公开(公告)号：US20190011394A1

公开(公告)日：2019-01-10

申请号：US16012207

申请日：2018-06-19

Applicant: Microjet Technology Co., Ltd.

Inventor： Hao-Jan Mou ,  Ta-Wei Hsueh ,  Ying-Lun Chang ,  Rong-Ho Yu ,  Cheng-Ming Chang ,  Hsien-Chung Tai ,  Wen-Hsiung Liao ,  Yung-Lung Han ,  Chi-Feng Huang

IPC: G01N27/407 ,  G01D21/02

Abstract: An actuating and sensing module includes a substrate, at least one sensor and at least one actuating device. The at least one sensor is disposed on the substrate. The at least one actuating device is disposed on the substrate, and has at least one guiding channel between the actuating device and the substrate. The at least one guiding channel is disposed on one side of the at least one sensor. When the at least one actuating device is enabled, a fluid is transferred to the at least one sensor through the at least one guiding channel, so that the fluid is sensed by the at least one sensor.