Abstract:
A lithographic projection apparatus is disclosed for use with an immersion liquid positioned between the projection system and a substrate. Several methods and mechanism are disclosed to protect components of the projection system, substrate table and a liquid confinement system. These include providing a protective coating on a final element of the projection system as well as providing one or more sacrificial bodies upstream of the components. A two component final optical element of CaF2 is also disclosed.
Abstract:
An optical information storage system using optical storage media including multiple data layers or stacks wherein each of the multiple data stacks has a storage density comparable to a conventional single layer optical disk. The optical data storage system comprises an optical medium having a single dedicated servo layer and multiple data stacks which each contain an embedded servo format, a servo laser beam positioned to maintain a first focus point on the dedicated servo reference layer, a read-write laser beam positioned to maintain a second focus point on one of the data stacks, a first, dedicated servo system which provides focus and tracking error correction according to error signals generated from the dedicated servo layer, and a second, embedded servo system which provides focus and tracking error correction according to error signals generated from the data stacks. The dedicated servo layer, in different embodiments of the invention, may be positioned either below or above the data stacks in the optical medium, or interposed between data stacks. The data stacks may comprise discrete physical data layers or “virtual” data layers defined by a format hologram. The servo and read-write lasers may differ in wavelength and/or polarization.
Abstract:
An optical data storage system and method comprising a photopolymer medium having generally a polymerizable monomer, an active binder, a first, hologram recording polymerization initiator, and a second, data writing polymerization initiator. The monomer is preferably a cationic ring-opening monomer. The hologram recording polymerization initiator preferably comprises a sensitizer and photoacid generator which initiate a first polymerization in the medium which defines a format hologram. The format hologram recording is carried out via interference of a signal and reference beam, with the sensitizer being specific for the wavelength(s) of the signal and reference beams. The hologram recording polymerization is only partial and does not consume all of the monomer present in the photopolymer medium. A second stage, a data writing polymerization initiator, specific to a data writing beam, locally advances polymerization at selected data storage locations to alter the previously recorded format hologram, resulting in optical data storage as localized alterations in the format hologram.
Abstract:
A system for tuning the refractive index of immersion liquid in an immersion lithographic apparatus is disclosed. Two or more immersion liquids of different refractive index are mixed together in order to achieve a desired refractive index. Further, the fluids may be conditioned and treated to maintain optical characteristics.
Abstract:
An electrostatic clamp for use in a lithographic apparatus includes burls and an electrode surrounded by an insulator and/or a dielectric material between adjacent burls. In an embodiment, two or more layers of dielectric material are provided between adjacent burls and surround an electrode provided between adjacent burls. The electrostatic clamp may be used to clamp an object to an object support in a lithographic apparatus.
Abstract:
A system for tuning the refractive index of immersion liquid in an immersion lithographic apparatus is disclosed. Two or more immersion liquids of different refractive index are mixed together in order to achieve a desired refractive index. Further, the fluids may be conditioned and treated to maintain optical characteristics.
Abstract:
A lithographic apparatus is provided in which exposure is carried out by projecting through an aqueous solution of alkali metal halide(s), the solution being in contact with the substrate to be exposed.
Abstract:
A wafer chuck for use in a lithographic apparatus, which includes a low-thermal expansion glass ceramic substrate, a silicon silicon carbide layer, and a bonding layer comprising silicate having a strength of at least about 5 megapascals, the bonding layer attaching the silicon silicon carbide layer to the substrate is described. Also, a method of forming a wafer chuck for use in a lithographic apparatus, which includes coating a portion of one or both of a low-thermal expansion glass ceramic substrate and a silicon silicon carbide layer with a bonding solution, and contacting the substrate and the silicon silicon carbide layer to bond the substrate and the silicon silicon carbide layer together is described.
Abstract:
A wafer chuck for use in a lithographic apparatus, which includes a low-thermal expansion glass ceramic substrate, a silicon silicon carbide layer, and a bonding layer comprising silicate having a strength of at least about 5 megapascals, the bonding layer attaching the silicon silicon carbide layer to the substrate is described. Also, a method of forming a wafer chuck for use in a lithographic apparatus, which includes coating a portion of one or both of a low-thermal expansion glass ceramic substrate and a silicon silicon carbide layer with a bonding solution, and contacting the substrate and the silicon silicon carbide layer to bond the substrate and the silicon silicon carbide layer together is described.
Abstract:
Lithographic Apparatus and Device Manufacturing Method A system for tuning the refractive index of immersion liquid in an immersion lithographic apparatus is disclosed. Two or more immersion liquids of different refractive index are mixed together in order to achieve a desired refractive index. Further, the fluids may be conditioned and treated to maintain optical characteristics.