公开(公告)号：US09784688B2

公开(公告)日：2017-10-10

申请号：US14046648

申请日：2013-10-04

Applicant: Seagate Technology LLC

Inventor： Joachim Walter Ahner ,  David M. Tung ,  Samuel Kah Hean Wong ,  Henry Luis Lott ,  Stephen Keith McLaurin ,  Maissarath Nassirou ,  Florin Zavaliche

IPC: G01N21/88 ,  H04N7/18 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N2201/0636 ,  H04N7/18

Abstract: Provided herein is an apparatus, including a reflective surface configured to reflect photons onto a surface of an article, a stage configured to support the article, and an assembly. The assembly is configured to radiate photons through the article to the reflective surface. The assembly is further configured to image the article with irradiance of the photons.

公开(公告)号：US09766179B2

公开(公告)日：2017-09-19

申请号：US15053946

申请日：2016-02-25

Applicant: Seagate Technology LLC

Inventor： Joachim Walter Ahner ,  Samuel Kah Hean Wong ,  Maissarath Nassirou ,  Henry Luis Lott ,  David M. Tung ,  Florin Zavaliche ,  Stephen Keith McLaurin

IPC: G01N21/00 ,  G01N21/47 ,  G01N21/95

CPC classification number: G01N21/4738 ,  G01N21/95 ,  G01N2021/4764 ,  G01N2021/4792 ,  G01N2201/0635 ,  G01N2201/0683

Abstract: Provided herein is an apparatus, including an optical characterization device; a photon detector array configured to sequentially receive a first set of photons scattered from surface features of an article and a second set of photons scattered from surface features of the article and subsequently processed by the optical characterization device; and a chemical characterization means for chemically characterizing the surface features of the article, wherein the chemical characterization means is configured for processing the first set of photons received by the photon detector array and the second set of photons received by the photon detector array.

公开(公告)号：US20160077018A1

公开(公告)日：2016-03-17

申请号：US14927308

申请日：2015-10-29

Applicant: Seagate Technology LLC

Inventor： Joachim Walter Ahner ,  Stephen Keith McLaurin ,  Samuel Kah Hean Wong ,  Henry Luis Lott

IPC: G01N21/88

CPC classification number: G01N21/8806 ,  G01B11/24 ,  G01N21/00 ,  G01N21/17 ,  G01N21/88 ,  G01N2201/061

Abstract: Provided herein is an apparatus, including two photon emitters and a photon detector array. The two photon emitters are configured to emit photons onto an entire surface of an article. The photon detector array includes a number of photon detectors configured to detect photons scattered from features in the entire surface of the article, wherein the features are less than 500 nm in their largest dimension.

Abstract translation: 本文提供的装置包括两个光子发射器和光子检测器阵列。 两个光子发射器被配置为将光子发射到物品的整个表面上。 光子检测器阵列包括多个光子检测器，其被配置为检测从制品的整个表面中的特征散射的光子，其中特征在其最大尺寸上小于500nm。

公开(公告)号：US20140098370A1

公开(公告)日：2014-04-10

申请号：US14046596

申请日：2013-10-04

Applicant: Seagate Technology LLC

Inventor： Joachim Walter Ahner ,  David M. Tung ,  Samuel Kah Hean Wong ,  Henry Luis Lott ,  Stephen Keith McLaurin ,  Maissarath Nassirou ,  Florin Zavaliche

IPC: G01N21/55

CPC classification number: G01N21/55 ,  G01N21/4738 ,  G01N21/95

Abstract: Provided herein is an apparatus, comprising a first photon emitter configured to emit photons into an article from a circumferential edge of the article, and a photon detector array configured to detect photons scattered from features of the article.

Abstract translation: 本文提供了一种装置，其包括被配置为从制品的周边缘将光子发射到制品中的第一光子发射器，以及被配置为检测从制品的特征散射的光子的光子检测器阵列。

公开(公告)号：US20140043621A1

公开(公告)日：2014-02-13

申请号：US13931266

申请日：2013-06-28

Applicant: Seagate Technology LLC

Inventor： Joachim Walter Ahner ,  Stephen Keith McLaurin ,  Samuel Kah Hean Wong ,  Henry Luis Lott

IPC: G01B11/24

CPC classification number: G01N21/8806 ,  G01B11/24 ,  G01N21/00 ,  G01N21/17 ,  G01N21/88 ,  G01N2201/061

Abstract: Provided herein is an apparatus, including a photon detector array configured to receive photons scattered from features in a surface of an article; and a characterization means for characterizing the features in the surface of the article, wherein the characterization means contrasts signals from the photon detector array corresponding to two sets of photons scattered from features in the surface of the article, and the two sets of photons respectively originate from photon emitters at different locations.

Abstract translation: 本文提供了一种装置，包括光子检测器阵列，其构造成接收从制品表面中的特征散射的光子; 以及用于表征制品表面中的特征的表征装置，其中所述表征装置对比来自所述光子检测器阵列的对应于从所述制品的表面中的特征散射的两组光子的信号，并且所述两组光子分别起始 来自不同地点的光子发射器。