公开(公告)号：US5276546A

公开(公告)日：1994-01-04

申请号：US945526

申请日：1992-09-16

Applicant: Steven G. Palm ,  Elwin M. Beaty

Inventor： Steven G. Palm ,  Elwin M. Beaty

IPC: G01B11/02 ,  G01N21/88 ,  G01N21/93 ,  G01N21/956 ,  G02B26/10 ,  H04N1/19 ,  G02B26/08

CPC classification number: G02B26/101 ,  G01B11/02 ,  G01N21/88 ,  G01N2021/8887 ,  G01N2021/95638 ,  G01N21/93 ,  G01N2201/102 ,  G01N2201/1053 ,  Y10S359/90

Abstract: A part scanning and part calibration method for the inspection of printed circuit boards and integrated circuits includes a camera and two rotating mirrors to scan an image of a pattern mask retical upon which a precise pattern has been deposited. Small parts are placed upon the retical to be inspected. The third overhead mirror is provided to view the part under inspection from another perspective. The scene of the part is triangulated and the dimensions of the system can thus be calibrated. A precise retical mask is provided with dot patterns which provide an additional set of information needed for calibration. By scanning more than one dot pattern the missing state values can be resolved using an iterative trigonomic solution.

Abstract translation: 用于检查印刷电路板和集成电路的部件扫描和部件校准方法包括相机和两个旋转镜，用于扫描已经沉积精确图案的图案掩模图案的图像。 小部件放置在被检查的retical上。 提供第三顶置反射镜以从另一个角度来观察被检查的部件。 该部件的场景是三角形的，因此可以校准系统的尺寸。 提供了精确的掩模掩模，其具有提供校准所需的另外一组信息的点图案。 通过扫描多个点阵图，可以使用迭代的三叉型解决方案来解决缺失的状态值。

公开(公告)号：US5228462A

公开(公告)日：1993-07-20

申请号：US889457

申请日：1992-05-27

Applicant: Jerome S. Osmalov ,  Bhanu M. Evani ,  Herbert C. Longest, Jr.

Inventor： Jerome S. Osmalov ,  Bhanu M. Evani ,  Herbert C. Longest, Jr.

IPC: A24C5/34 ,  B07C5/342

CPC classification number: B07C5/3422 ,  A24C5/3412 ,  G01N2021/8887 ,  G01N2201/102 ,  Y10S131/905 ,  Y10S131/908

Abstract: Inspection of completed cigarettes is accomplished by the cigarettes traveling on a rolling drum past a single stationary rolling block with preferably two cameras connected to a vision system. The first camera views the cigarette before the rolling block, the cigarette is then rolled approximately 180.degree. and then the second camera views the previously hidden portion of the cigarette. Cigarettes are accepted or rejected based on a comparison of the viewed cigarettes to a predetermined set of characteristics.

Abstract translation: 完成的香烟的检查是通过在滚动鼓上行进的香烟通过连接到视觉系统的优选两个相机的单个固定滚动块来完成的。 第一台相机在卷轴前观察香烟，然后卷烟约180度，然后第二台相机查看以前隐藏的香烟部分。 基于所查看的香烟与预定的一组特征的比较，香烟被接受或拒绝。

公开(公告)号：US5196716A

公开(公告)日：1993-03-23

申请号：US702087

申请日：1991-05-17

Applicant: Kazuo Moriya ,  Hideo Wada ,  Katsuyuki Hirai

Inventor： Kazuo Moriya ,  Hideo Wada ,  Katsuyuki Hirai

IPC: G01N21/88 ,  G01N21/00 ,  G01N21/35 ,  G01N21/3563 ,  G01N21/359 ,  G01N21/39 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66

CPC classification number: G01N21/9505 ,  G01N2021/1782 ,  G01N2021/393 ,  G01N2021/4735 ,  G01N2021/8887 ,  G01N2021/8896 ,  G01N2201/102

Abstract: A method for measuring internal defects of a specimen, comprising the steps of allowing a finely focused laser beam to be incident into a specimen from its surface and observing the scattered light of the said laser beam from inside the said specimen from the surface of the specimen and in a different direction to the optical axis of incidence of the laser beam.

