公开(公告)号：US10966683B2

公开(公告)日：2021-04-06

申请号：US15933309

申请日：2018-03-22

Applicant: EXO IMAGING INC.

Inventor： Janusz Bryzek ,  Sandeep Akkaraju ,  Yusuf Haque ,  Joe Adam

IPC: B06B1/06 ,  A61B8/00 ,  H01L23/00 ,  B06B1/02 ,  G01S15/89 ,  B81B7/00

Abstract: A transducer assembly includes: a microelectromechanical systems (MEMS) die including a plurality of piezoelectric elements; a complementary metal-oxide-semiconductor (CMOS) die electrically coupled to the MEMS die by a first plurality of bumps and including at least one circuit for controlling the plurality of piezoelectric elements; and a package secured to the CMOS die by an adhesive layer and electrically connected to the CMOS die.

公开(公告)号：US20180154394A1

公开(公告)日：2018-06-07

申请号：US15826606

申请日：2017-11-29

Applicant: EXO IMAGING INC.

Inventor： Yusuf Haque ,  Sandeep Akkaraju ,  Janusz Bryzek

IPC: B06B1/06 ,  B06B1/02 ,  G01S15/89 ,  G01S7/521 ,  A61B8/00

CPC classification number: A61B8/4494 ,  A61B8/0883 ,  A61B8/145 ,  A61B8/4427 ,  A61B8/4472 ,  A61B8/4483 ,  A61B8/4488 ,  A61B8/461 ,  A61B8/488 ,  A61B8/5207 ,  A61B8/546 ,  B06B1/0215 ,  B06B1/0238 ,  B06B1/0629 ,  B06B1/0662 ,  B06B1/0692 ,  B06B2201/76 ,  G01S7/52046 ,  G01S7/52079 ,  G01S7/521 ,  G01S15/8925 ,  H01L41/053 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/098

Abstract: An imaging device includes a two dimensional array of piezoelectric elements. Each piezoelectric element includes: a piezoelectric layer; a bottom electrode disposed on a bottom side of the piezoelectric layer and configured to receive a transmit signal during a transmit mode and develop an electrical charge during a receive mode; and a first top electrode disposed on a top side of the piezoelectric layer; and a first conductor, wherein the first top electrodes of a portion of the piezoelectric elements in a first column of the two dimensional array are electrically coupled to the first conductor.

公开(公告)号：US20180153510A1

公开(公告)日：2018-06-07

申请号：US15826614

申请日：2017-11-29

Applicant: EXO IMAGING INC.

Inventor： Yusuf Haque ,  Sandeep Akkaraju ,  Janusz Bryzek

IPC: A61B8/00 ,  H01L41/09 ,  H01L41/08 ,  H01L41/053 ,  B06B1/06 ,  B06B1/02 ,  A61B8/08

CPC classification number: A61B8/4494 ,  A61B8/0883 ,  A61B8/145 ,  A61B8/4427 ,  A61B8/4472 ,  A61B8/4483 ,  A61B8/4488 ,  A61B8/461 ,  A61B8/488 ,  A61B8/5207 ,  A61B8/546 ,  B06B1/0215 ,  B06B1/0238 ,  B06B1/0629 ,  B06B1/0662 ,  B06B1/0692 ,  B06B2201/76 ,  G01S7/52046 ,  G01S7/52079 ,  G01S7/521 ,  G01S15/8925 ,  H01L41/053 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/098

Abstract: A transceiver includes an array of pMUT elements, where each pMUT element includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode; and a first electrode disposed on the piezoelectric layer. Each pMUT element exhibits one or more modes of vibration.