公开(公告)号：US20100091273A1

公开(公告)日：2010-04-15

申请号：US12420208

申请日：2009-04-08

Applicant: Roman EGLI ,  Alan FURLAN ,  Mario CURCIO

Inventor： Roman EGLI ,  Alan FURLAN ,  Mario CURCIO

IPC: G01J1/10

CPC classification number: G01N21/278 ,  G01N21/6452 ,  G01N2201/06186

Abstract: The present invention relates to a system for the optical detection of light from analytical samples, the system comprising an analytical instrument comprising an optical detection unit and a sample block unit for receiving a plurality of analytical samples, the system further comprising a calibration device for calibrating the optical detection unit of the analytical instrument, wherein the calibration device comprises a substrate and at least one electrically powered reference light source coupled to the substrate, said at least one reference light source emitting light being detected by the optical detection unit.

Abstract translation: 本发明涉及一种用于光学检测来自分析样品的光的系统，该系统包括分析仪器，该分析仪器包括用于接收多个分析样品的光学检测单元和样品块单元，该系统还包括用于校准的校准装置 所述分析仪器的光学检测单元，其中所述校准装置包括衬底和耦合到所述衬底的至少一个电力参考光源，所述至少一个参考光源发射由所述光学检测单元检测的光。

公开(公告)号：US20100053630A1

公开(公告)日：2010-03-04

申请号：US12551720

申请日：2009-09-01

Applicant: Tetsuji Oota

Inventor： Tetsuji Oota

IPC: G01B9/02 ,  G01J1/10

CPC classification number: G01B9/02039 ,  G01B9/02057 ,  G01B9/02072 ,  G01B11/2441

Abstract: The present invention provides a reference standard used to calibrate measurement data of a measuring device for measuring the shape of a measurement surface utilizing interference between light from the measurement surface and light from the reference surface. A measurement surface of the reference standard has at least one protruding mark and one recessed mark, and an integrated value of the dimension of the protruding mark in the direction normal to the measurement surface of the reference standard, on the circumference of an assumed circle on the measurement surface centered at a point on an optical axis of the reference standard, is equal to an integrated value of the dimension of the recessed mark in the direction normal to the measurement surface of the reference standard on the circumference of the assumed circle.

Abstract translation: 本发明提供了一种用于校准测量装置的测量数据的参考标准，用于利用来自测量表面的光和来自参考表面的光之间的干涉来测量测量表面的形状。 参考标准的测量表面具有至少一个突出标记和一个凹陷标记，以及垂直于参考标准的测量表面的方向上的突出标记的尺寸的积分值，在假定圆的圆周上 以参考标准的光轴为中心的测量表面等于在假定圆的圆周上与参考标准的测量表面垂直的方向上的凹痕的尺寸的积分值。

公开(公告)号：US07652761B2

公开(公告)日：2010-01-26

申请号：US12200386

申请日：2008-08-28

Applicant: Seema Somani ,  Kingman Yee ,  John S. Shimmick

Inventor： Seema Somani ,  Kingman Yee ,  John S. Shimmick

IPC: G01J1/10

CPC classification number: A61F9/00814 ,  A61B2017/00725 ,  A61F9/008 ,  A61F9/00802 ,  A61F2009/00846 ,  A61F2009/00855 ,  A61F2009/00872 ,  A61F2009/00897 ,  B23K26/705 ,  G01J1/4257 ,  G01J2001/4261 ,  G01N21/6456

Abstract: The present invention provides methods, systems, and apparatus for calibrating a laser ablation system, such as an excimer laser system for selectively ablating a cornea of a patient's eye. The invention also facilitates alignment of eye tracking cameras that measure a position of the eye during laser eye surgery. A calibration and alignment fixture for a scanning laser beam delivery system having eye tracking cameras may include a structure positionable in a treatment plane. The structure having a feature directing laser energy incident thereon to a calibration energy sensor, at least one reference-edge to determine a characteristic of the laser beam (shape, dimensions, etc.), and an artificial pupil to determine alignment of the eye tracking cameras with the laser system.

