公开(公告)号：US07000298B2

公开(公告)日：2006-02-21

申请号：US10828142

申请日：2004-04-20

Applicant: James D. Cook ,  Cornel P. Cobianu ,  Vlad Buiculescu ,  Ioan Pavelescu ,  Brian D. Speldrich ,  James Z. Liu ,  Brian J. Marsh

Inventor： James D. Cook ,  Cornel P. Cobianu ,  Vlad Buiculescu ,  Ioan Pavelescu ,  Brian D. Speldrich ,  James Z. Liu ,  Brian J. Marsh

IPC: H01G7/00 ,  C23F1/00

CPC classification number: G01L9/0025 ,  Y10T29/42 ,  Y10T29/43 ,  Y10T29/49005 ,  Y10T29/4913

Abstract: A quartz sensor method and system are disclosed in which a plurality of SAW sensing resonators can be mechanically simulated for implementation upon a quartz wafer substrate. The quartz wafer substrate can thereafter be appropriately etched to produce a quartz diaphragm from the quartz wafer substrate. A plurality of SAW sensing resonators (e.g., pressure, reference and/or temperature SAW resonators) can then be located upon the quartz wafer substrate, which is based upon the previously mechanically simulated for implementation upon the substrate to thereby produce a quartz sensor package from the quartz wafer substrate.

Abstract translation: 公开了一种石英传感器方法和系统，其中可以机械地模拟多个SAW感测谐振器以在石英晶片衬底上实现。 此后可以适当地蚀刻石英晶片衬底，以从石英晶片衬底产生石英膜。 然后可以将多个SAW感测谐振器（例如，压力，参考和/或温度的SAW谐振器）定位在石英晶片衬底上，其基于在衬底上的先前机械模拟实现，从而从衬底上产生石英传感器封装， 石英晶片基板。