公开(公告)号：US20090146531A1

公开(公告)日：2009-06-11

申请号：US11748970

申请日：2007-05-15

Applicant: Richard C. Ruby ,  John D. Larson ,  Paul D. Bradley

Inventor： Richard C. Ruby ,  John D. Larson ,  Paul D. Bradley

IPC: H01L41/22 ,  H04R17/00

CPC classification number: H03H3/04 ,  H03H3/02 ,  H03H9/02149 ,  H03H2003/0471 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: Method for fabricating an acoustical resonator on a substrate having a top surface. First, a depression in said top surface is generated. Next, the depression is filled with a sacrificial material. The filled depression has an upper surface level with said top surface of said substrate. Next, a first electrode is deposited on said upper surface. Then, a layer of piezoelectric material is deposited on said first electrode. A second electrode is deposited on the layer of piezoelectric material using a mass load lift-off process.

Abstract translation: 在具有顶面的基板上制造声学谐振器的方法。 首先，产生上表面的凹陷。 接下来，凹陷填充有牺牲材料。 填充的凹陷具有与所述基底的所述顶表面相对的上表面水平。 接下来，在所述上表面上沉积第一电极。 然后，在所述第一电极上沉积一层压电材料。 使用质量负载剥离工艺将第二电极沉积在压电材料层上。

公开(公告)号：US20090101999A1

公开(公告)日：2009-04-23

申请号：US12341122

申请日：2008-12-22

Applicant: R. Shane Fazzio ,  Richard C. Ruby ,  Christopher P. Wade ,  Michael Louis Frank ,  David A. Feld

Inventor： R. Shane Fazzio ,  Richard C. Ruby ,  Christopher P. Wade ,  Michael Louis Frank ,  David A. Feld

IPC: H01L29/78

CPC classification number: H03H9/02118 ,  H03H3/02 ,  H03H9/02125 ,  H03H9/172

Abstract: An electronic device. The electronic device includes a first electrode and a coating layer. The electronic device is fabricated on a substrate; the substrate has a cavity created in a top surface of the substrate; and the first electrode is electrically coupled to the substrate. The coating layer coats at least part of a substrate surface in the cavity, and the presence of the coating layer results in a mitigation of at least one parasitic leakage path between the first electrode and an additional electrode fabricated on the substrate.

Abstract translation: 电子设备。 电子器件包括第一电极和涂层。 电子器件制造在衬底上; 衬底具有在衬底的顶表面中产生的空腔; 并且第一电极电耦合到衬底。 涂层涂覆在空腔中的基底表面的至少一部分，并且涂层的存在导致在第一电极和在基底上制造的附加电极之间的至少一个寄生泄漏路径的减轻。

公开(公告)号：US07512415B2

公开(公告)日：2009-03-31

申请号：US11144559

申请日：2005-06-03

Applicant: Ronald Shane Fazzio ,  Richard C Ruby

Inventor： Ronald Shane Fazzio ,  Richard C Ruby

IPC: H04M1/00

CPC classification number: A61L9/035 ,  A61L9/125 ,  A61L9/14 ,  G06F1/1626 ,  G06F1/1684 ,  G06F1/1698 ,  H04M1/72522

Abstract: A technique for producing a scent from a hand-held device involves receiving a scent mixture formula at a hand-held device, converting the scent mixture formula into dispense control signals, and generating a scent mixture in response to the dispense control signals, the scent mixture being generated from different base scents that are individually stored within the hand-held device. In an embodiment, the scent mixture formula includes a scent identifier and a scent quantifier related to each base scent that is used to generate the scent mixture. Mixing multiple base scents to generate scent mixtures greatly expands the range of different scents that can be generated at a hand-held device that stores a limited number of base scents. Further, encoding a scent mixture into a scent mixture formula enables scent mixtures to be easily shared between hand-held devices.

