公开(公告)号：US20150276513A1

公开(公告)日：2015-10-01

申请号：US14722248

申请日：2015-05-27

Applicant: Seiko Epson Corporation

Inventor： Hiroki KAWAI

IPC: G01L1/16 ,  G01L5/22 ,  B25J9/16 ,  H01L41/187 ,  H01L41/113

CPC classification number: G01L1/16 ,  B25J9/1694 ,  B25J19/028 ,  G01L1/162 ,  G01L5/167 ,  G01L5/226 ,  H01L41/1132 ,  H01L41/1873 ,  Y10S901/46

Abstract: A sensor element includes a piezoelectric substrate made of a trigonal single crystal and an electrode arranged on the piezoelectric substrate. The substrate surface of the piezoelectric substrate includes an electrical axis of crystal axes. An angle θ formed by the substrate surface and a plane including the electrical axis and an optical axis of the crystal axes is 0°

Abstract translation: 传感器元件包括由三角单晶制成的压电基板和布置在压电基板上的电极。 压电基板的基板表面包括晶轴的电轴。 角度和角度 由基板表面形成的平面和包括电轴和晶轴的光轴的平面为0°<<θ; <20°。

公开(公告)号：US20150198801A1

公开(公告)日：2015-07-16

申请号：US14668429

申请日：2015-03-25

Applicant: FUJIFILM Corporation

Inventor： Takayuki NAONO

IPC: G02B26/08 ,  G01L1/18 ,  G01L1/16 ,  H01L41/187 ,  G02B26/10

CPC classification number: G02B26/0858 ,  G01L1/16 ,  G01L1/162 ,  G01L1/18 ,  G02B26/105 ,  H01L41/0953 ,  H01L41/1875 ,  H01L41/1876

Abstract: A mirror driving device is provided. A pair of piezoelectric actuator units are disposed at both sides of a mirror unit so as to sandwich the mirror unit, and each piezoelectric actuator unit is connected with an end portion of the mirror unit through a linking unit. The linking unit has a structure including one or more plate-shaped members whose longitudinal direction is a direction perpendicular to a rotation axis, and functions as a plate-shaped hinge unit in which a plate-shaped member is deformed so as to be deflected in the thickness direction by the drive of the piezoelectric actuator unit. The linking unit is provided with a sensor unit that detects the stress to be generated in the linking unit during the rotational drive of the mirror unit by a resonant vibration.

Abstract translation: 提供镜驱动装置。 一对压电致动器单元设置在反射镜单元的两侧以夹住反射镜单元，并且每个压电致动器单元通过连接单元与镜单元的端部连接。 连接单元具有包括一个或多个板状构件的结构，该板状构件的纵向方向是与旋转轴线垂直的方向，并且用作板状构件变形以使其偏转的板状铰链单元 通过驱动压电致动器单元的厚度方向。 连接单元设置有传感器单元，其通过共振振动来检测在反射镜单元的旋转驱动期间在连接单元中产生的应力。

公开(公告)号：US20150082898A1

公开(公告)日：2015-03-26

申请号：US14554982

申请日：2014-11-26

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： HIDEO OHKOSHI

IPC: G01L1/10

CPC classification number: G01L1/10 ,  G01L1/106 ,  G01L1/162

Abstract: A strain sensor includes a package to be connected to a strain generating body, a detector configured to convert a mechanical strain of the strain generating body into an electric signal and output the electric signal, and a processor chip connected to an upper surface of the package and separated from a detector. A recess is provided in the upper surface of the package. The detector is accommodated in the recess and joined to the recess. This strain sensor can have a small size.

Abstract translation: 应变传感器包括要连接到应变发生体的封装，被配置为将应变发生体的机械应变转换为电信号并输出​​电信号的检测器，以及连接到封装的上表面的处理器芯片 并与检测器分离。 在包装的上表面设置凹部。 检测器容纳在凹部中并且连接到凹部。 该应变传感器可以具有小尺寸。

公开(公告)号：US20140290385A1

公开(公告)日：2014-10-02

申请号：US14211759

申请日：2014-03-14

Applicant: SEIKO INSTRUMENTS INC.

Inventor： Tetsuya NOBE

IPC: G01L1/16

CPC classification number: G01L1/162 ,  G04C21/02 ,  G04G13/021

Abstract: In an electronic apparatus equipped with a mechanism for generating a sound and an oscillation, it is possible to detect an imparted shock with high sensitivity. The electronic apparatus includes: an oscillation unit; a piezoelectric element configured to impart an oscillation due to deformation in correspondence with an applied voltage to the oscillation unit, generating a voltage corresponding to deformation due to a shock imparted to the oscillation unit; an induction element for applying an increased voltage to the piezoelectric element; a first switch performing control as to whether or not to supply an electric current from a power source to the induction element; a second switch for effecting connection or disconnection between the induction element and the piezoelectric element; and a shock detection unit configured to detect a shock imparted to the oscillation unit based on the voltage generated in the piezoelectric element.