公开(公告)号：US5047851A

公开(公告)日：1991-09-10

申请号：US485133

申请日：1990-02-26

Applicant: Kurt Sauerwein ,  Hans P. Busse ,  Rainer Link ,  Helmut Wiacker ,  Christian Stapf ,  Rudiger Schulz ,  Ekhard Stolzenberg ,  Kurt Disselhorst ,  Herbert Burghoff ,  Karl Kirchesch ,  James D. Lean ,  Laurence F. Topping ,  Wolfgang Zindler

Inventor： Kurt Sauerwein ,  Hans P. Busse ,  Rainer Link ,  Helmut Wiacker ,  Christian Stapf ,  Rudiger Schulz ,  Ekhard Stolzenberg ,  Kurt Disselhorst ,  Herbert Burghoff ,  Karl Kirchesch ,  James D. Lean ,  Laurence F. Topping ,  Wolfgang Zindler

IPC: G01N21/88 ,  G01N21/91 ,  G01N21/93 ,  G01N27/84

CPC classification number: G01N21/91 ,  G01N21/93 ,  G01N27/84 ,  G01N2021/8887 ,  G01N2021/8896 ,  G01N2021/936 ,  G01N2201/102

Abstract: A process and device for detecting and evaluating surface cracks in workpieces wherein a picture is produced of the surface of the workpiece by means of a video camera and said picture is digitized and is processed by means of a computer to produce a binary picture of any cracks present and a sorting report is triggered when a preselected threshold level is exceeded. In order to obtain a sorting signal that is independent of the absolute brightness of the original picture a blurred background picture is derived from the original picture levels that have been converted to digitized grey shade levels and subtracted from the original picture, the difference picture formed in this way giving the crack representation. A dynamic threshold level for the sorting signal is determined by comparing the grey shade distribution of the original or the difference picture with at least one previously evaluated or difference picture and a binary picture is produced from the original or the difference picture and the grey shade threshold, and picture elements with their gray shades exceeding the set threshold are indicated as defects. The surface of the workpiece may be pre-treated by the magnetic powder or dye penetration process and/or contrast intensifying means.

Abstract translation: 一种用于检测和评估工件中的表面裂纹的工艺和装置，其中通过摄像机产生工件表面的图像，并且所述图像被数字化，并且通过计算机进行处理以产生任何裂缝的二进制图像 当超过预先选择的阈值水平时触发排序报告。 为了获得独立于原始图像的绝对亮度的分类信号，从已被转换成数字化灰度级并从原始图像中减去的原始图像级别导出模糊背景图像，形成在 这样给出裂纹表示。 通过将原始或差分图像的灰度分布与至少一个先前评估的或差分图像进行比较来确定分类信号的动态阈值水平，并且从原始图像或差分图像和灰度阈值产生二值图像 ，其灰度超过设定阈值的图像元素被表示为缺陷。 可以通过磁粉或染料渗透过程和/或对比增强装置对工件的表面进行预处理。

公开(公告)号：US5017795A

公开(公告)日：1991-05-21

申请号：US519322

申请日：1990-05-07

Applicant: Roger G. Dower ,  Robert W. Acres ,  Harold R. Davis ,  Andrew N. Donham ,  Nader Riahi ,  Richard W. A. Slamka ,  Lechoslaw K. Urbaniak

Inventor： Roger G. Dower ,  Robert W. Acres ,  Harold R. Davis ,  Andrew N. Donham ,  Nader Riahi ,  Richard W. A. Slamka ,  Lechoslaw K. Urbaniak

IPC: G01N21/954 ,  G06T7/00

CPC classification number: G01N21/909 ,  G06T7/0006 ,  G01N2021/8887 ,  G01N2021/889 ,  G01N2021/9546 ,  G01N2201/102 ,  G06T2207/30136

Abstract: Apparatus is disclosed for detecting irregularities or flaws in seams such as the seams of cans. The apparatus includes means for irradiating the surface of the seam to produce reflected radiation signals, a plurality of radiation sensors, each having a selected field of view of the surface, and each producing sensor output signals dependent on reflected radiation signals received within such field of view. A signal processing means receives sensor output signals for a succession of fields of view along the longitudinal length of the seam and derives therefrom signal data representing a dimensional feature of the seam. Signl comparison means compares such derived data with signal data representing an acceptable dimensional limit and produces a rejection signal in the event that the dimensional feature does not fall within the limit. Means for classifying the nature of an irregularity is also disclosed, as is transport means for the movement of seams though the field of view of the sensors.