Abstract translation: 用于从手持装置产生气味的技术包括在手持装置上接收香味混合物配方，将气味混合物转化为分配控制信号，并响应于分配控制信号产生气味混合物，香味 混合物由单独储存在手持装置中的不同基础气味产生。 在一个实施方案中，香味混合物配方包括与用于产生香味混合物的每种基础气味相关的气味标识符和香味量词。 混合多种基础香味以产生香味混合物可以极大地扩大可在存储有限数量的基础香味的手持式设备上产生的不同气味的范围。 此外，将香味混合物编码成香味混合物配方使得香味混合物能够容易地在手持装置之间共享。

公开(公告)号：US07436269B2

公开(公告)日：2008-10-14

申请号：US11109596

申请日：2005-04-18

Applicant: Kun Wang ,  Paul D. Bradley ,  Richard C. Ruby

Inventor： Kun Wang ,  Paul D. Bradley ,  Richard C. Ruby

IPC: H03H9/70 ,  H03H9/54

CPC classification number: H03H9/587 ,  H03H3/02 ,  H03H7/1708 ,  H03H9/0095 ,  H03H9/0571 ,  H03H9/583 ,  H03H9/584 ,  H03H9/706 ,  H03H2003/0428 ,  Y10T29/49002

Abstract: An apparatus includes a substrate with a cavity and a two-stage resonator filter fabricated over the cavity. The two-stage resonator filter includes a first stage and a second stage. The first stage includes a first resonator and a second resonator, the second resonator acoustically coupled to the first resonator. The second stage includes a third resonator and a fourth resonator, the fourth resonator acoustically coupled to the third resonator. The second resonator and the third resonators are electrically coupled. A decoupling layer couples the first resonator and the second resonator. The decoupling layer extends between the third resonator and the fourth resonator. The first resonator and the fourth resonator are above the substrate. The decoupling layer is above the first resonator and the fourth resonator. The second resonator and the third resonators are above the decoupling layer.

Abstract translation: 一种装置包括具有空腔的衬底和在空腔上制造的两级谐振器滤波器。 两级谐振滤波器包括第一级和第二级。 第一级包括第一谐振器和第二谐振器，第二谐振器声耦合到第一谐振器。 第二级包括第三谐振器和第四谐振器，第四谐振器声耦合到第三谐振器。 第二谐振器和第三谐振器电耦合。 去耦层耦合第一谐振器和第二谐振器。 解耦层在第三谐振器和第四谐振器之间延伸。 第一谐振器和第四谐振器在衬底之上。 去耦层位于第一谐振器和第四谐振器之上。 第二谐振器和第三谐振器在去耦层之上。

公开(公告)号：US07161448B2

公开(公告)日：2007-01-09

申请号：US10867540

申请日：2004-06-14

Applicant: Hongiun Feng ,  Ronald S. Fazzio ,  Paul D. Bradley ,  Richard C. Ruby

Inventor： Hongiun Feng ,  Ronald S. Fazzio ,  Paul D. Bradley ,  Richard C. Ruby

IPC: H03H9/15 ,  H03H9/54

CPC classification number: H03H9/02118 ,  H03H9/02149 ,  H03H9/173

Abstract: An acoustic resonator includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a recessed region. The substrate has a first surface. The first electrode is adjacent the first surface of the substrate. The layer of piezoelectric material is adjacent the first electrode. The second electrode is adjacent the layer of piezoelectric material. The second electrode has a second electrode perimeter that is shaped as a polygon. The recessed region is adjacent the second electrode. The recessed region has a shape defining a recessed region perimeter. The recessed region perimeter is recessed relative to the second electrode perimeter.

Abstract translation: 声谐振器包括基板，第一电极，压电材料层，第二电极和凹陷区域。 衬底具有第一表面。 第一电极邻近衬底的第一表面。 压电材料层与第一电极相邻。 第二电极与压电材料层相邻。 第二电极具有形状为多边形的第二电极周边。 凹陷区域与第二电极相邻。 凹陷区域具有限定凹陷区域周边的形状。 凹陷区域周边相对于第二电极周边凹进。

公开(公告)号：US06824653B2

公开(公告)日：2004-11-30

申请号：US10371463

申请日：2003-02-21

Applicant: Yury Oshmyansky ,  Sergey Mishin ,  Richard C. Ruby ,  John D. Larson, III

