公开(公告)号：US20090195856A1

公开(公告)日：2009-08-06

申请号：US12026131

申请日：2008-02-05

Applicant: Manish Kothari ,  Clarence Chui ,  Sauri Gudlavalleti

Inventor： Manish Kothari ,  Clarence Chui ,  Sauri Gudlavalleti

IPC: G02B26/00 ,  H01B13/00

CPC classification number: G02B26/001

Abstract: Methods of fabricating an electromechanical systems device that minimize critical dimension (CD) loss in the device are described. The methods provide electromechanical systems devices with improved properties, including high reflectivity.

Abstract translation: 描述了使装置中的临界尺寸（CD）损耗最小化的机电系统装置的制造方法。 这些方法提供具有改进性能的机电系统装置，包括高反射率。

公开(公告)号：US20090189230A1

公开(公告)日：2009-07-30

申请号：US12415986

申请日：2009-03-31

Applicant: Lauren Palmateer ,  William J. Cummings ,  Brian Gally ,  Clarence Chui ,  Manish Kothari

Inventor： Lauren Palmateer ,  William J. Cummings ,  Brian Gally ,  Clarence Chui ,  Manish Kothari

IPC: H01L23/31 ,  H01L29/84 ,  H01L21/56

CPC classification number: B81B7/0038 ,  B81C2203/019 ,  G02B26/001

Abstract: Methods and systems for packaging MEMS devices such as interferometric modulator arrays are disclosed. One embodiment of a MEMS device package structure includes a seal with a chemically reactant getter. Another embodiment of a MEMS device package comprises a primary seal with a getter, and a secondary seal proximate an outer periphery of the primary seal. Yet another embodiment of a MEMS device package comprises a getter positioned inside the MEMS device package and proximate an inner periphery of the package seal.

Abstract translation: 公开了用于封装诸如干涉式调制器阵列之类的MEMS装置的方法和系统。 MEMS器件封装结构的一个实施例包括具有化学反应物吸气剂的密封。 MEMS器件封装的另一实施例包括具有吸气剂的主密封件和靠近主密封件的外周边的次级密封件。 MEMS器件封装的另一个实施例包括位于MEMS器件封装内部并且靠近封装密封件的内周边的吸气剂。

公开(公告)号：US07567373B2

公开(公告)日：2009-07-28

申请号：US11189690

申请日：2005-07-26

Applicant: Clarence Chui ,  William J. Cummings ,  Brian J. Gally ,  Ming-Hau Tung

Inventor： Clarence Chui ,  William J. Cummings ,  Brian J. Gally ,  Ming-Hau Tung

IPC: G02B26/00

CPC classification number: B81B3/001 ,  B81B2201/042 ,  G02B26/001

Abstract: An interferometric modulator is formed by a stationary layer and a mirror facing the stationary layer. The mirror is movable between the undriven and driven positions. Landing pads, bumps or spring clips are formed on at least one of the stationary layer and the mirror. The landing pads, bumps or spring clips can prevent the stationary layer and the mirror from contacting each other when the mirror is in the driven position. The spring clips exert force on the mirror toward the undriven position when the mirror is in the driven position and in contact with the spring clips.

Abstract translation: 干涉式调制器由固定层和面向固定层的反射镜形成。 镜子可以在未驱动和被驱动位置之间移动。 在固定层和反射镜中的至少一个上形成着陆垫，凸块或弹簧夹。 当反射镜处于驱动位置时，着陆垫，凸块或弹簧夹可以防止固定层和反射镜彼此接触。 当镜子处于从动位置并与弹簧夹接触时，弹簧夹在镜子上朝着未驱动的位置施加力。

公开(公告)号：US07551159B2

公开(公告)日：2009-06-23

申请号：US11045865

申请日：2005-01-28

Applicant: Marc Mignard ,  Clarence Chui ,  Mithran C. Mathew ,  Jeffrey B. Sampsell

Inventor： Marc Mignard ,  Clarence Chui ,  Mithran C. Mathew ,  Jeffrey B. Sampsell

IPC: G09G3/34

CPC classification number: G01R27/2605 ,  B81B2201/047 ,  B81C99/003 ,  G02B26/00 ,  G02B26/001 ,  G09G3/3466 ,  G09G2300/0473 ,  G09G2310/0278 ,  G09G2310/04 ,  G09G2320/029 ,  G09G2330/021 ,  G09G2330/12

Abstract: A method for sensing the actuation and/or release voltages of a microelectromechanical device include applying a varying voltage to the device and sensing its state and different voltage levels. In one embodiment, the device is part of a system comprising an array of interferometric modulators suitable for a display. The method can be used to compensate for temperature dependent changes in display pixel characteristics.