Abstract translation: 在配备有用于产生声音和振动的机构的电子设备中，可以以高灵敏度检测被赋予的冲击。 电子设备包括：振荡单元; 压电元件，被配置为根据与所施加的电压对应于所述振荡单元而产生由于变形引起的振荡，产生与由所述振荡单元施加的冲击引起的变形相对应的电压; 用于向压电元件施加增加的电压的感应元件; 第一开关执行关于是否将电流从电源提供给感应元件的控制; 用于实现感应元件和压电元件之间的连接或断开的第二开关; 以及冲击检测单元，其被配置为基于在所述压电元件中产生的电压来检测施加到所述振荡单元的冲击。

公开(公告)号：US20140216175A1

公开(公告)日：2014-08-07

申请号：US14123585

申请日：2012-05-31

Applicant: Alexander Schricker ,  Andreas Mayer ,  Dietmar Kröger

Inventor： Alexander Schricker ,  Andreas Mayer ,  Dietmar Kröger

IPC: G01L1/16

CPC classification number: G01L1/16 ,  G01L1/162 ,  G01L9/008 ,  G01L15/00

Abstract: A sensor for measuring pressure and/or force comprises at least one measuring assembly having at least one piezoelectric measuring element (2) subjected to compressive stress for dynamic pressure and/or force measurement, and a diaphragm (3) for introducing the pressure and/or the force onto at least the piezoelectric measuring element.So as to provide a further embodiment of a sensor for pressure or force measurement as indicated, which allows improved detection of static and dynamic effects, a further measuring assembly (4, 7) that is based on a different physical measuring principle for static pressure and/or force measurement is proposed for this sensor.

Abstract translation: 用于测量压力和/或力的传感器包括至少一个测量组件，其具有经受用于动态压力和/或力测量的压缩应力的至少一个压电测量元件（2）和用于将压力和/ 或至少压电测量元件上的力。 为了提供如所示的用于压力或力测量的传感器的另一实施例，其允许改进的静态和动态效应的检测，基于静态压力的不同物理测量原理的另外的测量组件（4,6） /或力测量被提出用于该传感器。

公开(公告)号：US20140015381A1

公开(公告)日：2014-01-16

申请号：US13936570

申请日：2013-07-08

Applicant: Seiko Epson Corporation

Inventor： Masayuki Kikushima

IPC: H01L41/04

CPC classification number: H01L41/04 ,  G01L1/162 ,  G01L9/0022 ,  H03H9/15 ,  H03H9/2473

Abstract: An oscillation piece includes a first oscillation arm and a second oscillation arm, a first base that connects ends of the first oscillation arm and the second oscillation arm on one side to each other and a second base that connects ends of the first oscillation arm and the second oscillation arm on the other side to each other, and weight films provided on each of the first oscillation arm and the second oscillation arm. The drive electrodes are disposed in positions where the amount of distortion produced in the first oscillation arm and the second oscillation arm is maximized, and the weight films are disposed in positions where the amount of distortion produced in the first oscillation arm and the second oscillation arm is minimized. The oscillation frequency of the oscillation piece can be precisely adjusted by removing part of the weight films.

Abstract translation: 振荡片包括第一振荡臂和第二振荡臂，将第一振荡臂和第二振荡臂的一端彼此一体地连接的第一基座和连接第一振荡臂的端部和第二振荡臂的第二基座 第二振荡臂彼此相对，并且配重膜设置在第一振荡臂和第二振荡臂中的每一个上。 驱动电极设置在第一振荡臂和第二振荡臂中产生的变形量最大的位置，并且配重膜设置在第一振荡臂和第二振荡臂中产生的变形量的位置 被最小化。 可以通过去除部分重量膜来精确地调节振动片的振荡频率。

公开(公告)号：US20130152704A1

公开(公告)日：2013-06-20

申请号：US13721697

申请日：2012-12-20

Applicant: AIRBUS OPERATIONS GMBH

Inventor： Thomas Becker ,  Martin Kluge ,  Michael Schneider ,  Ulrich Schmid ,  Achim Bittner

IPC: G01L1/20

CPC classification number: G01L1/20 ,  B64D2045/0085 ,  G01B7/16 ,  G01L1/162 ,  G01M5/0041 ,  G01M5/0066

Abstract: A device for acquiring mechanical loads on mechanically loaded bodies is provided. The device exhibits a resonance-capable micro-bridge structure, an alternating voltage source with a variable frequency, an impedance measuring device for acquiring the impedance of the micro-bridge structure and an electronic unit for receiving determined impedance values and changing the frequency of the alternating voltage source. By exciting the micro-bridge structure and measuring its impedance, a conclusion can be drawn as to the expansion-dependent resonance frequency, which in return makes it possible to determine the expansion, and hence the mechanical load. Such a device is sufficiently accurate, and largely independent of outside influences.

