公开(公告)号：US07118982B2

公开(公告)日：2006-10-10

申请号：US10935795

申请日：2004-09-07

Applicant: Alexander Govyadinov ,  Michael J. Regan

Inventor： Alexander Govyadinov ,  Michael J. Regan

IPC: H01L21/331

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J29/467 ,  H01J2201/304 ,  H01J2201/3125

Abstract: An emitter includes an electron source and a cathode. The cathode has an emissive surface. The emitter further includes a continuous anisotropic conductivity layer disposed between the electron source and the emissive surface of the cathode. The anisotropic conductivity layer has an anisotropic sheet resistivity profile and provides for substantially uniform emissions over the emissive surface of the emitter.

公开(公告)号：US20060044730A1

公开(公告)日：2006-03-02

申请号：US11209332

申请日：2005-08-23

Applicant: Hirofumi Yamaguchi ,  Kei Sato ,  Toshikatsu Kashiwaya

Inventor： Hirofumi Yamaguchi ,  Kei Sato ,  Toshikatsu Kashiwaya

IPC: H01H47/00

CPC classification number: H01J1/312 ,  B82Y10/00 ,  C04B35/493 ,  C04B35/499 ,  C04B2235/3206 ,  C04B2235/3213 ,  C04B2235/3255 ,  C04B2235/3256 ,  C04B2235/3258 ,  C04B2235/3267 ,  C04B2235/3279 ,  C04B2235/3298 ,  C04B2235/5445 ,  C04B2235/768 ,  C04B2235/79 ,  H01J29/04 ,  H01J31/127 ,  H01J2201/3125 ,  H01J2201/317 ,  H01J2329/0484 ,  H01J2329/0492

Abstract: [Problems] To provide a dielectric component which remedies the degradation of amount of electron emission of an electron emitter. [Means to Solve the Problems] Provided is a dielectric composition which, when applied to an electron emitter, enables suppression of reduction of electron emission quantity with passage of time. The dielectric composition contains, as a primary component, a PMN-PZ-PT ternary solid solution composition represented by the following formula PbxBip(Mgy/3Nb2/3)aTib-zMzZrcO3 [wherein x, p, and y satisfy the following relations: 0.85≦x≦1.05, 0.02≦p≦0.1, and 0.8≦y≦1.0; a, b, and c are decimal numbers falling within a region formed by connecting the following five points (0.550, 0.425, 0.025), (0.550, 0.150, 0.300), (0.100, 0.150, 0.750), (0.100, 0.525, 0.375), and (0.375, 0.425, 0.200); z satisfies the following relation: 0.02≦z≦0.10; and M is at least one element selected from among Nb, Ta, Mo, and W], and contains Ni in an amount of 0.05 to 2.0 wt. % as reduced to NiO.

Abstract translation: [问题]提供补偿电子发射体的电子发射量的劣化的电介质成分。 解决问题的手段提供一种电介质组合物，当应用于电子发射体时，可以抑制电子发射量随时间的减少。 电介质组合物含有作为主要成分的由下式表示的PMN-PZ-PT三元固溶体组合物Pb（Mg y / y） 3 Nb 2/3 3）a z z z z z z z z z z z z z z z z z z z z z z z z z z z z z z z z z z z z z z z z z z / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / 其中x，p和y满足以下关系：0.85 <= x <= 1.05,0.02 <= p <= 0.1，0.8 <= y <= 1.0; a，b，c是分别连接以下五个点（0.550,0.425,0.025），（0.550,0.150,0.300），（0.100,0.150,0.7050），（0.100,0.525,0.375），（0.100,0.525,0.375）， ）和（0.375,0.425,0.200）; z满足以下关系：0.02 <= z <= 0.10; 并且M是选自Nb，Ta，Mo和W中的至少一种元素，并且含有0.05-2.0重量％的Ni。 ％减少到NiO。

