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    Ozone system for multi-chamber tools
    21.
    发明授权
    Ozone system for multi-chamber tools 有权
    臭氧系统多室工具

    公开(公告)号：US07892502B2

    公开(公告)日：2011-02-22

    申请号：US11482508

    申请日：2006-07-07

    Applicant: Vitaly J. Berkman ,  Thomas J. Ryan

    Inventor： Vitaly J. Berkman ,  Thomas J. Ryan

    IPC: B01J19/08

    CPC classification number: C01B13/11 ,  C01B2201/40 ,  C01B2201/64 ,  C01B2201/90 ,  G05D11/138 ,  Y10T137/0318

    Abstract: An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects an EVENT (i.e., one of the chambers in the multi-chamber tool coming on-line or off-line) and in response provides a power instruction to the ozone generator in accordance with a predictive control algorithm. The first concentration controller has a fast (i.e, about 1 second) response time. The second concentration controller is masked from the ozone generator during the EVENT, but otherwise controls the generator after an interval of time has lapsed after the EVENT. The second concentration controller has a slower response time than the first concentration controller, however the second concentration controller provides the system with long-term stability and can be used to provide updated data to the predictive control algorithm.

    Abstract translation: 一种用于控制与多室工具相关的臭氧浓度的改进的系统和方法。 该系统和方法涉及与臭氧发生器组合的第一和第二浓度控制器。 第一集中控制器检测EVENT（即，多室工具中的一个室内进行在线或离线），并且响应于根据预测控制算法向臭氧发生器提供功率指令。 第一个浓度控制器具有快速（即约1秒）响应时间。 在EVENT期间，第二个浓度控制器被从臭氧发生器屏蔽，但是在EVENT之后经过了一段时间后才控制发电机。 第二浓度控制器具有比第一浓度控制器更慢的响应时间，然而第二浓度控制器为系统提供长期稳定性，并且可以用于向预测控制算法提供更新的数据。

    N-phase ozone generator
    22.
    发明授权
    N-phase ozone generator 有权
    N相臭氧发生器

    公开(公告)号：US07744825B2

    公开(公告)日：2010-06-29

    申请号：US10581044

    申请日：2004-09-29

    Applicant: Yoichiro Tabata ,  Yujiro Okihara ,  Masayuki Ishikawa ,  Tetsuya Saitsu

    Inventor： Yoichiro Tabata ,  Yujiro Okihara ,  Masayuki Ishikawa ,  Tetsuya Saitsu

    IPC: B01J19/08

    CPC classification number: H02M7/48 ,  C01B13/115 ,  C01B2201/12 ,  C01B2201/40 ,  C01B2201/76 ,  C01B2201/84 ,  C01B2201/90

    Abstract: A compact, inexpensive, large-capacity ozone generator with increased ease of apparatus maintenance. An ozone power supply includes an n-phase inverter for obtaining an AC voltage having a predetermined frequency and outputting an n-phase AC voltage waveform; n reactors and an n-phase transformer for converting an n-phase AC voltage to a high AC voltage; n high-voltage terminals for outputting the n-phase high AC voltage; and a low-voltage terminal having a common potential. Ozone generator units are electrically divided into n pieces within a discharge chamber. Each ozone generator unit includes n high-voltage electrode terminals and one low-voltage electrode terminal, common to all ozone generator units. Each ozone generator unit supports an n-phase AC discharge to generate ozone.

    Abstract translation: 一种紧凑，便宜，大容量的臭氧发生器，提高了设备​​维护的便利性。 臭氧电源包括用于获得具有预定频率的AC电压并输出n相交流电压波形的n相逆变器; n个电抗器和用于将n相交流电压转换成高交流电压的n相变压器; n个高压端子，用于输出n相高交流电压; 以及具有共同电位的低电压端子。 臭氧发生器单元在放电室内电分为n个片。 每个臭氧发生器单元包括n个高压电极端子和一个低压电极端子，它们与所有臭氧发生器单元共用。 每个臭氧发生器单元支持n相AC放电以产生臭氧。

    Modular ozone generator system
    23.
    发明授权
    Modular ozone generator system 有权
    模块化臭氧发生器系统

