Micro-electromechanical systems switch and method of fabricating the same
    33.
    发明申请
    Micro-electromechanical systems switch and method of fabricating the same 有权
    微机电系统开关及其制造方法

    公开(公告)号:US20080034578A1

    公开(公告)日:2008-02-14

    申请号:US11898002

    申请日:2007-09-07

    Abstract: Provided is a micro-electromechanical systems switch for controlling signal delivery in a high frequency band wireless communication and a radio frequency (RF) system and, comprising: a substrate; a signal line formed on the substrate and having a predetermined opening portion; at least one supporting frame each formed on the substrate at both sides of the signal line; a ground line formed on the substrate between the supporting frame and the signal line; a moving plate fixed to the supporting frame at both sides thereof, the moving plate being movable upward and downward; a switching unit positioned on the moving plate, the switching unit comprising contact means for connecting the opened signal line; and a supporting layer for supporting the moving plate and the switching unit, wherein the supporting layer comprises a support protrusion portion for maintaining a distance from the substrate.

    Abstract translation: 提供了一种用于控制高频无线通信和射频(RF)系统中的信号传送的微机电系统开关,并且包括:基板; 形成在所述基板上并具有预定开口部分的信号线; 至少一个支撑框架,每个形成在信号线两侧的基板上; 形成在支撑框架和信号线之间的基板上的接地线; 移动板在其两侧固定到支撑框架,移动板可上下移动; 位于移动板上的切换单元,切换单元包括用于连接打开的信号线的接触装置; 以及用于支撑所述移动板和所述切换单元的支撑层,其中所述支撑层包括用于保持与所述基板的距离的支撑突出部分。

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