公开(公告)号：US06891176B2

公开(公告)日：2005-05-10

申请号：US10601090

申请日：2003-06-20

Applicant: Petr Viscor ,  Michael Jensen ,  Rolf Stribolt Andersen ,  Vladimir Kolarik ,  Armin Delong

Inventor： Petr Viscor ,  Michael Jensen ,  Rolf Stribolt Andersen ,  Vladimir Kolarik ,  Armin Delong

IPC: G11B9/10 ,  H01J1/312 ,  H01J7/24 ,  H01J37/06 ,  H01J37/317

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J2201/3125

Abstract: Metal-insulator-metal planar electron emitters (PEES) have potential for use in advanced lithography for future generations of semiconductor devices. The PEE has, however, a limited lifetime, which restricts its commercial applicability. It is believed that the limited lifetime of the PEE is limited by in-diffusion of metal ions from the anode. The in-diffusion may be countered in a number of different ways. One way is to cool the PEE to temperatures below room temperature. This lowers the metal ion mobility, and so the metal ions are less likely to diffuse into the insulator layer. Another way is to occasionally reverse the electrical potential across the PEE from the polarity used to generate the electron beam. This counteracts the electrical driving force that drives the positively charged metal ions from the PEE anode to the PEE cathode.

Abstract translation: 金属 - 绝缘体 - 金属平面电子发射体（PEES）有潜力用于未来几代半导体器件的先进光刻技术。 然而，PEE的寿命有限，限制了其商业应用。 据信，PEE的有限寿命受到来自阳极的金属离子的扩散的限制。 内扩散可以以多种不同的方式进行反驳。 一种方法是将PEE冷却到低于室温的温度。 这降低了金属离子迁移率，因此金属离子不太可能扩散到绝缘体层中。 另一种方法是偶尔从用于产生电子束的极性反转PEE两端的电位。 这抵消了驱动从PEE阳极到PEE阴极的带正电荷的金属离子的电驱动力。

公开(公告)号：US20050073235A1

公开(公告)日：2005-04-07

申请号：US10951509

申请日：2004-09-28

Applicant: Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Iwao Ohwada

Inventor： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Iwao Ohwada

IPC: H01J29/04 ,  G09G3/22 ,  H01J1/05 ,  H01J1/14 ,  H01J1/30 ,  H01J1/312 ,  H01J19/06 ,  H01J31/12 ,  H01J63/02 ,  H01J63/06

CPC classification number: H01J1/312 ,  B82Y10/00 ,  G09G3/22 ,  G09G2310/06 ,  H01J31/127 ,  H01J63/02 ,  H01J2201/3125

Abstract: An electron emitter includes a lower electrode formed on a glass substrate, an emitter section made of dielectric film formed on the lower electrode, and an upper electrode formed on the emitter section. A drive voltage for electron emission is applied between the upper electrode and the lower electrode. At least the upper electrode has a plurality of through regions through which the emitter section is exposed. The upper electrode has a surface which faces the emitter section in peripheral portions of the through regions and which is spaced from the emitter section.

Abstract translation: 电子发射器包括形成在玻璃基板上的下电极，形成在下电极上的电介质膜制成的发射极部分和形成在发射极部分上的上电极。 用于电子发射的驱动电压施加在上电极和下电极之间。 至少上部电极具有多个通过发射极部分暴露的通过区域。 上电极具有与通孔区域的周边部分相对的发射极部分的表面，并且与发射极部分间隔开。

公开(公告)号：US06835947B2

公开(公告)日：2004-12-28

申请号：US10066158

申请日：2002-01-31

Applicant: Alexander Govyadinov ,  Michael J. Regan

Inventor： Alexander Govyadinov ,  Michael J. Regan

IPC: H01L2906

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J29/467 ,  H01J2201/304 ,  H01J2201/3125

Abstract: An emitter includes an electron source and a cathode. The cathode has an emissive surface. The emitter further includes a continuous anisotropic conductivity layer disposed between the electron source and the emissive surface of the cathode. The anisotropic conductivity layer has an anisotropic sheet resistivity profile and provides for substantially uniform emissions over the emissive surface of the emitter.

