Slit width adjusting device and microscope laser processing apparatus
    41.
    发明授权
    Slit width adjusting device and microscope laser processing apparatus 有权
    狭缝调整装置和显微镜激光加工装置

    公开(公告)号:US08680428B2

    公开(公告)日:2014-03-25

    申请号:US12453920

    申请日:2009-05-27

    Abstract: Disclosed is a slit width adjusting device comprising: a pair of slit members parallel to each other, which is moved to approach each other or to be separated from each other to adjust a slit width; a driving section to move the pair of slit members; an absolute position original point detection section to detect an arbitrary absolute position of the slit members as an original point; and an adjustment section to adjust the slit width, wherein the adjustment section comprises: a storage unit to store a slit width table in which a displacement amount of the slit width from the original point, and a drive instruction value corresponding to the displacement amount, are corresponding to each other; and a drive control unit to extract the drive instruction value corresponding to a specified slit width, to drive the driving section according to the extracted drive instruction value.

    Abstract translation: 本发明公开了一种狭缝宽度调节装置,包括:一对彼此平行的狭缝部件,彼此接近移动或彼此分离以调节狭缝宽度; 用于移动所述一对狭缝部件的驱动部; 绝对位置原点检测部,检测狭缝部件的任意绝对位置为原点; 以及调节部,调整狭缝宽度,其中,所述调整部包括:存储单元,存储狭缝宽度表,所述狭缝宽度表与所述原点相对应的所述狭缝宽度的位移量和与所述位移量对应的驱动指示值, 相互对应; 以及驱动控制单元,用于提取与指定的狭缝宽度相对应的驱动指令值,以根据提取的驱动指令值来驱动驱动部。

    Microscope including a light intensity measuring unit for measuring an intensity of light emitted from the microscope
    42.
    发明授权
    Microscope including a light intensity measuring unit for measuring an intensity of light emitted from the microscope 有权
    显微镜包括用于测量从显微镜发射的光的强度的光强测量单元

    公开(公告)号:US08619252B2

    公开(公告)日:2013-12-31

    申请号:US13298521

    申请日:2011-11-17

    Applicant: Eiji Nakasho

    Inventor: Eiji Nakasho

    CPC classification number: G01J1/42 G01J1/0462 G01J1/32 G02B21/0096

    Abstract: A light intensity measuring unit for measuring an intensity of light emitted from a microscope includes an aperture stop, a field stop, at least one measurement lens arranged between the aperture stop and the field stop, and an interface for attachment to a microscope. The aperture stop is positioned on or close to a back focal plane of the at least one measurement lens. The field stop is positioned on or close to a front focal plane of the at least one measurement lens.

    Abstract translation: 用于测量从显微镜发射的光的强度的光强度测量单元包括孔径光阑,场光阑,布置在孔径光阑和场光阑之间的至少一个测量透镜,以及用于附着到显微镜的界面。 孔径光阑位于或接近至少一个测量透镜的后焦平面。 所述场停止件位于所述至少一个测量透镜的前焦平面上或靠近所述至少一个测量透镜的前焦平面。

    Optical Sensor
    43.
    发明申请
    Optical Sensor 有权
    光学传感器

    公开(公告)号:US20130082168A1

    公开(公告)日:2013-04-04

    申请号:US13640096

    申请日:2010-02-23

    Applicant: Daniel Ratai

    Inventor: Daniel Ratai

    CPC classification number: G01J1/0462 G01S3/7835 G01S3/784 G06F3/0304

    Abstract: The invention is an optical sensor for detecting a signal emitted by a light source, for use in a placement detection system, the optical sensor comprising a line-sensor having a detection line comprising a pixel line (20) consisting of pixels (21), and an optical imaging means (17) imaging the light of the light source onto a light strip being cross-directional to the detection line of the line-sensor, the optical imaging means (17) being arranged with a distance from the line-sensor, the light strip having strip-boundary transitions on each of its two edges in the direction of the detection line. The inventive optical sensor is characterized in that the detection line comprises a pixel line (20), in which there are gaps between the adjacent pixels (21), and the optical sensor has a detection range ensuring that at least one of the strip-boundary transitions always falls at least in part onto a pixel (21).

    Abstract translation: 本发明是用于检测由光源发射的信号的光学传感器,用于放置检测系统,该光学传感器包括具有检测线的线传感器,该检测线包括由像素(21)构成的像素线(20) 以及光学成像装置(17),其将所述光源的光成像到与所述线传感器的检测线交叉的光条上,所述光学成像装置(17)布置成距离所述线传感器 ,所述光条在检测线的方向上在其两个边缘的每一边上具有带边界转变。 本发明的光学传感器的特征在于,检测线包括像素线(20),其中在相邻像素(21)之间存在间隙,并且光学传感器具有检测范围,确保至少一个条带边界 转换总是至少部分地落在像素(21)上。

    MICROSCOPE
    45.
    发明申请
    MICROSCOPE 有权
    显微镜

    公开(公告)号:US20090161209A1

    公开(公告)日:2009-06-25

    申请号:US12343208

    申请日:2008-12-23

    Abstract: Provided are an illuminating optical system which illuminates a sample, an illumination-side pupil modulating device which is arranged on a side of the illuminating optical system, an illumination-side turret which holds the illumination-side pupil modulating device, an illumination-side-turret revolving mechanism which revolves the illumination-side turret to move the illumination-side pupil modulating device along an orbital circumference on a plane perpendicular to an optical axis, a relaying optical system which relays a pupil of an objective lens; an imaging-side pupil modulating device which is arranged on a side of the relaying optical system, an imaging-side turret which holds the imaging-side pupil modulating device, and an imaging-side-turret revolving mechanism which revolves the imaging-side turret to move the imaging-side pupil modulating device along the orbital circumference on a plane perpendicular to the optical axis.

