公开(公告)号：US20170218941A1

公开(公告)日：2017-08-03

申请号：US15409847

申请日：2017-01-19

Applicant: MICROJET TECHNOLOGY CO., LTD.

Inventor： Shih-Chang Chen ,  Chi-Feng Huang ,  Yung-Lung Han ,  Jia-Yu Liao ,  Shou-Hung Chen ,  Che-Wei Huang ,  Hung-Hsin Liao ,  Chao-Chih Chen ,  Jheng-Wei Chen ,  Ying-Lun Chang ,  Chia-Hao Chang ,  Wei-Ming Lee

IPC: F04B45/047 ,  F04B53/10 ,  H01L41/053 ,  H01L41/09 ,  H01L41/187

CPC classification number: F04B45/047 ,  B41J2/17596 ,  F04B43/046 ,  F04B53/10 ,  F16K99/0015 ,  F16K99/0048 ,  F16K2099/0094 ,  H01L41/053 ,  H01L41/09

Abstract: A miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The gas inlet plate includes at least one inlet, at least one convergence channel and a central cavity. A convergence chamber is defined by the central cavity. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric ceramic plate. A gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. When the piezoelectric actuator is driven and after the gas is fed into the miniature fluid control device through the inlet of the gas inlet plate, the gas is sequentially converged to the central cavity through the convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, transferred downwardly through the piezoelectric actuator, and exited from the miniature fluid control device.

公开(公告)号：US20170218936A1

公开(公告)日：2017-08-03

申请号：US15392061

申请日：2016-12-28

Applicant: MICROJET TECHNOLOGY CO., LTD.

Inventor： Shih-Chang Chen ,  Chi-Feng Huang ,  Yung-Lung Han ,  Jia-Yu Liao ,  Shou-Hung Chen ,  Che-Wei Huang ,  Hung-Hsin Liao ,  Chao-Chih Chen ,  Jheng-Wei Chen ,  Ying-Lun Chang ,  Chia-Hao Chang ,  Wei-Ming Lee

IPC: F04B43/04 ,  H01L41/09

Abstract: A miniature fluid control device includes a piezoelectric actuator and a housing. The piezoelectric actuator comprises a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate and has a length not larger than that of the suspension plate. The housing includes a gas collecting plate and a base. The gas collecting plate is a frame body with a sidewall and comprises a plurality of perforations. The base seals a bottom of the piezoelectric actuator and has a central aperture corresponding to the middle portion of the suspension plate. When the voltage is applied to the piezoelectric actuator, the suspension plate is permitted to undergo the curvy vibration, the fluid is transferred from the central aperture of the base to the gas-collecting chamber, and exited from the perforations.