Inventor： Yury Oshmyansky ,  Sergey Mishin ,  Richard C. Ruby ,  John D. Larson, III

IPC: C23C1434

CPC classification number: H01J37/3444 ,  C23C14/352 ,  H01J37/3408

Abstract: A magnetron with mechanisms for smoothly and continuously adjusting a DC power applied to its targets to compensate for the changes in the sputtering characteristics of the targets that occur with target aging. A magnetron according to the present teachings includes a set of concentric targets for sputtering a film onto a wafer in response to an AC power and a DC power applied to the targets and a power controller that adjusts the DC power. The adjustments to the DC power enable the magnetron to maintain uniformity in the thicknesses of films formed with the magnetron throughout the life of its targets.

公开(公告)号：US06710508B2

公开(公告)日：2004-03-23

申请号：US09996951

申请日：2001-11-27

Applicant: Richard C. Ruby ,  Joe Qingzhe Wen

Inventor： Richard C. Ruby ,  Joe Qingzhe Wen

IPC: H01L4108

CPC classification number: H03H3/04

Abstract: In an array of acoustic resonators, the resonant frequencies of the resonators are adjusted and stabilized in order to achieve target frequency responses for the array. The method of adjusting is achieved by intentionally inducing oxidation at an elevated temperature. Thermal oxidation grows a molybdenum oxide layer on the surface of the top electrode of an electrode-piezoelectric stack, thereby increasing the relative thickness of the electrode layer to the piezoelectric layer. In one embodiment, the resonant frequency of an FBAR is adjusted downwardly as the top electrode layer increases relative to the piezoelectric layer. In another embodiment, the method of stabilizing is achieved by intentionally inducing oxidation at an elevated temperature.

Abstract translation: 在声谐振器阵列中，谐振器的谐振频率被调整和稳定，以便实现阵列的目标频率响应。 调节方法是通过在升高的温度下有意识地引起氧化来实现的。 热氧化在电极 - 压电堆叠的顶部电极的表面上生长氧化钼层，从而增加电极层与压电层的相对厚度。 在一个实施例中，当顶部电极层相对于压电层增加时，FBAR的谐振频率向下调节。 在另一个实施方案中，稳定方法是通过在升高的温度下有意地诱导氧化来实现的。

公开(公告)号：US06472954B1

公开(公告)日：2002-10-29

申请号：US09841234

申请日：2001-04-23

Applicant: Richard C. Ruby ,  Paul Bradley ,  Domingo Figueredo ,  John D. Larson, III ,  Yury Oshmyansky

Inventor： Richard C. Ruby ,  Paul Bradley ,  Domingo Figueredo ,  John D. Larson, III ,  Yury Oshmyansky

IPC: H03H9205

CPC classification number: H03H9/706 ,  H03H3/04 ,  H03H9/0571 ,  H03H9/587 ,  H03H2003/0471 ,  Y10T29/42

Abstract: In an array of acoustic resonators, the effective coupling coefficient of first and second filters are individually tailored in order to achieve desired frequency responses. In a duplexer embodiment, the effective coupling coefficient of a transmit band-pass filter is lower than the effective coupling coefficient of a receive band-pass filter of the same duplexer. In one embodiment, the tailoring of the coefficients is achieved by varying the ratio of the thickness of a piezoelectric layer to the total thickness of electrode layers. For example, the total thickness of the electrode layers of the transmit filter may be in the range of 1.2 to 2.8 times the total thickness of the electrode layers of the receive filter. In another embodiment, the coefficient tailoring is achieved by forming a capacitor in parallel with an acoustic resonator within the filter for which the effective coupling coefficient is to be degraded. Preferably, the capacitor is formed of the same materials used to fabricate a film bulk acoustic resonator (FBAR). The capacitor may be mass loaded to change its frequency by depositing a metal layer on the capacitor. Alternatively, the mass loading may be provided by forming the capacitor directly on a substrate.