Abstract translation: 发射体包括电子源和阴极。 阴极具有发射表面。 发射极还包括设置在电子源和阴极的发射表面之间的连续各向异性导电层。 各向异性导电层具有各向异性的电阻率分布，并且在发射体的发射表面上提供基本均匀的发射。

公开(公告)号：US20040256995A1

公开(公告)日：2004-12-23

申请号：US10731901

申请日：2003-12-09

Applicant: NGK Insulators, Ltd.

Inventor： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Iwao Ohwada ,  Takayoshi Akao

IPC: G09G003/10

CPC classification number: H01J1/312 ,  B82Y10/00 ,  G09G3/2022 ,  G09G3/22 ,  H01J31/127 ,  H01J2201/3125

Abstract: One image is displayed in a period as one frame, which includes one charge accumulation period and one light emission period. In the charge accumulation period, all electron emitters are scanned, and voltages depending on the luminance levels of corresponding pixels are applied to the electron emitters which correspond to pixels to be turned on (to emit light), to accumulate charges (electrons) in amounts depending on the luminance levels of corresponding pixels in the electron emitters which correspond to pixels to be turned on. In the next light emission period, a constant voltage is applied to all the electron emitters to emit electrons in amounts depending on the luminance levels of corresponding pixels from the electron emitters which correspond to pixels to be turned on, thereby emitting light from the pixels to be turned on.

Abstract translation: 一个图像在一个周期中显示为一帧，其包括一个电荷累积周期和一个发光周期。 在电荷累积期间，对所有的电子发射体进行扫描，对应于要导通（发光）的像素的电子发射体，施加与相应像素的亮度等级相对应的电压，以积累电荷（电子） 取决于电子发射器中对应于要打开的像素的对应像素的亮度水平。 在下一个发光周期中，恒定电压被施加到所有的电子发射器上，以发射电子量，这取决于对应于要打开的像素的电子发射器的对应像素的亮度水平，从而将来自像素的光发射到 打开

公开(公告)号：US20040256579A1

公开(公告)日：2004-12-23

申请号：US10601090

申请日：2003-06-20

Applicant: Nanion ApS

Inventor： Petr Viscor ,  Michael Jensen ,  Rolf Stribolt Andersen ,  Vladimir Kolarik ,  Armin Delong

IPC: H01J037/06 ,  H01J037/317

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J2201/3125

Abstract: Metal-insulator-metal planar electron emitters (PEEs) have potential for use in advanced lithography for future generations of semiconductor devices. The PEE has, however, a limited lifetime, which restricts its commercial applicability. It is believed that the limited lifetime of the PEE is limited by in-diffusion of metal ions from the anode. The in-diffusion may be countered in a number of different ways. One way is to cool the PEE to temperatures below room temperature. This lowers the metal ion mobility, and so the metal ions are less likely to diffuse into the insulator layer. Another way is to occasionally reverse the electrical potential across the PEE from the polarity used to generate the electron beam. This counteracts the electrical driving force that drives the positively charged metal ions from the PEE anode to the PEE cathode.

Abstract translation: 金属 - 绝缘体 - 金属平面电子发射体（PEE）可用于未来几代半导体器件的先进光刻技术。 然而，PEE的寿命有限，限制了其商业应用。 据信，PEE的有限寿命受到来自阳极的金属离子的扩散的限制。 内扩散可以以多种不同的方式进行反驳。 一种方法是将PEE冷却到低于室温的温度。 这降低了金属离子迁移率，因此金属离子不太可能扩散到绝缘体层中。 另一种方法是偶尔从用于产生电子束的极性反转PEE两端的电位。 这抵消了驱动从PEE阳极到PEE阴极的带正电荷的金属离子的电驱动力。

公开(公告)号：US20040233136A1

公开(公告)日：2004-11-25

申请号：US10808258

申请日：2004-03-24

Applicant: NGK Insulators, Ltd.

