Concentration-factor measurement device and method

    公开(公告)号:US10041924B2

    公开(公告)日:2018-08-07

    申请号:US15304762

    申请日:2015-04-01

    CPC classification number: G01N33/1853 G01N21/59 G01N27/06 G01N33/182

    Abstract: Provided are a concentration-factor measurement device and method for accurately calculating a concentration factor of circulating water, and a method for measuring a water-quality index value of the circulating water. The concentration-factor measurement device includes a light-absorbance measurement unit (1) for measuring absorbance by irradiating each of cells (12A-12C) with light, and an electrode measurement unit (2) equipped with electrodes (16, 17) that are inserted into a water sample in a container (20). For each item of water quality, the device calculates a concentration factor on the basis of a measured value measured when the water sample (W) is the circulating water, and a measured value measured when the water sample (W) is makeup water. A plurality of concentration factors are calculated on the basis of the measured values for plural items of water quality. Hence an accurate concentration factor can be obtained.

    Semiconductor substrate cleaning method and cleaning system

    公开(公告)号:US10026628B2

    公开(公告)日:2018-07-17

    申请号:US14432818

    申请日:2013-09-30

    Abstract: The present invention relates to a method and a system for cleaning a semiconductor substrate wherein Al is at last partially exposed on a silicon substrate and silicided with a metallic substance without damaging the Al and a silicide layer. A cleaning portion cleans the aforementioned semiconductor substrate. A delivery portion, disposed on the cleaning portion, delivers a solution to the semiconductor substrate. A sulfuric acid solution transfer path connected onto the delivery portion transfers a sulfuric acid solution and an adsorptive inhibitor solution transfer path connected to the delivery path transfers an adsorptive inhibitor having any one or more of N-based, S-based, and P-based polar groups to the delivery portion. The sulfuric acid solution and the adsorptive inhibitor may be mixed or separately transferred to come into contact with the semiconductor substrate.

    ELECTROLYSIS APPARATUS AND WATER TREATMENT METHOD

    公开(公告)号:US20180162754A1

    公开(公告)日:2018-06-14

    申请号:US15577575

    申请日:2015-06-11

    Abstract: Provided is an electrolysis apparatus with which the liquid that is to be treated can be continuously electrolyzed with high efficiency under high-temperature and high-pressure conditions. The electrolysis apparatus includes a cylindrical container main body including an inner peripheral surface serving as a cathode surface, an anode plate disposed in the container main body along an axis thereof, and end members attached to the respective ends of the container main body with nuts interposed therebetween, respectively. The end members are provided with nozzles, respectively, through which the liquid is passed. The end member is provided with a power supply rod connected to the anode plate which is inserted in the end member. Bipolar electrode plates are disposed in the container main body so as to be parallel to the anode plate. Insulators support the sides of the anode plate and the sides of the bipolar electrode plates.

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