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    Liquid dispensing and/or aspirating device to be operated manually repeatedly
    22.
    发明授权
    Liquid dispensing and/or aspirating device to be operated manually repeatedly 有权
    要重复手动操作的液体分配和/或抽吸装置

    公开(公告)号：US06841129B2

    公开(公告)日：2005-01-11

    申请号：US09919944

    申请日：2001-08-02

    Applicant: Ralf Braun ,  Peter Mahler ,  Jürgen Schraut

    Inventor： Ralf Braun ,  Peter Mahler ,  Jürgen Schraut

    IPC: G01N1/00 ,  B01J4/02 ,  B01L3/02 ,  B65B43/42 ,  B67D5/08

    CPC classification number: B01L3/0234 ,  B01L2300/027

    Abstract: A liquid dispensing and/or aspirating device to be operated manually repeatedly, having a controlling device, a motor drive, control electronics, a manually actuatable actuating element, and a programming element, where the quantity of liquid which is conveyed by motor on actuation of the actuating element is adjusted in the control electronics by the programming element. A process interval (tp) for a plurality of process steps to be carried out in succession is stored in the control electronics. A first type of actuation of the actuating element triggers an individual process step, while a second type of actuation automatically results in repeated successive triggering of process steps, each in the process interval (tp). Handling of the device in practice is greatly improved by the fact that the process interval (tp) is automatically determined by the control electronics by analyzing the interval(s) occurring between the individual actuations of the actuating element.

    Abstract translation: 要重复手动操作的液体分配和/或抽吸装置，具有控制装置，电动机驱动器，控制电子装置，可手动致动的致动元件和编程元件，其中在由致动器驱动时由马达输送的液体量 通过编程元件在控制电子装置中调节致动元件。 用于连续执行的多个处理步骤的处理间隔（tp）存储在控制电子装置中。 致动元件的第一种致动触发单独的加工步骤，而第二种类型的致动自动地导致过程间隔（tp）中的每个过程步骤的重复连续触发。 通过分析在致动元件的各个动作之间发生的间隔，由控制电子装置自动确定过程间隔（tp），实际上处理装置的情况大大改善。

    Apparatus and method for mixing chemicals to be used in chemical-mechanical polishing procedures
    27.
    发明授权
    Apparatus and method for mixing chemicals to be used in chemical-mechanical polishing procedures 失效
    用于混合用于化学机械抛光程序的化学品的装置和方法

    公开(公告)号：US5803599A

    公开(公告)日：1998-09-08

    申请号：US898882

    申请日：1997-06-27

    Applicant: Edward T. Ferri, Jr. ,  J. Tobin Geatz ,  Gary L. Corlett

    Inventor： Edward T. Ferri, Jr. ,  J. Tobin Geatz ,  Gary L. Corlett

    IPC: B01F15/04 ,  B01J4/00 ,  B01J4/02 ,  B24B37/04 ,  B24B57/02 ,  B67D7/02 ,  G01F11/28 ,  H01L21/00 ,  B01F15/02 ,  B67D5/54

    CPC classification number: H01L21/67276 ,  B01F15/00422 ,  B01F15/0454 ,  B01J4/02 ,  B24B37/04 ,  B24B57/02 ,  B67D7/0272 ,  B67D7/0283 ,  G01F11/28 ,  B01F2215/0036 ,  B01J2219/00006 ,  Y10T137/3109 ,  Y10T137/3127 ,  Y10T137/4891

    Abstract: Apparatus for the delivery of a chemical slurry to at least one downstream facility. The apparatus comprises a measuring vessel of predetermined volume into which a liquid chemical component is introduced. A conduit connects the measuring vessel to multiple chemical sources, wherein each of said chemical sources comprises a liquid chemical component. Another conduit connects the measuring vessel to at least one mix tank. A pressure-vacuum vessel is in communication with said at least one mix tank, whereby chemical is drawn from said at least one mix tank to the pressure-vacuum vessel under negative pressure and chemical is delivered from the pressure-vacuum vessel to said at least one downstream facility under positive pressure. The pressure-vacuum vessel is in fluid communication with both said at least one mix tank and said at least one downstream facility. Valves on each of the conduits control the chemical flow therethrough. The chemical slurry is produced in said least at one mix tank by combining chemicals from one or more of the multiple chemical sources, and the slurry is delivered from said at least one mix tank to said at least one downstream facility.

    Abstract translation: 用于将化学浆料输送到至少一个下游设备的装置。 该装置包括其中引入液体化学成分的预定体积的测量容器。 导管将测量容器连接到多个化学源，其中每个所述化学源包括液体化学组分。 另一导管将测量容器连接到至少一个混合罐。 压力 - 真空容器与所述至少一个混合罐连通，由此在负压下将化学品从所述至少一个混合罐抽吸到压力 - 真空容器，化学品从压力 - 真空容器输送至所述至少一个 一个下游设施正压。 压力 - 真空容器与所述至少一个混合罐和所述至少一个下游设备流体连通。 每个管道上的阀门控制通过其中的化学物质流动。 所述化学浆料在所述至少一个混合罐中通过组合来自所述多种化学源中的一种或多种的化学品而产生，并且所述浆料从所述至少一个混合罐输送到所述至少一个下游设备。

    Central management system of wet chemical stations
    30.
    发明授权
    Central management system of wet chemical stations 失效
    湿化工站中央管理体系

    公开(公告)号：US5672230A

    公开(公告)日：1997-09-30

    申请号：US522958

    申请日：1995-09-01

    Applicant: Heung-soo Park ,  Hee-sun Chae

    Inventor： Heung-soo Park ,  Hee-sun Chae

    IPC: B01J4/02 ,  G05B15/02 ,  G05B23/02 ,  H01L21/00 ,  H01L21/02 ,  H01L21/304 ,  H01L21/306 ,  B44C1/00

    CPC classification number: H01L21/67276 ,  H01L21/67017

    Abstract: A central management system for wet chemical cleaning stations includes a number of wet chemical cleaning stations each having a liquid bath, filter, pump and multiple sensors for sensing the process variables thereof; and a main computer connected to the wet chemical cleaning stations to display, store and process data sensed by the sensors and totally manage the data, to thereby enable effective central management of the cleaning process via the main computer.

    Abstract translation: 湿化学清洗站的中央管理系统包括多个湿化学清洗站，每个湿化学清洗站具有液体浴，过滤器，泵和用于感测其过程变量的多个传感器; 连接到湿式化学清洗站的主计算机，显示，存储和处理由传感器感测的数据，并对数据进行全面的管理，从而能够通过主计算机对清洗过程进行有效的集中管理。

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