Optical data storage system with multiple layer media
    22.
    发明授权
    Optical data storage system with multiple layer media 失效
    具有多层介质的光数据存储系统

    公开(公告)号:US06574174B1

    公开(公告)日:2003-06-03

    申请号:US09549075

    申请日:2000-04-15

    Abstract: An optical information storage system using optical storage media including multiple data layers or stacks wherein each of the multiple data stacks has a storage density comparable to a conventional single layer optical disk. The optical data storage system comprises an optical medium having a single dedicated servo layer and multiple data stacks which each contain an embedded servo format, a servo laser beam positioned to maintain a first focus point on the dedicated servo reference layer, a read-write laser beam positioned to maintain a second focus point on one of the data stacks, a first, dedicated servo system which provides focus and tracking error correction according to error signals generated from the dedicated servo layer, and a second, embedded servo system which provides focus and tracking error correction according to error signals generated from the data stacks. The dedicated servo layer, in different embodiments of the invention, may be positioned either below or above the data stacks in the optical medium, or interposed between data stacks. The data stacks may comprise discrete physical data layers or “virtual” data layers defined by a format hologram. The servo and read-write lasers may differ in wavelength and/or polarization.

    Abstract translation: 一种使用包括多个数据层或堆叠的光学存储介质的光学信息存储系统,其中多个数据堆栈中的每一个具有与常规单层光盘相当的存储密度。 光学数据存储系统包括具有单个专用伺服层的光学介质和各自包含嵌入式伺服格式的多个数据堆栈,定位成将第一焦点保持在专用伺服参考层上的伺服激光束,读写激光器 光束定位成在数据堆叠之一上保持第二焦点,第一专用伺服系统,其根据从专用伺服层产生的误差信号提供聚焦和跟踪误差校正;以及第二嵌入式伺服系统,其提供焦点和 根据从数据堆产生的误差信号进行跟踪误差校正。 在本发明的不同实施例中的专用伺服层可以位于光学介质中的数据堆的下方或上方,或者位于数据堆之间。 数据堆可以包括由格式全息图定义的离散物理数据层或“虚拟”数据层。 伺服和读写激光器的波长和/或极化可能不同。

    Optical storage media and method for optical data storage via local changes in reflectivity of a format grating
    23.
    发明授权
    Optical storage media and method for optical data storage via local changes in reflectivity of a format grating 有权
    用于光学数据存储的光存储介质和方法,通过格式光栅的反射率的局部变化

    公开(公告)号:US06512606B1

    公开(公告)日:2003-01-28

    申请号:US09364324

    申请日:1999-07-29

    Abstract: An optical data storage system and method comprising a photopolymer medium having generally a polymerizable monomer, an active binder, a first, hologram recording polymerization initiator, and a second, data writing polymerization initiator. The monomer is preferably a cationic ring-opening monomer. The hologram recording polymerization initiator preferably comprises a sensitizer and photoacid generator which initiate a first polymerization in the medium which defines a format hologram. The format hologram recording is carried out via interference of a signal and reference beam, with the sensitizer being specific for the wavelength(s) of the signal and reference beams. The hologram recording polymerization is only partial and does not consume all of the monomer present in the photopolymer medium. A second stage, a data writing polymerization initiator, specific to a data writing beam, locally advances polymerization at selected data storage locations to alter the previously recorded format hologram, resulting in optical data storage as localized alterations in the format hologram.

    Abstract translation: 一种光学数据存储系统和方法,其包括通常具有可聚合单体的光聚合物介质,活性粘合剂,第一全息记录聚合引发剂和第二数据书写聚合引发剂。 单体优选为阳离子开环单体。 全息记录聚合引发剂优选包括敏化剂和光致酸产生剂,其在介质中引发第一次聚合,其定义格式全息图。 格式全息图记录通过信号和参考光束的干涉进行,敏化剂特定于信号和参考光束的波长。 全息记录聚合仅仅是部分的,并且不消耗光聚合物介质中存在的所有单体。 第二阶段,特定于数据写入光束的数据写入聚合引发器在选定的数据存储位置局部地前进聚合以改变先前记录的格式全息图,导致光学数据存储为格式全息图中的局部改变。

    Bonding Silicon Silicon Carbide to Glass Ceramics
    28.
    发明申请
    Bonding Silicon Silicon Carbide to Glass Ceramics 失效
    将硅碳化硅结合到玻璃陶瓷

    公开(公告)号:US20100128242A1

    公开(公告)日:2010-05-27

    申请号:US12700049

    申请日:2010-02-04

    Abstract: A wafer chuck for use in a lithographic apparatus, which includes a low-thermal expansion glass ceramic substrate, a silicon silicon carbide layer, and a bonding layer comprising silicate having a strength of at least about 5 megapascals, the bonding layer attaching the silicon silicon carbide layer to the substrate is described. Also, a method of forming a wafer chuck for use in a lithographic apparatus, which includes coating a portion of one or both of a low-thermal expansion glass ceramic substrate and a silicon silicon carbide layer with a bonding solution, and contacting the substrate and the silicon silicon carbide layer to bond the substrate and the silicon silicon carbide layer together is described.

    Abstract translation: 一种用于光刻设备的晶片卡盘,其包括低热膨胀玻璃陶瓷基板,硅碳化硅层和包括具有至少约5兆帕的强度的硅酸盐的粘合层,所述粘合层将硅硅 描述了到基底的碳化物层。 另外,一种形成用于光刻设备的晶片卡盘的方法,其包括用粘合溶液涂覆低热膨胀玻璃陶瓷基板和硅碳化硅中的一个或两个的一部分,并使基板和 描述了将基板和硅碳化硅层结合在一起的硅碳化硅层。

    Bonding silicon silicon carbide to glass ceramics
    29.
    发明授权
    Bonding silicon silicon carbide to glass ceramics 失效
    将硅碳化硅粘合到玻璃陶瓷上

    公开(公告)号:US07678458B2

    公开(公告)日:2010-03-16

    申请号:US11626747

    申请日:2007-01-24

    Abstract: A wafer chuck for use in a lithographic apparatus, which includes a low-thermal expansion glass ceramic substrate, a silicon silicon carbide layer, and a bonding layer comprising silicate having a strength of at least about 5 megapascals, the bonding layer attaching the silicon silicon carbide layer to the substrate is described. Also, a method of forming a wafer chuck for use in a lithographic apparatus, which includes coating a portion of one or both of a low-thermal expansion glass ceramic substrate and a silicon silicon carbide layer with a bonding solution, and contacting the substrate and the silicon silicon carbide layer to bond the substrate and the silicon silicon carbide layer together is described.

    Abstract translation: 一种用于光刻设备的晶片卡盘,其包括低热膨胀玻璃陶瓷基板,硅碳化硅层和包括具有至少约5兆帕的强度的硅酸盐的粘合层,所述粘合层将硅硅 描述了到基底的碳化物层。 另外,一种形成用于光刻设备的晶片卡盘的方法,其包括用粘合溶液涂覆低热膨胀玻璃陶瓷基板和硅碳化硅中的一个或两个的一部分,并使基板和 描述了将基板和硅碳化硅层结合在一起的硅碳化硅层。

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