    公开(公告)号：US06994832B2

    公开(公告)日：2006-02-07

    申请号：US10311191

    申请日：2001-06-15

    Applicant: Jan Borgström

    Inventor： Jan Borgström

    IPC: B01J19/12

    CPC classification number: C01B13/11 ,  C01B2201/12 ,  C01B2201/40 ,  C01B2201/70

    Abstract: An ozone generator system (1) in which a multitude of plate type ozone generators (2) are arranged adjacent to each other in a block (3). Each ozone generator comprises a chamber, adapted for converting oxygen to ozone by a corona discharge, and each chamber is provided with an inlet for oxygen or an oxygen-rich gas and an outlet for ozone. Said ozone generators are arranged in a block module (26) in which they are affixed by a block rack (4). Said block rack comprises an inlet port (5) adapted for introduction of oxygen gas, and an outlet port (6) adapted for discharge of ozone created through conversion within the generators comprised in the block module. A multitude of first conduits (7), each running between said inlet port and one chamber inlet, and a multitude of second conduits (8), each running between said outlet port and one chamber outlet, are provided within said block rack. Said conduits are arranged so that the flow distance between the inlet and outlet ports has the same length, regardless of which generator the introduced gas passes through, thereby achieving an even gas pressure and gas flow, through parallel connection of the generators.

    Abstract translation: 一种臭氧发生器系统（1），其中多个板式臭氧发生器（2）在块（3）中彼此相邻布置。 每个臭氧发生器包括适于通过电晕放电将氧气转化为臭氧的室，并且每个室设置有用于氧气或富氧气体的入口和用于臭氧的出口。 所述臭氧发生器布置在块模块（26）中，其中它们由块架（4）固定。 所述块架包括适于引入氧气的入口端口（5）和适于通过在块模块中包括的发电机内通过转换而产生的排出臭氧的出口端口（6）。 每个在所述入口端口和一个室入口之间运行的多个第一管道（7）和在所述出口和一个室出口之间运行的多个第二管道（8）设置在所述块架内。 所述管道布置成使得入口端口和出口端口之间的流动距离具有相同的长度，而不管引入的气体通过哪种发生器，从而通过发生器的并联连接实现均匀的气体压力和气体流量。

    Air purifying system
    27.
    发明授权
    Air purifying system 失效
    空气净化系统

    公开(公告)号：US5087428A

    公开(公告)日：1992-02-11

    申请号：US530207

    申请日：1990-05-30

    Applicant: David Fletcher ,  Barry Welford

    Inventor： David Fletcher ,  Barry Welford

    IPC: B01D53/32 ,  B01D53/38 ,  B01D53/74 ,  B01J19/08 ,  C01B13/11

    CPC classification number: B01D53/32 ,  C01B13/11 ,  C01B2201/34 ,  C01B2201/40

    Abstract: A closed container has openings at an input end for drawing air into the container and openings at the output end for passing air out of the container. An ozone generator is disposed inside the container adjacent the input end and a corona generator is disposed in the container adjacent the output end. The corona generator includes a dielectric made of a material having a dielectric constant of 1000 or greater. Impure air which is drawn in at the input end passes over the ozone generator whereby the ozone reacts with the impurities of the impure air to provide purified air. The purified air with remaining ozone is passed over the corona generator means to destroy the remaining ozone.

    Abstract translation: 密封容器在输入端具有开口，用于将空气抽入容器和输出端的开口，以将空气从容器中排出。 臭氧发生器设置在与容纳物的输入端相邻的容器的内部，电晕发生器设置在与输出端相邻的容器中。 电晕发生器包括由介电常数为1000或更大的材料制成的电介质。 在输入端吸入的杂质空气通过臭氧发生器，由此臭氧与不纯的空气的杂质反应以提供净化的空气。 具有残留臭氧的净化空气通过电晕发生器装置以破坏剩余的臭氧。

    Ozone cell with cooling bellows
    28.
    发明授权
    Ozone cell with cooling bellows 失效
    带冷却波纹管的臭氧电池