Inventor： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Iwao Ohwada ,  Takayoshi Akao

IPC: G09G003/20 ,  G09G003/22

CPC classification number: B82Y10/00 ,  G09G3/2022 ,  G09G3/22 ,  H01J1/312 ,  H01J31/127 ,  H01J2201/3125

Abstract: One image is displayed in a period as one frame, which includes one charge accumulation period and one light emission period. In the charge accumulation period, all electron emitters are scanned, and voltages depending on the luminance levels of corresponding pixels are applied to the electron emitters which correspond to pixels to be turned on (to emit light), to accumulate charges (electrons) in amounts depending on the luminance levels of corresponding pixels in the electron emitters which correspond to pixels to be turned on. In the next light emission period, a constant voltage is applied to all the electron emitters to emit electrons in amounts depending on the luminance levels of corresponding pixels from the electron emitters which correspond to pixels to be turned on, thereby emitting light from the pixels to be turned on.

Abstract translation: 一个图像在一个周期中显示为一帧，其包括一个电荷累积周期和一个发光周期。 在电荷累积期间，对所有的电子发射体进行扫描，对应于要导通（发光）的像素的电子发射体，施加与相应像素的亮度等级相对应的电压，以积累电荷（电子） 取决于电子发射器中对应于要打开的像素的对应像素的亮度水平。 在下一个发光周期中，恒定电压被施加到所有的电子发射器上，以发射电子量，这取决于对应于要打开的像素的电子发射器的对应像素的亮度水平，从而将来自像素的光发射到 打开

公开(公告)号：US20040017160A1

公开(公告)日：2004-01-29

申请号：US10349995

申请日：2003-01-24

Inventor： Masakazu Sagawa ,  Mutsumi Suzuki ,  Toshiaki Kusunoki

IPC: G09G003/10

CPC classification number: B82Y10/00 ,  G09G3/22 ,  H01J1/312 ,  H01J9/022 ,  H01J9/241 ,  H01J2201/3125

Abstract: A display having hot electron type electron sources displaying an image by a line sequential scanning scheme can prevent poor brightness uniformity along scan lines. A top electrode bus line of a hot electron type electron source is a scan line and a bottom electrode thereof is a data line. The top electrode bus line has a sheet resistance lower than that of the bottom electrode. The wire sheet resistance of the scam line can be reduced to several m/square. When forming a 40 inch large screen FED using the hot electron type electron sources, a voltage drop amount produced in the scan line can be suppressed below an allowable range. A high quality image without poor brightness uniformity can be obtained.

Abstract translation: 具有通过行顺序扫描方式显示图像的热电子型电子源的显示器可以防止扫描线的亮度均匀性差。 热电子型电子源的顶部电极母线是扫描线，其底部电极是数据线。 顶部电极母线具有低于底部电极的薄层电阻。 欺诈线的电线电阻可以减小到几米/平方。 当使用热电子型电子源形成40英寸大屏幕FED时，可以将在扫描线上产生的电压降量抑制在允许范围以下。 可以获得不具有不均匀亮度的高质量图像。

公开(公告)号：US20030141494A1

公开(公告)日：2003-07-31

申请号：US10066158

申请日：2002-01-31

Inventor： Alexander Govyadinov ,  Michael J. Regan

IPC: H01L029/06

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J29/467 ,  H01J2201/304 ,  H01J2201/3125

Abstract: An emitter includes an electron source and a cathode. The cathode has an emissive surface. The emitter further includes a continuous anisotropic conductivity layer disposed between the electron source and the emissive surface of the cathode. The anisotropic conductivity layer has an anisotropic sheet resistivity profile and provides for substantially uniform emissions over the emissive surface of the emitter.

Abstract translation: 发射体包括电子源和阴极。 阴极具有发射表面。 发射极还包括设置在电子源和阴极的发射表面之间的连续各向异性导电层。 各向异性导电层具有各向异性的电阻率分布，并且在发射体的发射表面上提供基本均匀的发射。