Abstract translation: 本发明提供了用于校准激光消融系统的方法，系统和装置，例如用于选择性地烧蚀患者眼睛的角膜的准分子激光系统。 本发明还有助于在激光眼睛手术期间测量眼睛位置的眼睛跟踪相机的对准。 用于具有眼睛跟踪摄像机的扫描激光束传送系统的校准和对准夹具可以包括可在治疗平面中定位的结构。 具有将激光能量入射到校准能量传感器的特征的结构，至少一个参考边缘以确定激光束的特性（形状，尺寸等）以及用于确定眼睛跟踪的对准的人造瞳孔 相机与激光系统。

公开(公告)号：US07630072B2

公开(公告)日：2009-12-08

申请号：US11765618

申请日：2007-06-20

Applicant: Gilbert Feke ,  Douglas L. Vizard

Inventor： Gilbert Feke ,  Douglas L. Vizard

IPC: G01J1/10

CPC classification number: G01N21/6456 ,  G01N21/278 ,  Y10T428/24942

Abstract: A fluorescence reference plate for a fluorescence spectroscopic instrument is arranged with fluorescent layers having different excitation and emission characteristics. The fluorescent layers are ordered in the form of a stack for providing a flat-field calibration standard over multiple bands of wavelengths.

Abstract translation: 布置具有不同激发和发射特性的荧光层的荧光分光仪的荧光基准板。 荧光层以堆叠的形式排列，以在多个波长带上提供平坦场校准标准。

公开(公告)号：US20090190125A1

公开(公告)日：2009-07-30

申请号：US12278326

申请日：2007-02-06

Applicant: Stephen Foster ,  Karl Freedman

Inventor： Stephen Foster ,  Karl Freedman

IPC: G01J1/10 ,  G01J3/00 ,  G01N21/55

CPC classification number: G01N21/274 ,  G01N21/4738 ,  G01N21/8507 ,  G01N2021/4709 ,  G01N2021/4742 ,  G01N2021/4769

Abstract: The invention relates to a device for use in analysing the performance of a spectrometric system of the type which comprises a spectrometer to which a probe for propagating electromagnetic radiation is connected. The device comprises a holder for holding both a reflectance standard and the probe so that the tip of the probe is fixated at a predetermined position relative to the reflectance standard and so that at least part of the electromagnetic radiation emitted from the probe is diffusely reflected from the reflectance standard back to the probe. The invention also relates to a method, a kit and an assembly.

Abstract translation: 本发明涉及一种用于分析该类型的光谱测量系统的性能的装置，其包括用于传播电磁辐射的探针连接到的光谱仪。 该装置包括用于保持反射率标准和探针的保持器，使得探针的尖端相对于反射率标准被固定在预定位置，并且使得从探头发射的至少一部分电磁辐射从 反射率标准回到探头。 本发明还涉及一种方法，套件和组件。

公开(公告)号：US20090185811A1

公开(公告)日：2009-07-23

申请号：US12389803

申请日：2009-02-20

Applicant: Pak Shing Cho ,  Jacob Khurgin ,  Isaac Shpantzer

Inventor： Pak Shing Cho ,  Jacob Khurgin ,  Isaac Shpantzer

IPC: H04B10/06 ,  G01J1/10 ,  G02B6/26

CPC classification number: H04B10/61

Abstract: An optical beam combiner is provided, which allows efficient collection of light for various applications: non-line of sight and free space optical communications, remote sensing, optical imaging and others. A multitude of optical beam portions is captured by a space diversity receiver that includes an optical beam combiner, which has a tree-like topology with interconnected waveguides, electro-optic phase shifters, and directional couplers. For each of the beam portions the phase of the phase shifter and the coupling ratio of coupler in the optical beam combiner are tuned sequentially to maximize the final output power in the final optical waveguide. A portion of the final output beam is used for the power detection and forming a feedback signal for the phases and coupling ratios adjustment. The data or information is recovered from the received final optical beam using coherent detection.