Abstract translation: 在声谐振器阵列中，分别对第一和第二滤波器的有效耦合系数进行定制，以实现期望的频率响应。 在双工器实施例中，发射带通滤波器的有效耦合系数低于同一双工器的接收带通滤波器的有效耦合系数。 在一个实施例中，通过改变压电层的厚度与电极层的总厚度之比来实现系数的调整。 例如，发射滤波器的电极层的总厚度可以在接收滤波器的电极层的总厚度的1.2至2.8倍的范围内。 在另一个实施例中，通过与滤波器内的声谐振器并联形成电容器来实现系数调整，有效耦合系数将被降低。 优选地，电容器由用于制造膜体声波谐振器（FBAR）的相同材料形成。 可以通过在电容器上沉积金属层来对电容器进行质量负载以改变其频率。 或者，可以通过将电容器直接形成在基板上来提供质量负载。

公开(公告)号：US06215375B1

公开(公告)日：2001-04-10

申请号：US09282082

申请日：1999-03-30

Applicant: John D. Larson, III ,  Richard C. Ruby ,  Paul Bradley

Inventor： John D. Larson, III ,  Richard C. Ruby ,  Paul Bradley

IPC: H03H917

CPC classification number: H03H9/174 ,  H03H9/132 ,  H03H9/585

Abstract: A bulk acoustic wave device that provides a high spectral purity, high Q, resonator in the radio frequency and microwave frequency ranges. Such resonators may be coupled together to form filters or other frequency selective devices. The bulk acoustical wave filter is constructed from a piezoelectric (PZ) material having a first surface and a second surface and first and second electrodes. The first electrode includes an electrically conducting layer on the first surface, and the second electrode includes an electrically conducting layer on the second surface. The first electrode overlies at least a portion of the second electrode, the portion of the first electrode that overlies the second electrode has a periphery which is a non-rectangular, irregular polygon. In the preferred embodiment of the present invention, the periphery is a three-sided, four-sided, or n-sided irregular polygon in which no two sides are parallel to one another.

Abstract translation: 一种在射频和微波频率范围内提供高光谱纯度，高Q谐振器的体声波器件。 这样的谐振器可以耦合在一起以形成滤波器或其它频率选择装置。 本体声波滤波器由具有第一表面和第二表面以及第一和第二电极的压电（PZ）材料构成。 第一电极在第一表面上包括导电层，第二电极在第二表面上包括导电层。 第一电极覆盖第二电极的至少一部分，第一电极的覆盖第二电极的部分具有非矩形的不规则多边形的周边。 在本发明的优选实施例中，周边是没有两个侧面彼此平行的三面，四面或者n面的不规则多边形。

公开(公告)号：US5873153A

公开(公告)日：1999-02-23

申请号：US703716

申请日：1996-08-27

Applicant: Richard C. Ruby ,  Paul Philip Merchant

Inventor： Richard C. Ruby ,  Paul Philip Merchant

IPC: H03H3/04 ,  H03H9/02 ,  H03H9/17 ,  H03H9/58 ,  H01L41/22

CPC classification number: H03H9/174 ,  H03H3/04 ,  H03H9/02133 ,  H03H9/02236 ,  H03H9/583 ,  H03H9/588 ,  H03H2009/02181 ,  Y10T29/42

Abstract: An acoustical resonator comprising top and bottom electrodes that sandwich a PZ layer. The resonance frequency of the acoustical resonator may be adjusted after fabrication by utilizing heating elements included in the acoustical resonator and/or by adjusting the thickness of a tuning layer. In the preferred embodiment of the present invention, the electrodes comprise Mo layers. One embodiment of the present invention is constructed on a Si.sub.3 N.sub.4 membrane. A second embodiment of the present invention is constructed such that it is suspended over a substrate on metallic columns. In the preferred embodiment of the present invention, the electrodes are deposited by a method that minimizes the stress in the electrodes.

Abstract translation: 包括夹着PZ层的顶部和底部电极的声学谐振器。 可以通过利用声谐振器中包含的加热元件和/或通过调节调谐层的厚度来调整声学谐振器的共振频率。 在本发明的优选实施例中，电极包括Mo层。 本发明的一个实施方案构造在Si 3 N 4膜上。 本发明的第二实施例构造成使得其悬挂在金属柱上的基板上。 在本发明的优选实施例中，通过使电极中的应力最小化的方法来沉积电极。