SEMICONDUCTOR DEVICES INCLUDING SUPPORTER

    公开(公告)号:US20220392829A1

    公开(公告)日:2022-12-08

    申请号:US17888727

    申请日:2022-08-16

    Abstract: A semiconductor device includes a substrate including a cell region and a connection region. The connection region includes a plurality of pad regions and a through electrode region. A horizontal conductive layer is on the substrate. A supporter is on the horizontal conductive layer. The supporter includes a first portion in the cell region, a second portion in the plurality of pad regions, and a third portion in the through electrode region. A connection conductive layer is between the first portion and the horizontal conductive layer. A connection mold layer is between the third portion and the horizontal conductive layer. A first buried insulation layer passing through the third portion, the connection mold layer, and the horizontal conductive layer is provided. A stacked structure is on the substrate. A through electrode passing through the first buried insulation layer is provided.

    THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME

    公开(公告)号:US20220320025A1

    公开(公告)日:2022-10-06

    申请号:US17529462

    申请日:2021-11-18

    Abstract: A three-dimensional semiconductor memory device may include a first substrate including a cell array region and a cell array contact region, a peripheral circuit structure on the first substrate, and a cell array structure. The cell array structure may include a stack on the peripheral circuit structure, first vertical channel structures and second vertical channel structures on the cell array region and penetrating the stack, and a second substrate connected to the first vertical channel structures and second vertical channel structures. The stack may be between the peripheral circuit structure and the second substrate. The second substrate may include a first portion and a second portion. The first portion may contact the first vertical channel structures and may be doped a first conductivity type. The second portion may contact the second vertical channel structures and may be doped a second conductivity type different from the first conductivity type.

    SEMICONDUCTOR DEVICE
    35.
    发明申请

    公开(公告)号:US20220149056A1

    公开(公告)日:2022-05-12

    申请号:US17580811

    申请日:2022-01-21

    Abstract: A semiconductor device includes a substrate having a conductive region and an insulating region; gate electrodes including sub-gate electrodes spaced apart from each other and stacked in a first direction perpendicular to an upper surface of the substrate and extending in a second direction perpendicular to the first direction and gate connectors connecting the sub-gate electrodes disposed on the same level; channel structures penetrating through the gate electrodes and extending in the conductive region of the substrate; and a first dummy channel structure penetrating through the gate electrodes and extending in the insulating region of the substrate and disposed adjacent to at least one side of the gate connectors in a third direction perpendicular to the first and second directions.

    SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME
    40.
    发明申请
    SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME 有权
    半导体器件及其形成方法

    公开(公告)号:US20150303201A1

    公开(公告)日:2015-10-22

    申请号:US14591165

    申请日:2015-01-07

    Abstract: Semiconductor devices, and methods for forming the same, include forming a first wiring film and an etching buffer film in a cell array region and a peripheral circuit region of a substrate, and forming a contact hole by selectively etching the etching buffer film and the first wiring film so as to expose an active region of the cell array region and at least a part of a field isolation region adjacent thereto. A bit line contact is formed in the contact hole to be in contact with the active region, and a second wiring film is formed over the substrate. By patterning the second wiring film, the bit line contact, the etching buffer film, and the first wiring film, a bit line is formed in the cell array region and a peripheral gate is formed in the peripheral circuit region.

    Abstract translation: 半导体器件及其形成方法包括在基板的单元阵列区域和外围电路区域中形成第一布线膜和蚀刻缓冲膜,并且通过选择性蚀刻蚀刻缓冲膜和第一布线膜形成接触孔 布线膜以暴露电池阵列区域的有源区域和与其相邻的场隔离区域的至少一部分。 在接触孔中形成与有源区接触的位线接触,在基板上形成第二布线膜。 通过图案化第二布线膜,位线接触,蚀刻缓冲膜和第一布线膜,在单元阵列区域中形成位线,并且在外围电路区域中形成周边栅极。

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