公开(公告)号：US20070234803A1

公开(公告)日：2007-10-11

申请号：US10577743

申请日：2004-08-13

Applicant: Udo-Martin Gomez ,  Reinhard Neul ,  Kersten Kehr ,  Marko Rocznik

Inventor： Udo-Martin Gomez ,  Reinhard Neul ,  Kersten Kehr ,  Marko Rocznik

IPC: G01C19/56

CPC classification number: G01C19/5755

Abstract: The yaw rate sensor of the present invention has force-conveying means. The central idea of the invention is that the force action conveyed by this arrangement has a frequency such that the frequency of the conveyed force action is an integral multiple of the frequency of the oscillation of the drive element parallel to the X-axis.

Abstract translation: 本发明的偏航率传感器具有力传递装置。 本发明的中心思想是通过这种布置传递的力作用具有这样的频率，使得所输送的力作用的频率是与驱动元件平行于X轴的振荡频率的整数倍。

公开(公告)号：US20070180907A1

公开(公告)日：2007-08-09

申请号：US10556172

申请日：2004-03-24

Applicant: Dietmar Krieg ,  Udo-Martin Gomez ,  Reinhard Neul

Inventor： Dietmar Krieg ,  Udo-Martin Gomez ,  Reinhard Neul

IPC: G01P9/04 ,  G01C19/56 ,  G01C25/00 ,  G01P9/02 ,  G01P21/00

CPC classification number: G01C19/5712 ,  G01C19/5726 ,  G01C19/5776

Abstract: A micromechanical motion sensor is capable of detecting a deflection imparted to an oscillatably mounted bar spring element excited to a permanent periodic oscillation by an electrostatic oscillating drive to which a periodic drive voltage is applied. To compensate non-linearities of the resonance frequency response of the bar spring element, a sum of a normal drive voltage signal and a compensation drive signal may be applied to a comb drive. In an alternative embodiment, separate compensation comb drive units may be additionally provided to the comb drive units used for the oscillation drive and a compensation voltage signal may be applied to them to compensate for the non-linearity.

Abstract translation: 微机械运动传感器能够检测通过施加周期性驱动电压的静电振荡驱动器激发到永久周期性振荡的可摆放安装的弹簧元件的偏转。 为了补偿棒弹簧元件的共振频率响应的非线性，可以将正常驱动电压信号和补偿驱动信号的总和施加到梳齿驱动器。 在替代实施例中，分离的补偿梳驱动单元可以附加地提供给用于振荡驱动的梳状驱动单元，并且补偿电压信号可以被施加到它们以补偿非线性。