Abstract translation: 提供了一种光束组合器，其可以有效地收集用于各种应用的光：非视距和自由空间光通信，遥感，光学成像等。 多个光束部分由包括光束组合器的空间分集接收器捕获，光束组合器具有带有互连波导的树状拓扑结构，电光移相器和定向耦合器。 对于每个光束部分，顺序地调整移相器的相位和光束组合器中的耦合器的耦合比，以最大化最终光波导中的最终输出功率。 最终输出光束的一部分用于功率检测并形成用于相位和耦合比调节的反馈信号。 使用相干检测从所接收的最终光束中恢复数据或信息。

公开(公告)号：US20090168069A1

公开(公告)日：2009-07-02

申请号：US12314584

申请日：2008-12-12

Applicant: Hidetaka Nambu

Inventor： Hidetaka Nambu

IPC: G01N21/55 ,  G01J1/10 ,  G01B11/26

CPC classification number: G01B11/22 ,  G01B11/046 ,  G01B11/26

Abstract: The measuring method for providing a precise determination of a geometry of a concave portion is provided. The measuring method includes: measuring an angle of a side wall of a concave portion with a bottom surface thereof formed in an insulating film (operation S1); defining a plurality of parameter groups including an angle of the side wall of the concave portion with the bottom surface, a dimensional width and a dimensional depth and preparing library containing a plurality of waveforms of reflected lights respectively correlated with such plurality of parameter groups (operation S2); an operation of irradiating light over the concave portion (operation S4); an operation of detecting reflected light (operation S5); referencing the waveform of reflected light with the waveform selected from the library (operation S6); and when a difference between the waveform of reflected light and the waveform selected from the library is lower than a specified value, then assigning the parameter such as the dimensional width of the concave portion and the like correlated with the selected waveform for an optimum value to determine the geometry of the concave portion. The angle of the side wall of the concave portion with the bottom surface thereof in the parameter groups of the library is a measured angle in the operation S1.

Abstract translation: 提供了用于提供凹部的几何形状的精确确定的测量方法。 测量方法包括：测量在绝缘膜中形成的底部表面的凹部的侧壁的角度（操作S1）; 定义多个参数组，包括凹部的侧壁与底面的角度，尺寸宽度和尺寸深度，并准备包含分别与这些多个参数组相关联的多个反射光波形的库（操作 S2）; 在凹部上照射光的动作（动作S4）。 检测反射光的动作（动作S5）。 利用从库中选择的波形参考反射光的波形（操作S6）; 并且当反射光的波形与从库中选择的波形之间的差异小于指定值时，则将诸如凹部等的尺寸宽度的参数与所选波形相关联的参数与最佳值分配给 确定凹部的几何形状。 库的参数组中的凹部的侧壁与其底面的角度是操作S1中的测量角度。

公开(公告)号：US07521670B2

公开(公告)日：2009-04-21

申请号：US11362587

申请日：2006-02-24

Applicant: Axel Engel ,  Rainer Haspel ,  Ute Resch-Genger ,  Katrin Hoffmann ,  Doris Ehrt ,  Uwe Kolberg ,  Joseph S. Hayden ,  Michael Stelzl

Inventor： Axel Engel ,  Rainer Haspel ,  Ute Resch-Genger ,  Katrin Hoffmann ,  Doris Ehrt ,  Uwe Kolberg ,  Joseph S. Hayden ,  Michael Stelzl

IPC: G01D18/00 ,  C09K11/02 ,  G01J1/10

CPC classification number: G01N21/6452 ,  G01N21/278 ,  G01N2021/6495 ,  G01N2201/13

Abstract: The invention discloses a standard for referencing luminescence signals, having an optically transparent base material comprising a lanthanum phosphate glass, a fluorophosphate glass, a fluor-crown glass, a lanthanum glass, a glass-ceramic formed therefrom or a lithium aluminosilicate glass-ceramic, the base material including a bulk doping with at least one constituent which is luminescent and comprises at least one rare earth and/or a nonferrous metal, in particular cobalt, chromium or manganese.