    Abstract translation: 本发明提供一种照射样品的照明光学系统,配置在照明光学系统一侧的照明侧光瞳调制装置,保持照明侧光瞳调制装置的照明侧转塔,照明侧光瞳调制装置, 转台旋转机构,其使照明侧转台沿着与光轴垂直的平面上的轨道圆周移动照明侧光瞳调制装置,中继光学系统,其中继物镜的光瞳; 配置在中继光学系统的一侧的成像侧光瞳调制装置,保持摄像侧光瞳调制装置的成像侧转塔和成像侧转盘旋转的成像侧转塔旋转机构 以沿垂直于光轴的平面上的轨道圆周移动成像侧光瞳调制装置。

    Exposing head, luminous amount correction method for the same, and exposing apparatus
    46.
    发明申请
    Exposing head, luminous amount correction method for the same, and exposing apparatus 审中-公开
    曝光头,发光量校正方法及曝光装置

    公开(公告)号:US20060176361A1

    公开(公告)日:2006-08-10

    申请号:US11350837

    申请日:2006-02-10

    Applicant: Yasuhiro Seto

    Inventor: Yasuhiro Seto

    Abstract: A luminous amount correction method for an exposing head having a linear luminous element array having a plurality of luminous elements and a lens array having lenses. The method includes the steps of: activating each luminous element uniformly based on a common light emission command signal; measuring luminous amounts of the light outputted from the lens array along the entire length of the array at a photometric pitch not greater than the arrangement pitch of the luminous elements; integrating the luminous amounts for each luminous element with respect to an interval equal to the arrangement pitch; obtaining a luminous amount correction factor for each luminous element based on the integrated luminous amount of each luminous element; and correcting the luminous amount of each luminous element, which is controlled according to an image signal, based on the luminous amount correction factor when performing image exposure.

    Abstract translation: 一种具有具有多个发光元件的线性发光元件阵列和具有透镜的透镜阵列的曝光头的发光量校正方法。 该方法包括以下步骤:基于共同的发光指令信号均匀地激活每个发光元件; 沿着阵列的整个长度以不大于发光元件的排列间距的光度测量来测量从透镜阵列输出的光的发光量; 将每个发光元件的发光量相对于等于排列间距的间隔进行积分; 基于每个发光元件的积分发光量获得每个发光元件的发光量校正系数; 以及基于在进行图像曝光时的发光量校正因子来校正根据图像信号被控制的每个发光元件的发光量。

    LED measuring device
    48.
    发明授权
    LED measuring device 失效
    LED测量装置

    公开(公告)号:US07022969B2

    公开(公告)日:2006-04-04

    申请号:US10848707

    申请日:2004-05-14

    Abstract: A device for measuring the output of an LED with a detector under different distance conditions without requiring the movement of either the LED or the detector. An exemplary embodiment of the present invention implements the testing conditions specified in CIE 127 allowing the determination of Averaged LED Intensity at the specified distances of 100 mm and 316 mm while keeping the physical distance between the LED and the detector fixed at the shorter distance of 100 mm. The exemplary embodiment comprises an optical element that can be selectively inserted into the optical path between the LED and the detector to make the separation appear to be the longer of the two distances. The optical element comprises a lens assembly and a detector aperture that creates a virtual image of the detector aperture at the longer of the two distances. The detector aperture is dimensioned so that the virtual image of the detector aperture has the area required by the standard.

    Abstract translation: 用于在不同距离条件下用检测器测量LED的输出的装置,而不需要LED或检测器的移动。 本发明的示例性实施例实现CIE 127中规定的测试条件,允许在100mm和316mm的指定距离处确定平均LED强度,同时保持LED和检测器之间的物理距离固定在较短距离100 mm。 该示例性实施例包括可以选择性地插入到LED和检测器之间的光路中的光学元件,以使分离看起来是两个距离中的更长的距离。 光学元件包括透镜组件和检测器孔径,其在两个距离的较长时间产生检测器孔径的虚拟图像。 检测器孔径的尺寸使得检测器孔的虚像具有标准要求的面积。

    Sun sensor
    50.
    发明授权
    Sun sensor 失效
    太阳传感器

    公开(公告)号:US5914483A

    公开(公告)日:1999-06-22

    申请号:US932650

    申请日:1997-09-18

    Abstract: A sun sensor for use in orbiting satellites provides accurate attitude control yet eliminates the use of complicated optical components. The improved accuracy results from adjustment of the relative positions of a slit or pinhole aperture and a cooperating linear array of photodetector elements to increase the operating range of the sun sensor. Enhanced accuracy is further achieved by the use of a relatively wide slit instead of complicated optical components, in conjunction with a processing procedure which uses the finite angular subtense of the sun to increase the accuracy of the attitude control of the satellite by the sun sensor. A further embodiment of the invention includes a sun sensor device having dual "pinhole" apertures which is particularly useful for attitude control of a spinning satellite.

    Abstract translation: 用于轨道卫星的太阳传感器提供精确的姿态控制,但消除了使用复杂的光学部件。 通过调整狭缝或针孔孔径的相对位置和配合的光电检测器元件的线性阵列来提高改进的精度,以增加太阳传感器的操作范围。 结合使用太阳的有限角度的处理程序来增加太阳传感器对卫星的姿态控制的精度,通过使用相对宽的狭缝而不是复杂的光学部件进一步实现增强的精度。 本发明的另一实施例包括具有双“针孔”的太阳传感器装置,其特别适用于旋转卫星的姿态控制。

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