Abstract translation: 用于感测微机电装置的致动和/或释放电压的方法包括向装置施加变化的电压并感测其状态和不同的电压电平。 在一个实施例中，该装置是包括适合于显示器的干涉式调制器阵列的系统的一部分。 该方法可用于补偿显示像素特性中与温度有关的变化。

公开(公告)号：US07545554B2

公开(公告)日：2009-06-09

申请号：US12102759

申请日：2008-04-14

Applicant: Clarence Chui ,  Mithran C. Mathew ,  Marc Mignard

Inventor： Clarence Chui ,  Mithran C. Mathew ,  Marc Mignard

IPC: G02B26/00 ,  G02F1/29

CPC classification number: G09G3/3466 ,  G02B26/001 ,  G09G3/2074 ,  G09G3/2081 ,  G09G2300/06 ,  G09G2310/0267 ,  G09G2310/0297

Abstract: A display comprising: a plurality of MEMS elements arranged in rows, wherein the MEMS elements of each of the rows are further arranged in subrows and wherein the subrows of each row are electrically connected; and wherein the physical property of at least one MEMS element in at least one subrow is different from the physical property of at least one MEMS element in other subrows. The physical property can be a spring constant associated with a movable mirror, a film thickness, an electrode width, a damping force caused by air between a movable mirror and a fixed mirror, a mass of a movable mirror, a material or geometry of the respective MEMS element.

Abstract translation: 一种显示器，包括：排列成行的多个MEMS元件，其中每行的MEMS元件进一步布置在子行中，并且其中每行的子行电连接; 并且其中至少一个子行中的至少一个MEMS元件的物理性质与其他子行中的至少一个MEMS元件的物理特性不同。 物理特性可以是与可移动镜相关联的弹簧常数，膜厚度，电极宽度，由可移动镜和固定镜之间的空气引起​​的阻尼力，可移动镜的质量，材料或几何形状 各自的MEMS元件。

公开(公告)号：US20090135465A1

公开(公告)日：2009-05-28

申请号：US12343111

申请日：2008-12-23

Applicant: Clarence Chui

Inventor： Clarence Chui

IPC: G02B26/02

CPC classification number: G02B26/001 ,  G09G3/2011 ,  G09G3/207 ,  G09G3/2074 ,  G09G3/3466 ,  G09G2300/0439 ,  Y10S385/901

Abstract: A display having a plurality of reflective display elements. In one embodiment, the display elements comprise at least one electrode having a plurality of active areas. In one embodiment, at least two of the sizes of the active areas are different with respect to each other, e.g., they are non-uniform in size. The interferometric modulators have a plurality of states, wherein selected ones of the interferometric modulators are configured to be actuated depending differing electrostatic forces in the interferometric modulators. The electrostatic forces in the interferometric modulators are different at least in part due to variations in the sizes of the active areas of the electrodes.

Abstract translation: 具有多个反射显示元件的显示器。 在一个实施例中，显示元件包括具有多个有效区域的至少一个电极。 在一个实施例中，有源区域的至少两个尺寸相对于彼此是不同的，例如，它们的尺寸不均匀。 干涉式调制器具有多种状态，其中所选择的干涉式调制器被配置为根据干涉式调制器中的不同静电力被致动。 干涉式调制器中的静电力至少部分地由于电极的有源区域的尺寸的变化而不同。

公开(公告)号：US07486429B2

公开(公告)日：2009-02-03

申请号：US11235686

申请日：2005-09-26

Applicant: Clarence Chui

Inventor： Clarence Chui

IPC: G02B26/00 ,  G02B26/02

CPC classification number: G09G3/3466 ,  G02B26/001 ,  G09G2300/04 ,  G09G2310/02 ,  Y10T29/49826

Abstract: A multi-state light modulator comprises a first reflector 104. A first electrode 142 is positioned at a distance from the first reflector 104. A second reflector 14 is positioned between the first reflector 104 and the first electrode 142. The second reflector 14 is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector 104. In one embodiment, the light modulator has latch electrodes 17 and 143, which hold the light modulator in a driven state. In another embodiment the latch electrodes 17 and 143 are used to alter the actuation and release thresholds of the light modulator.