公开(公告)号：US5004347A

公开(公告)日：1991-04-02

申请号：US439591

申请日：1989-11-20

Applicant: Nicholaas C. Swart

Inventor： Nicholaas C. Swart

IPC: G01B11/30 ,  G01N21/954

CPC classification number: G01N21/909 ,  G01N2021/8887 ,  G01N2201/102

Abstract: The invention has for its purpose to provide a method and an apparatus for inspecting the bent edge of a disc-shaped object, e.g. the annular edge of a metal lid bounding a gutter for sealing compound. In order to realize such an inspection with great reliability according to the invention the resolution is made as great as possible by means of the following steps:(1) directing a light beam onto the edge zone of the object under an angle of incidents, such that the bent edge gives a shadow in said edge zone;(2) previously determining the shape of the reflection picture also determined by said shadow of said illuminated edge zone in case of an object satisfying a predetermined standard;(3) determining the reflection picture of the edge zone of an object to be inspected; and(4) comparing the results of steps (3) and (4) and generating a rejection signal in case of a detected deviation lying outside a previously chosen tolerance range.

公开(公告)号：US4958373A

公开(公告)日：1990-09-18

申请号：US174879

申请日：1988-03-29

Applicant: Toshiro Usami ,  Hiroyuki Kamijo ,  Takao Ohta ,  Masanobu Ogino

Inventor： Toshiro Usami ,  Hiroyuki Kamijo ,  Takao Ohta ,  Masanobu Ogino

IPC: H01L21/66 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  G06T7/00

CPC classification number: G06T7/0004 ,  G01N21/9501 ,  G01N2021/8874 ,  G01N2021/8887 ,  G01N21/8851 ,  G01N2201/102 ,  G06T2207/10056 ,  G06T2207/30148

Abstract: A defect-recognition processing apparatus converts into a defect image pattern, via a television camera, crystal defects present on the surface of an object under inspection, to process an image signal, by means of an image processing device, which corresponds to the defect image pattern, to measure rectangular images in terms of their length and their ratio between L.sub.Y and L.sub.X (L.sub.Y : a length in a longitudinal direction and L.sub.X : a length in the lateral direction of the wafer) and to detect defects developed on the surface of the aforementioned object.

Abstract translation: 缺陷识别处理装置通过电视摄像机将存在于被检查物体的表面上的晶体缺陷转换为缺陷图像图案，通过与缺陷图像对应的图像处理装置处理图像信号 图案，以其长度和它们在LY和LX之间的比例（LY：纵向方向上的长度，LX：晶片的横向方向上的长度）测量矩形图像，并且检测在该表面上形成的缺陷 上述目的。

公开(公告)号：US4922337A

公开(公告)日：1990-05-01

申请号：US249385

申请日：1988-09-26

Applicant: Robert P. Hunt ,  David L. Gilblom

Inventor： Robert P. Hunt ,  David L. Gilblom

IPC: B65H26/00 ,  D06H3/08 ,  G01N21/84 ,  G01N21/88 ,  G01N21/89 ,  G01N21/898 ,  G01N21/93 ,  G06T1/00 ,  H04N5/253 ,  H04N5/372 ,  H04N7/18

CPC classification number: H04N5/37206 ,  G01N21/88 ,  G01N21/89 ,  H04N3/1525 ,  H04N3/155 ,  H04N5/253 ,  H04N7/188 ,  G01N2021/845 ,  G01N2021/8887 ,  G01N2201/102

Abstract: A tachometer (32) monitors the speed of a continuously moving web or article (12). A lens (20) focuses an image of a portion of the web in an examination region (14) on image section (22) of a CCD array. As the web moves, the image moves correspondingly along the image section. A synchronizing circuit (C) adjusts the frequency of the tachometer output signal and uses it in lieu of a fixed frequency oscillator as the master clocking or timing basis for generating clocking pulses for the CCD array. More specifically, the synchronizing circuit generates four phase clocking pulses (.phi.1A-.phi.4A) which shifts lines of CCD data along the image section at the same speed that the image is moving along the CCD section. In this manner, the pixel values integrate light from the same area of the imaged web at each shifted position along the image section. Each line of data from the image section may be shifted at the same rate through an optically light-insensitive storage section (24) and read out serially by shift registers (26) to form a video signal. A quality control analysis circuit (D) monitors the video signal for selected characteristics of the imaged web. Preferably, a record is maintained of the location of flaws and defects noted by the quality analysis circuit.

