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公开(公告)号：US12032265B2
公开(公告)日：2024-07-09
申请号：US18317705
申请日：2023-05-15
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor： Frédéric Boeuf , Cyrille Barrera
CPC classification number: G02F1/2257 , G02F1/025 , G02F1/035 , G02F2202/103
Abstract: A semiconductor device can be formed by etching a cavity in a first silicon layer that overlies an insulating layer, epitaxially growing a germanium or silicon-germanium layer in the cavity, epitaxially growing a second silicon layer in the cavity, etching the second silicon layer and the germanium or silicon-germanium layer to the floor of the cavity to define a first strip in the second silicon layer and a second strip in the germanium or silicon-germanium layer, selectively etching a portion of the second strip to decrease the width of the second strip, filling cavity portions arranged on either side of the first and second strips with an insulator, depositing an upper insulating layer over the first and second strips, and bonding a layer of III-V material to the upper insulating layer.
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公开(公告)号：US11644697B2
公开(公告)日：2023-05-09
申请号：US16988480
申请日：2020-08-07
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor： Sébastien Cremer , Frédéric Boeuf , Stephane Monfray
CPC classification number: G02F1/035 , G02B6/12004 , G02F1/0147 , G02F2201/063
Abstract: The present disclosure relates to a method comprising the following steps: a) forming a waveguide from a first material, the waveguide being configured to guide an optical signal; b) forming a layer made of a second material that is electrically conductive and transparent to a wavelength of the optical signal, steps a) and b) being implemented such that the layer made of the second material is in contact with at least one of the faces of the waveguide, or is separated from the at least one of the faces by a distance of less than half, preferably less than a quarter, of the wavelength of the optical signal. The application further relates to a phase modulator, in particular obtained by such a method.
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公开(公告)号：US20210055579A1
公开(公告)日：2021-02-25
申请号：US16988480
申请日：2020-08-07
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor： Sébastien Cremer , Frédéric Boeuf , Stephane Monfray
IPC: G02F1/035
Abstract: The present disclosure relates to a method comprising the following steps: a) forming a waveguide from a first material, the waveguide being configured to guide an optical signal; b) forming a layer made of a second material that is electrically conductive and transparent to a wavelength of the optical signal, steps a) and b) being implemented such that the layer made of the second material is in contact with at least one of the faces of the waveguide, or is separated from the at least one of the faces by a distance of less than half, preferably less than a quarter, of the wavelength of the optical signal. The application further relates to a phase modulator, in particular obtained by such a method.
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公开(公告)号：US10393958B2
公开(公告)日：2019-08-27
申请号：US16029365
申请日：2018-07-06
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor： Frédéric Boeuf , Charles Baudot
Abstract: A method for making an electro-optic device includes forming a first photonic device having a first material in a first photonic layer over a substrate layer. A second photonic layer with a second photonic device is formed over the first photonic layer and includes a second material different than the first material. A dielectric layer is formed over the second photonic layer. A first electrically conductive via extending through the dielectric layer and the second photonic layer is formed so as to couple to the first photonic device. A second electrically conductive via extending through the dielectric layer and coupling to the second photonic device is formed. A third electrically conductive via extending through the dielectric layer, the second photonic layer, and the first photonic layer is formed so as to couple to the substrate layer.
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