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公开(公告)号:US20060049738A1
公开(公告)日:2006-03-09
申请号:US10538780
申请日:2004-12-14
Applicant: Yoichiro Tabata , Yujiro Okihara , Masayuki Tetsuyasaitsu , Hatsuo Yotsumoto
Inventor: Yoichiro Tabata , Yujiro Okihara , Masayuki Tetsuyasaitsu , Hatsuo Yotsumoto
IPC: H01J27/26
CPC classification number: C01B13/11 , B01J35/004 , C01B2201/12 , C01B2201/32 , C01B2201/34 , C01B2201/60 , C01B2201/64 , C01B2201/70 , C01B2201/80 , C01B2201/82 , C01B2201/90
Abstract: An ozone generating system and an ozone generating method producing ozone at a high concentration and operating at high efficiency, in which a raw material gas with no nitrogen added and mainly containing oxygen is used. The amount of generation of NOX by-product is null. A raw material gas not containing nitrogen and mainly containing oxygen is supplied to an ozone generator, an AC voltage is applied to produce discharge light having wavelength of 428 nm to 620 nm, a catalytic material containing a photocatalytic material with a band gap energy of 2.0 eV to 2.9 eV is provided on an electrode or a dielectric in a discharge region, gas pressure is kept at 0.1 MPa to 0.4 MPa, and ozone is generated.
Abstract translation: 臭氧发生系统和臭氧发生方法以高浓度生产臭氧并以高效率运行,其中使用不添加氮并主要含氧的原料气体。 副产物的产生量为零。 将不含氮并主要含氧的原料气体供给臭氧发生器,施加交流电压以产生波长为428nm至620nm的放电光,含有带隙能为2.0的光催化材料的催化材料 在放电区域的电极或电介质上设置eV〜2.9eV,气体压力保持在0.1MPa〜0.4MPa,产生臭氧。
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公开(公告)号:US20030164338A1
公开(公告)日:2003-09-04
申请号:US10133237
申请日:2002-04-26
Applicant: Applied Science & Technology, Inc.
Inventor: Jens Fittkau , Johannes Seiwert , Christiane Gottschalk
IPC: B03C001/00
CPC classification number: G05D11/132 , B01F3/04496 , B01F5/0603 , B01F5/0606 , B01F2003/04886 , C01B13/10 , C01B13/11 , C01B2201/60 , C01B2201/64 , C02F1/78 , C02F2201/782 , C02F2209/40 , G05D11/139 , Y10S134/902 , Y10S261/42
Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
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公开(公告)号:US6022456A
公开(公告)日:2000-02-08
申请号:US26835
申请日:1998-02-20
Applicant: Thomas J. Manning
Inventor: Thomas J. Manning
CPC classification number: C01B13/10 , C01B13/11 , C01B2201/50 , C01B2201/60 , C01B2201/80
Abstract: A recirculating loop method for producing and/or using ozone is disclosed. The method comprises the steps of: supplying a gas mixture comprising oxygen and a catalyst, generating ozone from the gas mixture, and recirculating the gas mixture. In a preferred method, the method comprises the additional steps of: reacting the ozone with a chemically reactive species and adding sufficient oxygen to the oxygen and noble gas mixture to maintain the specific oxygen to noble gas ratio. Preferably, the ozone is generated by electrical discharge from oxygen and noble gas mixtures of a volume ratio of not greater than 9 to 1 oxygen to catalyst gas. The closed loop apparatus for generating ozone gas comprises: an electrical discharge chamber, a means for supplying oxygen to said electrical discharge chamber, a means for supplying a catalyst to said electrical discharge chamber, an application chamber connected to said electrical chamber, a means for supplying a chemically reactive species to said application chamber, a means for removing said chemically reactive species from said application chamber, a means for returning oxygen and the catalyst to said electrical discharge chamber.
Abstract translation: 公开了一种用于生产和/或使用臭氧的循环回路方法。 该方法包括以下步骤:提供包含氧和催化剂的气体混合物,从气体混合物产生臭氧,并再循环气体混合物。 在优选的方法中,该方法包括以下附加步骤:使臭氧与化学反应性物质反应,并向氧气和惰性气体混合物中加入足够的氧以将特定氧气保持为惰性气体比。 优选地,通过从不大于9至1个氧气的体积比与氧气和催化剂气体的氧气和惰性气体混合物的放电产生臭氧。 用于产生臭氧气体的闭环装置包括:放电室,用于向所述放电室供氧的装置,用于向所述放电室供应催化剂的装置,连接到所述电室的施加室,用于 向所述施用室供应化学反应性物质,用于从所述施用室除去所述化学反应物质的装置,用于将氧气和催化剂返回到所述放电室的装置。
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公开(公告)号:US5759497A
公开(公告)日:1998-06-02
申请号:US422900
申请日:1995-04-17
Applicant: Masaki Kuzumoto , Youichiro Tabata , Shigenori Yagi , Kenji Yoshizawa , Masahiro Mukai , Junji Ochi , Tateki Ozawa
Inventor: Masaki Kuzumoto , Youichiro Tabata , Shigenori Yagi , Kenji Yoshizawa , Masahiro Mukai , Junji Ochi , Tateki Ozawa
CPC classification number: C01B13/11 , C01B2201/12 , C01B2201/22 , C01B2201/32 , C01B2201/60 , C01B2201/66 , C01B2201/74 , C01B2201/90
Abstract: There is provided a highly efficient and compact ozone generating apparatus in which a very short air gap of about 0.2 mm is formed at high accuracy. Non-discharge portions are dispersed and disposed to cover an entire discharge space, or a spacer is provided to form the non-discharge portion. Further, an elastic body is mounted on a back face of an electrode, thereby enhancing an air gap accuracy of the discharge space.