    公开(公告)号：US5002739A

    公开(公告)日：1991-03-26

    申请号：US580683

    申请日：1990-09-11

    Applicant: Lee C. Ditzler ,  Jerry F. Choy ,  Ronald F. Lemberger

    Inventor： Lee C. Ditzler ,  Jerry F. Choy ,  Ronald F. Lemberger

    IPC: C01B13/11

    CPC classification number: C01B13/11 ,  C01B2201/14 ,  C01B2201/22 ,  C01B2201/32 ,  C01B2201/40 ,  C01B2201/74

    Abstract: An ozone generation cell operating by corona discharge in an annular passage with regions of corona discharge alternating with corona-free regions where cooling takes place is improved by the incorporation of corrugated, deformable heat transfer walls in the corona-free regions. These corrugated walls impart flexibility to the structure, and thereby relieve the strain on the structural components. This permits the heat transfer wall, which is the outer of the two cylinders defining the annular passage, to center the inner of the two cylinders inside it and thus achieve a more uniform gap width in the corona regions. This is of value since the inner cylinder is preferably made of a ceramic material and not perfectly straight. The corrugations also promote turbulent flow in both the coolant medium and the gas mixture in which the ozone is generated.

    Abstract translation: 在环形通道中通过电晕放电操作的臭氧发生电池，其中电晕放电区域与发生冷却的无电晕区交替，通过在无电晕区域中并入波纹状可变形传热壁而得到改善。 这些波纹状壁赋予结构灵活性，从而减轻结构部件的应变。 这允许限定环形通道的两个气缸的外部的传热壁将两个气缸的内部定位在其内部，从而在电晕区域中实现更均匀的间隙宽度。 这是有价值的，因为内筒优选地由陶瓷材料制成并且不是完全直的。 波纹也促进冷却剂介质和产生臭氧的气体混合物中的湍流。

    Corona reaction system
    29.
    发明授权
    Corona reaction system 失效
    电晕反应体系

    公开(公告)号：US4213838A

    公开(公告)日：1980-07-22

    申请号：US28451

    申请日：1979-04-09

    Applicant: Frank E. Lowther

    Inventor： Frank E. Lowther

    IPC: B01J19/08 ,  C01B13/11 ,  H01T19/00

    CPC classification number: C01B13/11 ,  B01J19/088 ,  H01T19/00 ,  B01J2219/0849 ,  C01B2201/12 ,  C01B2201/40 ,  C01B2201/70 ,  C01B2201/72 ,  C01B2201/76

    Abstract: A corona reaction system of the type wherein substantially all of the heat generated by corona discharge is removed from the system by gas flow therethrough. A corona discharge gas flow path is provided which is between 2.0 and 10 inches in length and bounded by discharge electrodes spaced apart at a distance of between 0.01 and 0.250 inch, whereby low pressure drop over the gas flow path is maintained under conditions of high power density and gas temperature.

    Abstract translation: 这种类型的电晕反应系统，其中基本上由电晕放电产生的热量通过气流从系统中除去。 提供电晕放电气体流动通道，其长度在2.0和10英寸之间，并且由在0.01至0.250英寸之间间隔开的放电电极限定，从而在高功率条件下保持气流通道上的低压降 密度和气体温度。

    Corona reaction system
    30.
    发明授权
    Corona reaction system 失效
    电晕反应体系

    公开(公告)号：US3996122A

    公开(公告)日：1976-12-07

    申请号：US579739

    申请日：1975-02-20

    Applicant: Frank E. Lowther

    Inventor： Frank E. Lowther

    IPC: B01J19/08 ,  C01B13/11 ,  H01T19/00

    CPC classification number: B01J19/088 ,  C01B13/11 ,  H01T19/00 ,  B01J2219/0849 ,  C01B2201/12 ,  C01B2201/40 ,  C01B2201/70 ,  C01B2201/72 ,  C01B2201/76

    Abstract: A system for subjecting gas to high voltage corona wherein a gas is sequentially (serially) exposed to a plurality of corona generation zones. In a preferred system, the gas is conducted through several corona generators which are connected in series by gas conduits, and the gas within the system is cooled subsequent to each exposure to corona.

    Abstract translation: 一种用于对气体进行高压电晕的系统，其中气体依次（串联地）暴露于多个电晕发生区。 在优选的系统中，气体通过几个通过气体导管串联连接的电晕发生器传导，并且每次暴露于电晕后，系统内的气体被冷却。

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