： Philip J. Wyatt ,  Gary R. Janik

IPC: G01N15/14 ,  G01N21/05 ,  G01N30/74

CPC classification number: G01N21/05 ,  G01N2015/1413 ,  G01N2021/0346 ,  G01N30/74

Abstract: A modified light scattering cell, and associated method, whereby an eluant of very small dimension transverse to its direction of flow is entrained successively by two sheath flows and presented to a fine light beam that illuminates the entrained eluant as it flows through the light beam. The light scattered by the entrained eluant is collected by detectors outside of a transparent flow cell enveloping the sheath flow entrained eluant. The windows of the transparent flow cell through which the light beam enters and leaves are far removed from the scattering eluant and kept clear of eluant-contained particles by means of flow components that will form subsequently one of the eluant sheath flows employed. The eluant source is typically from a fine capillary such as found in capillary electrophoresis, capillary hydrodynamic fractionation, and flow cytometry applications.

Abstract translation: 一种改进的光散射电池及其相关方法，由此横向于其流动方向的非常小的尺寸的洗脱液被两个鞘流连续地夹带，并呈现给在夹带的洗脱液流过光束时照亮夹带的洗脱液的精细光束。 被夹带的洗脱液散射的光由包裹护套流动的洗脱液的透明流动池外的检测器收集。 光束进入和离开的透明流通池的窗口远离散射洗脱液，并且通过随后将形成所用洗脱剂鞘流之一的流动组分保持清除含有洗脱剂的颗粒。 洗脱源通常来自细毛细管，例如在毛细管电泳，毛细血管流体力学分级分离和流式细胞术应用中发现的。

公开(公告)号：US4765736A

公开(公告)日：1988-08-23

申请号：US889507

申请日：1986-07-24

Applicant: Thomas F. Gallagher ,  Gary R. Janik ,  Clinton B. Carlisle

Inventor： Thomas F. Gallagher ,  Gary R. Janik ,  Clinton B. Carlisle

IPC: G01J3/433 ,  G01N21/39 ,  H03C7/00 ,  G01N21/31

CPC classification number: G01J3/4338

Abstract: FM laser spectroscopy apparatus includes a single modulator for modulating a laser beam with first and second modulation signals (.omega..sub.1, .omega..sub.2). The two modulation signals are generated by mixing a signal from a first oscillator (.omega..sub.1 +.omega..sub.2)/2 and a signal from a second oscillator (.omega..sub.1 -.omega..sub.2)/2 and producing the two modulation signals (.omega..sub.1, .omega..sub.2). The modulator produces three groups of sidebands on the laser beam at the laser frequency plus and minus the two modulation frequencies and at plus and minus the difference between the two modulation signal frequencies. The apparatus provides practical high frequency FM spectroscopy as required for the observation of pressure broadened spectral features.

Abstract translation: FM激光分光装置包括用第一和第二调制信号（ω1，ω2）调制激光束的单个调制器。 通过混合来自第一振荡器（ω1ωω2）/ 2的信号和来自第二振荡器的信号（ω1ω2）/ 2并产生两个调制信号（ω1，ω 2）。 调制器以激光频率加上和减去两个调制频率，并在正负两个调制信号频率之间的差处，在激光束上产生三组边带。 该装置提供实用的高频FM光谱，用于观察压力扩展光谱特征所需。