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公开(公告)号:US5370846A
公开(公告)日:1994-12-06
申请号:US56939
申请日:1993-05-05
Applicant: Tetsusuke Yokomi , Jiro Kobayashi , Suguru Nakatsuka
Inventor: Tetsusuke Yokomi , Jiro Kobayashi , Suguru Nakatsuka
CPC classification number: H01L21/67069 , C01B13/11 , C01B2201/60 , C01B2201/74
Abstract: A system and method for generating high concentration ozone by introducing a high purity oxygen (99.995% or greater purity) into a silent discharge type ozone generator. Another high purity gas (99.99% or greater), is mixed with the oxygen before the gas is introduced into the ozone generator. By this process, high concentration ozone is generated such that the ozone concentration does not decrease with time. The highest ozone concentrations are maintained when the non-oxygen gas makes up between 1% and 10% of the volume content of the gas mixture introduced in the ozone generator.
Abstract translation: 一种通过将高纯度氧(99.995%或更高纯度)引入无声放电型臭氧发生器来产生高浓度臭氧的系统和方法。 将另一种高纯度气体(99.99%以上)与氧气混合,然后将气体引入臭氧发生器。 通过该过程,产生高浓度臭氧,使得臭氧浓度不随时间降低。 当非氧气占导入臭氧发生器中的气体混合物的体积含量的1%至10%时,维持最高的臭氧浓度。
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公开(公告)号:US5047127A
公开(公告)日:1991-09-10
申请号:US560878
申请日:1990-07-31
Applicant: Isao Tottori , Masazumi Matsuura , Atsuhiro Fujii
Inventor: Isao Tottori , Masazumi Matsuura , Atsuhiro Fujii
IPC: C01B13/11
CPC classification number: C01B13/11 , C01B2201/60 , C01B2201/76 , C01B2201/80
Abstract: An ozone generating method for increasing the quantity of ozone produced by a silent discharge in high purity oxygen includes mixing nitrogen with the high purity oxygen in a predetermined ratio. The nitrogen gas is a catalyst for stable and highly efficient ozone generation from a high purity oxygen source.
Abstract translation: 用于增加在高纯度氧气中通过无声放电产生的臭氧量的臭氧发生方法包括以预定比例将氮气与高纯度氧气混合。 氮气是用于从高纯度氧源产生稳定且高效的臭氧的催化剂。
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公开(公告)号:US3963625A
公开(公告)日:1976-06-15
申请号:US557595
申请日:1975-03-12
Applicant: Frank E. Lowther
Inventor: Frank E. Lowther
IPC: C01B13/11
CPC classification number: C01B13/11 , C01B2201/40 , C01B2201/50 , C01B2201/60 , C01B2201/62 , C01B2201/70 , C01B2201/80
Abstract: A continuous ozone generation and recovery system is provided including a source of oxygen-rich gas; at least one high-throughput corona generator; means for passing the oxygen-rich gas through an electrical corona at a high ratio of gas volume:electrode area to synthesize ozone in a concentration not greater than 1 wt% in the gas stream; means for cooling the generator and maintaining the ozone-containing oxygen stream below decomposition temperature; means for cooling the ozone-containing oxygen gas stream; means for contacting the cooled gas stream with silica gel to adsorb the ozone and recover an oxygen-rich gas stream; means for recycling the recovered oxygen-rich gas stream for ozone synthesis; and means for recovering the adsorbed ozone from the silica gel.Recycle of unconverted oxygen has strong economic value. Dry nitrogen-rich gas stream from an air separation unit which also provides the oxygen source may be used advantageously as an inert carrier gas for desorbing the ozone.
Abstract translation: 提供连续的臭氧产生和回收系统,其包括富氧气体源; 至少一个高通量电晕发生器; 使富氧气体以高气体体积比电极面积通过电晕的装置,以在气流中合成浓度不大于1重量%的臭氧; 用于冷却发电机并将含臭氧的氧气流维持在分解温度以下的装置; 用于冷却含臭氧氧气流的装置; 用于使冷却的气流与硅胶接触以吸附臭氧并回收富氧气流的装置; 用于回收用于臭氧合成的回收的富氧气流的装置; 以及从硅胶中回收吸附的臭氧的方法。
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公开(公告)号:US3113914A
公开(公告)日:1963-12-10
申请号:US1288560
申请日:1960-03-04
Applicant: RUEHRWEIN ROBERT A
Inventor: RUEHRWEIN ROBERT A
IPC: C01B13/11
CPC classification number: C01B13/11 , C01B2201/60 , C01B2201/74
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公开(公告)号:US3062730A
公开(公告)日:1962-11-06
申请号:US82133859
申请日:1959-06-18
Applicant: RUEHRWEIN ROBERT A
Inventor: RUEHRWEIN ROBERT A
IPC: C01B13/11
CPC classification number: C01B13/11 , C01B2201/60 , C01B2201/74
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公开(公告)号:US2850446A
公开(公告)日:1958-09-02
申请号:US62680756
申请日:1956-12-05
Applicant: WELSBACH CORP
Inventor: CROMWELL WILLIAM E
IPC: C01B13/11
CPC classification number: C01B13/11 , C01B2201/60
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