Abstract translation: 提供了用于获取机械负载体上的机械载荷的装置。 该装置具有可谐振的微桥结构，具有可变频率的交流电压源，用于获取微桥结构的阻抗的阻抗测量装置和用于接收确定的阻抗值并改变频率的电子单元 交流电压源。 通过激发微桥结构并测量其阻抗，可以得出关于膨胀相关共振频率的结论，作为回报，可以确定膨胀，并因此确定机械载荷。 这种装置足够精确，并且在很大程度上独立于外部影响。

公开(公告)号：US20120326566A1

公开(公告)日：2012-12-27

申请号：US13528838

申请日：2012-06-21

Applicant: MITSUAKI KOYAMA ,  TAKERU MUTOH ,  HIROKI IWAI ,  RYOICHI ICHIKAWA

Inventor： MITSUAKI KOYAMA ,  TAKERU MUTOH ,  HIROKI IWAI ,  RYOICHI ICHIKAWA

IPC: H01L41/047

CPC classification number: G01L1/144 ,  G01L1/162 ,  G01P15/097 ,  G01P15/125

Abstract: In an external force detection apparatus, a crystal plate is cantilevered within a container. Excitation electrodes are formed on the top surface and the bottom surface of the crystal plate. A movable electrode is formed on a distal end on the bottom surface of the crystal plate and is connected to the excitation electrode on the bottom surface via an extraction electrode. A fixed electrode is provided on the bottom of the container to oppose the movable electrode. The excitation electrode on the top surface and the fixed electrode are connected to an oscillating circuit. When an external force acts on the crystal plate to bend it, the capacitance between the movable electrode and the fixed electrode changes, and this capacitance change is captured as a change in the oscillating frequency of the crystal plate.

Abstract translation: 在外力检测装置中，晶体板在容器内是悬臂式的。 激发电极形成在晶体板的顶表面和底表面上。 可动电极形成在晶体板的底面的前端，经由引出电极与底面上的激励电极连接。 在容器的底部设置固定电极以与可动电极相对。 顶表面上的激发电极和固定电极连接到振荡电路。 当外力作用于晶体板以使其弯曲时，可动电极和固定电极之间的电容变化，并且该电容变化被捕获为晶体板的振荡频率的变化。

公开(公告)号：US20120279319A1

公开(公告)日：2012-11-08

申请号：US13511130

申请日：2010-11-22

Applicant: Mehdi Boukallel ,  Mathieu Grossard

Inventor： Mehdi Boukallel ,  Mathieu Grossard

IPC: G01L1/10

CPC classification number: G01L1/162 ,  G01L1/106 ,  G01L1/183 ,  G01L9/0022

Abstract: A micro-force sensor comprising a one-piece plate including a first area defining a first recess, which must be held in position relative to a mounting, a second area connected to the first area defining the first recess and a second recess, a measuring beam across the first recess having a first end embedded in the first area and a second end connected to the second area, an excitation beam across the second recess having two ends embedded in the second area and being provided with at least one excitation element, a third area connected to the first area and an effector beam having one free end for receiving the force being measured and one end-embedded in the third area, and a fourth area connecting the embedded end of the effector beam to the second end of the measuring beam, which is provided with a measuring element.

Abstract translation: 一种微力传感器，包括一体式板，其包括限定第一凹部的第一区域，所述第一区域必须相对于安装件保持在适当位置，连接到限定所述第一凹部的所述第一区域的第二区域和第二凹部， 横跨第一凹部的第一凹部具有嵌入在第一区域中的第一端和连接到第二区域的第二端，跨越第二凹部的激发束，其具有嵌入第二区域中的两个端部并且设置有至少一个激励元件， 连接到第一区域的第三区域和具有一个自由端的效应器梁，用于接收被测量的力和一个端部嵌入在第三区域中;以及第四区域，其将效应束的嵌入端连接到测量的第二端 梁，其设有测量元件。

公开(公告)号：US20110221312A1

公开(公告)日：2011-09-15

申请号：US13042783

申请日：2011-03-08

Applicant: Ryuta NISHIZAWA

Inventor： Ryuta NISHIZAWA

IPC: H01L41/04

CPC classification number: G01L1/162 ,  G01L9/0022 ,  G01P15/097

Abstract: A vibrator element includes: a base portion; a vibrating arm that extends in a first direction from the base portion, has a width in a second direction perpendicular to the first direction in the plan view, and has a thickness in a third direction perpendicular to the first direction and the second direction; and an inter digital transducer, in which electrode fingers are arranged in the first direction, disposed at least one of a first surface, which is perpendicular to the third direction, and a second surface, which faces the first surface, of the vibrating arm, wherein the vibrating arm is vibrated in the third direction by stretching or contacting the vibrating arm in the first direction by using an electric field in the first direction that is generated by the inter digital transducer.

Abstract translation: 振动元件包括：基部; 从基部沿第一方向延伸的振动臂在平面图中沿垂直于第一方向的第二方向具有宽度，并且具有与第一方向和第二方向垂直的第三方向的厚度; 以及其中电极指沿着第一方向排列的数字式换能器，其设置有与第三方向垂直的第一表面和面对振动臂的第一表面的第二表面中的至少一个， 其中所述振动臂通过使用由所述数字式换能器产生的所述第一方向上的电场在所述第一方向上拉伸或接触所述振动臂而在所述第三方向上振动。