公开(公告)号：US20210287990A1

公开(公告)日：2021-09-16

申请号：US16820046

申请日：2020-03-16

Applicant: Micron Technology, Inc.

Inventor： Jordan D. Greenlee ,  Christian George Emor ,  Luca Fumagalli ,  John D. Hopkins ,  Rita J. Klein ,  Christopher W. Petz ,  Everett A. McTeer

IPC: H01L23/535 ,  H01L23/532 ,  H01L21/768 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/1157 ,  H01L27/11582

Abstract: A microelectronic device comprises a first conductive structure, a barrier structure, a conductive liner structure, and a second conductive structure. The first conductive structure is within a first filled opening in a first dielectric structure. The barrier structure is within the first filled opening in the first dielectric structure and vertically overlies the first conductive structure. The conductive liner structure is on the barrier structure and is within a second filled opening in a second dielectric structure vertically overlying the first dielectric structure. The second conductive structure vertically overlies and is horizontally surrounded by the conductive liner structure within the second filled opening in the second dielectric structure. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.

公开(公告)号：US20150263281A1

公开(公告)日：2015-09-17

申请号：US14727106

申请日：2015-06-01

Applicant: Micron Technology, Inc.

Inventor： Andrea Gotti ,  Luca Fumagalli

IPC: H01L45/00

CPC classification number: H01L45/1293 ,  H01L27/2427 ,  H01L27/2463 ,  H01L45/06 ,  H01L45/1253 ,  H01L45/143 ,  H01L45/144 ,  H01L45/16 ,  H01L45/1616 ,  H01L45/1625

Abstract: A phase change memory cell comprising a first chalcogenide compound on a first electrode, a first nitrogenated carbon material directly on the first chalcogenide compound, a second chalcogenide compound directly on the first nitrogenated carbon material, and a second nitrogenated carbon material directly on the second chalcogenide compound and directly on a second electrode. Other phase change memory cells are described. A method of forming a phase change memory cell and a phase change memory device are also described.

Abstract translation: 一种相变存储单元，包括在第一电极上的第一硫族化合物，直接位于第一硫属化物化合物上的第一含氮碳材料，直接位于第一氮化碳材料上的第二硫族化合物，以及直接位于第二硫族化物上的第二含氮碳材料 化合物并直接在第二电极上。 其他相变存储单元被描述。 还描述了形成相变存储单元和相变存储器件的方法。