MICROMACHINED PIEZOELECTRIC X-AXIS GYROSCOPE
    21.
    发明申请
    MICROMACHINED PIEZOELECTRIC X-AXIS GYROSCOPE 有权
    微型压电X轴晶圆

    公开(公告)号:US20140013557A1

    公开(公告)日:2014-01-16

    申请号:US13956147

    申请日:2013-07-31

    Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a sense frame, a proof mass disposed outside the sense frame, a pair of anchors and a plurality of drive beams. The plurality of drive beams may be disposed on opposing sides of the sense frame and between the pair of anchors. The drive beams may connect the sense frame to the proof mass. The drive beams may be configured to cause torsional oscillations of the proof mass substantially in a first plane of the drive beams. The sense frame may be substantially decoupled from the drive motions of the proof mass. Such devices may be included in a mobile device, such as a mobile display device.

    Abstract translation: 本公开提供了系统,方法和装置,包括在计算机存储介质上编码的用于制造和使用陀螺仪的计算机程序。 这种陀螺仪可以包括检测框架,设置在感测框架外部的检测质量块,一对锚固件和多个驱动梁。 多个驱动梁可以设置在感测框架的相对侧之间并且在一对锚固件之间。 驱动梁可将感应框架连接到检测质量块。 驱动梁可以被配置成基本上在驱动梁的第一平面中引起防弹块的扭转振荡。 感测框架可以与证明质量块的驱动运动基本上分离。 这样的设备可以被包括在诸如移动显示设备的移动设备中。

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