Thinning semiconductor wafers
    32.
    发明申请
    Thinning semiconductor wafers 审中-公开
    薄化半导体晶圆

    公开(公告)号:US20060046433A1

    公开(公告)日:2006-03-02

    申请号:US10925775

    申请日:2004-08-25

    Abstract: Wafer thinning may be accomplished by grinding while the wafer is held in the fixture. The fixture may have a series of protrusions that form an interference fit with surface features extending outwardly from the non-thinned surface of the wafer to be thinned. In some embodiments, a releasable adhesive may be utilized to augment the interference effect. Also, in some embodiments, openings in a shape memory material may be utilized that, upon heating, more firmly engage the bumps on the wafer to be thinned.

    Abstract translation: 晶片变薄可以通过在晶片保持在固定装置中的同时进行研磨来实现。 夹具可以具有一系列突起,其形成与要被变薄的晶片的非变薄表面向外延伸的表面特征的过盈配合。 在一些实施方案中,可以使用可释放粘合剂来增加干扰效应。 此外,在一些实施例中,可以利用形状记忆材料中的开口,其在加热时更牢固地接合要稀释的晶片上的凸块。

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