Abstract translation: 转速计（32）监测连续移动的纸幅或物品（12）的速度。 透镜（20）将幅材的一部分的图像聚焦在CCD阵列的图像部分（22）上的检查区域（14）中。 当网移动时，图像沿图像部分相应地移动。 同步电路（C）调整转速计输出信号的频率，并将其代替固定频率振荡器作为用于产生CCD阵列的时钟脉冲的主时钟或定时基准。 更具体地，同步电路产生四个相位时钟脉冲（phi 1A-phi 4A），它们以与图像沿着CCD部分移动的相同速度沿着图像部分移动CCD数据的行。 以这种方式，像素值在沿着图像部分的每个移位位置处将来自成像幅材的相同区域的光整合。 来自图像部分的每行数据可以通过光学不敏感存储部分（24）以相同的速率移位，并由移位寄存器（26）串行读出以形成视频信号。 质量控制分析电路（D）监视图像信号以获得成像的网络的所选特征。 优选地，保持由质量分析电路注意到的缺陷和缺陷的位置的记录。

公开(公告)号：US4872052A

公开(公告)日：1989-10-03

申请号：US128329

申请日：1987-12-03

Applicant: Valerie A. Liudzius ,  Ralph M. Weisner ,  Takashi Kamiharako ,  Iwami Uramoto

Inventor： Valerie A. Liudzius ,  Ralph M. Weisner ,  Takashi Kamiharako ,  Iwami Uramoto

IPC: G01N21/956

CPC classification number: G01N21/956 ,  H01L24/78 ,  H01L24/85 ,  G01N2021/8887 ,  G01N2021/95615 ,  G01N2201/102 ,  H01L2224/4809 ,  H01L2224/48247 ,  H01L2224/48465 ,  H01L2224/78 ,  H01L2224/859 ,  H01L2924/00014

Abstract: A semiconductor device inspection system capable of objectively accomplishing visual image inspection of a semiconductor device and minimizing error in the inspection, to thereby effectively carry out the inspection with high accuracy and at high speed. The system includes a low magnification image pickup mechanism which consists of a plurality of low magnification image pickup units each carrying out low magnification image pickup of a semiconductor device to generate an image signal. The system also includes a signal processing system for processing the image signal to judge the correctness of the semiconductor device. In the image pickup units, their light receptors are each arranged in parallel to an inspected surface of the semiconductor device and their central axes intersect together on the inspected surface. The system may also include a high magnification image pickup unit consisting of a high magnification image pickup mechanism and a light-permeable element retractably positioned between the unit and a semiconductor device to be inspected.

Abstract translation: 一种半导体器件检查系统，其能够客观地实现半导体器件的视觉图像检查并使检查中的误差最小化，从而以高精度和高速度有效地进行检查。 该系统包括低倍率图像拾取机构，其由多个低倍率图像拾取单元组成，每个低倍率图像拾取单元执行半导体器件的低倍率图像拾取以产生图像信号。 该系统还包括用于处理图像信号以判断半导体器件的正确性的信号处理系统。 在图像拾取单元中，它们的光接收器各自平行于半导体器件的检查表面布置，并且其中心轴线在检查表面上相交。 该系统还可以包括高倍率图像拾取单元，其由高倍率图像拾取机构和可伸缩地定位在单元和要检查的半导体器件之间的透光元件组成。

公开(公告)号：US4724481A

公开(公告)日：1988-02-09

申请号：US939542

申请日：1986-12-08

Applicant: Shizuo Nishioka

Inventor： Shizuo Nishioka

IPC: G01N21/89 ,  G01N21/892 ,  G01N21/93 ,  H04N1/40 ,  H04N1/401 ,  H04N7/18

CPC classification number: G01N21/8903 ,  G01N21/896 ,  H04N1/40056 ,  H04N1/401 ,  G01N2021/8887 ,  G01N2021/8896 ,  G01N2021/891 ,  G01N2021/933 ,  G01N2201/102

Abstract: A flaw detector, for detecting a flaw in a sheet, picks up, by means of a plurality of linear array cameras, the light of rays transmitted through a sheet. The video signals from the linear array cameras, which are appropriately processed, are used for checking whether a flaw is present or not. A sensitivity-difference correcting section corrects sensitivity differences amoung the cameras and among photosensitive elements of each camera, which sensitivity differences are contained in the video signal. Automatic gain control sections, for transparent and opaque flaws, respectively, control the sensitivities of the video signals. These signals are differentiated, and then compared with a predetermined slicing level, thereby to check whether transparent and opaque flaws are present or not.

Abstract translation: 用于检测片材中的缺陷的探伤器通过多个线性阵列相机拾取透过片材的光线。 来自线性阵列相机的视频信号被适当地处理，用于检查是否存在缺陷。 灵敏度差校正部分校正摄像机和每个摄像机的感光元件之间的灵敏度差异，这些灵敏度差异包含在视频信号中。 自动增益控制部分分别用于透明和不透明的缺陷，以控制视频信号的灵敏度。 这些信号被区分，然后与预定的切片电平进行比较，从而检查是否存在透明和不透明的缺陷。