METHOD AND APPARATUS FOR CONFORMABLE POLISHING
    32.
    发明申请
    METHOD AND APPARATUS FOR CONFORMABLE POLISHING 审中-公开
    用于一致抛光的方法和装置

    公开(公告)号:US20130331006A1

    公开(公告)日:2013-12-12

    申请号:US13965820

    申请日:2013-08-13

    Abstract: Methods and apparatus provide for a conformable polishing head for uniformly polishing a workpiece. The polishing head includes an elastic polishing pad mounted on an elastic membrane that seals a cavity in the polishing head. The cavity is pressurized to expand the membrane and press the polishing pad down on the top surface of the workpiece, such that the polishing pad conforms to the surface and applies a substantially uniform pressure distribution across the workpiece and thereby uniformly removes material across high and low spots on the workpiece.

    Abstract translation: 方法和装置提供了用于均匀抛光工件的一致的抛光头。 抛光头包括安装在弹性膜上的弹性抛光垫,其密封抛光头中的空腔。 空腔被加压以膨胀膜并将抛光垫向下压在工件的顶部表面上,使得抛光垫符合表面并且在整个工件上施加基本均匀的压力分布,从而均匀地去除高低的材料 工件上的斑点。

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