Abstract translation: 本发明公开了一种用于参考发光信号的标准，其具有光学透明基材，其包含磷酸镧玻璃，氟磷酸盐玻璃，氟 - 冠玻璃，镧玻璃，由其形成的玻璃陶瓷或铝硅酸锂玻璃 - 陶瓷陶瓷， 所述基材包括具有至少一种发光的成分的本体掺杂，并且包含至少一种稀土和/或有色金属，特别是钴，铬或锰。

公开(公告)号：US07428044B2

公开(公告)日：2008-09-23

申请号：US11601038

申请日：2006-11-16

Applicant: Vi Vuong ,  Yan Chen ,  Holger Tuitje

Inventor： Vi Vuong ,  Yan Chen ,  Holger Tuitje

IPC: G01J1/10

CPC classification number: G01B11/24 ,  G01B21/045 ,  G01N21/276 ,  G01N21/4788 ,  G01N21/93 ,  G01N21/956

Abstract: Drift in an optical metrology tool is compensated for by obtaining a first measured diffraction signal and a second measured diffraction signal of a first calibration structure mounted on the optical metrology tool. The first and second measured diffraction signals were measured using the optical metrology tool. The second measured diffraction signal was measured later in time than the first measured diffraction signal. A first drift function is generated based on the difference between the first and second measured diffraction signals. A third measured diffraction signal is obtained of a first structure formed on a first wafer using the optical metrology tool. A first adjusted diffraction signal is generated by adjusting the third measured diffraction signal using the first drift function.

Abstract translation: 通过获得安装在光学计量学工具上的第一校准结构的第一测量衍射信号和第二测量衍射信号来补偿光学测量工具中的漂移。 使用光学测量工具测量第一和第二测量的衍射信号。 时间上测量的第二测量的衍射信号比第一测量的衍射信号。 基于第一和第二测量的衍射信号之间的差异产生第一漂移函数。 使用光学测量工具获得在第一晶片上形成的第一结构的第三测量的衍射信号。 通过使用第一漂移函数调整第三测量的衍射信号来产生第一调节的衍射信号。

公开(公告)号：US07421109B2

公开(公告)日：2008-09-02

申请号：US10642760

申请日：2003-08-19

Applicant: Hideo Tsuchiya ,  Kyoji Yamashita ,  Toshiyuki Watanabe ,  Ikunao Isomura ,  Toru Tojo ,  Yasushi Sanada

Inventor： Hideo Tsuchiya ,  Kyoji Yamashita ,  Toshiyuki Watanabe ,  Ikunao Isomura ,  Toru Tojo ,  Yasushi Sanada

IPC: G06K9/00 ,  G01B11/00 ,  G01J1/10

CPC classification number: G06T7/0004 ,  G06T2207/30148

Abstract: A pattern inspecting method, comprising preparing a sample having a first and a second inspection regions and an imaging device having a plurality of pixels, scanning the first inspection region to a first direction using the imaging device to obtain a first measurement pattern representing at least parts of the first inspection region, scanning the second inspection region to the first direction using the imaging device to obtain a second measurement pattern representing at least parts of the second inspection region, comparing the first measurement pattern and the second measurement pattern with each other to determine presence or absence of a defect formed on the sample, and controlling a scanning condition for scanning a pattern of the second inspection region by the imaging device so as to keep the same with the scanning condition when the pattern of the first inspection region is scanned by the imaging device.

Abstract translation: 一种图案检查方法，包括准备具有第一和第二检查区域的样本和具有多个像素的成像装置，使用成像装置将第一检查区域扫描到第一方向，以获得表示至少部分的第一测量图案 使用所述成像装置将所述第二检查区域扫描到所述第一方向，以获得表示所述第二检查区域的至少一部分的第二测量图案，将所述第一测量图案和所述第二测量图案彼此进行比较，以确定 存在或不存在形成在样品上的缺陷，以及控制用于通过成像装置扫描第二检查区域的图案的扫描条件，以便当第一检查区域的图案被扫描时与扫描条件保持相同 成像装置。