Abstract translation: 多态光调制器包括第一反射器104.第一电极142定位在离第一反射器104一定距离处。第二反射器14位于第一反射器104和第一电极142之间。第二反射器14可移动 在未驱动位置，第一驱动位置和第二驱动位置之间，每个具有与第一反射器104相对应的距离。在一个实施例中，光调制器具有锁定电极17和143，其将光调制器保持在驱动状态 。 在另一个实施例中，闩锁电极17和143用于改变光调制器的致动和释放阈值。

公开(公告)号：US20090015579A1

公开(公告)日：2009-01-15

申请号：US11777123

申请日：2007-07-12

Applicant: Ramez Nachman ,  Clarence Chui ,  Manish Kothari

Inventor： Ramez Nachman ,  Clarence Chui ,  Manish Kothari

IPC: G06F3/038

CPC classification number: G09G3/3466 ,  G02B26/001 ,  G09G3/2092 ,  G09G2320/041 ,  G09G2320/048

Abstract: The invention comprises systems and methods for adjusting a driving voltage based on relaxation information of a movable reflective layer of an interferometric modulator. In one example, a device for driving a MEMS device having a movable reflective layer comprises a sensing unit configured to generate information related to one or more of time, environmental exposure, and frame rate of a movable reflective layer of at least one MEMS device, and a driver circuit configured to apply voltages to drive said at least one MEMS device, said voltages being based at least in part on said information.

Abstract translation: 本发明包括基于干涉式调制器的可移动反射层的松弛信息来调节驱动电压的系统和方法。 在一个示例中，用于驱动具有可移动反射层的MEMS器件的装置包括感测单元，其被配置为产生与至少一个MEMS器件的可移动反射层的时间，环境曝光和帧速率中的一个或多个相关的信息， 以及被配置为施加电压以驱动所述至少一个MEMS器件的驱动器电路，所述电压至少部分地基于所述信息。

公开(公告)号：US20090002290A1

公开(公告)日：2009-01-01

申请号：US11906774

申请日：2007-10-02

Applicant: Clarence Chui

Inventor： Clarence Chui

IPC: G09G3/36

CPC classification number: G09G3/005 ,  G09F9/33 ,  G09F9/37 ,  G09F19/12 ,  G09G3/32 ,  G09G2300/026

Abstract: Rendering an image pixel in a composite display is disclosed. In some embodiments, an image pixel is mapped to a plurality of temporal pixels, and the image pixel is rendered in a composite display using at least a subset of the plurality of temporal pixels to which it is mapped, with the intensity of the image pixel spread across the subset of temporal pixels.

Abstract translation: 公开了复合显示器中的图像像素的渲染。 在一些实施例中，将图像像素映射到多个时间像素，并且使用其被映射到的多个时间像素的至少一个子集，将图像像素呈现在复合显示中，其中图像像素的强度 分布在时间像素的子集上。

公开(公告)号：US20090002273A1

公开(公告)日：2009-01-01

申请号：US12009843

申请日：2008-01-22

Applicant: Clarence Chui

Inventor： Clarence Chui

IPC: G09G3/00

CPC classification number: G09G3/005 ,  G09F9/33 ,  G09F9/37 ,  G09F19/12 ,  G09G3/32 ,  G09G2300/026

Abstract: A system for generating a display is disclosed. The system includes a base on which one or more paddles are mounted, wherein each paddle includes a plurality of pixel elements and is configured to sweep out an area during a paddle cycle, a processor configured to generate a script based at least in part on a pixel map and an image, and a pixel element driver configured to receive at least a portion of the script and activate a pixel element on a paddle when the pixel element coincides with an image pixel of the image. At least a portion of the image is represented on the display by activating the pixel element.

Abstract translation: 公开了一种用于生成显示器的系统。 该系统包括其上安装有一个或多个桨叶的基座，其中每个叶片包括多个像素元件，并且构造成在桨叶周期期间扫除一个区域，处理器被配置成至少部分地基于 像素图和图像，以及像素元件驱动器，其被配置为当所述像素元素与所述图像的图像像素重合时，接收所述脚本的至少一部分并激活所述桨上的像素元素。 图像的至少一部分通过激活像素元件在显示器上表示。