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公开(公告)号:US20070035805A1
公开(公告)日:2007-02-15
申请号:US11586180
申请日:2006-10-25
Applicant: Clarence Chui , Mithran Mathew , Marc Mignard
Inventor: Clarence Chui , Mithran Mathew , Marc Mignard
IPC: G02B26/00
CPC classification number: G09G3/3466 , G02B26/001 , G09G3/2011 , G09G3/207 , G09G3/2074 , G09G2300/06
Abstract: A system and method for addressing an array of MEMS display elements, such as interferometric modulators, from a drive control. A display includes groups of display elements that are addressed with a commonly applied drive signal. In one embodiment, the groups of display elements are configured to have different response times and are driven by pulses of varying length indicative of those response times. In another embodiment, the groups of display elements are configured to have different actuation voltages and are driven by pulses of varying voltage indicative of those actuation voltages.
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52.
公开(公告)号:US20070019923A1
公开(公告)日:2007-01-25
申请号:US11491389
申请日:2006-07-21
Applicant: Teruo Sasagawa , Clarence Chui , Manish Kothari , SuryaPrakash Ganti , Jeffrey Sampsell , Chun-Ming Wang
Inventor: Teruo Sasagawa , Clarence Chui , Manish Kothari , SuryaPrakash Ganti , Jeffrey Sampsell , Chun-Ming Wang
IPC: G02B6/00
CPC classification number: G02B26/0841 , B81B2201/042 , B81B2203/0307 , B81C1/00595 , B81C2201/014 , G02B26/001
Abstract: A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.
Abstract translation: 具有由保护材料包围的牺牲材料形成的支撑结构的微机电系统装置。 微机电系统装置包括其上形成有电极的基板。 另一电极通过空腔与第一电极分离,并形成可移动层,该可移动层由牺牲材料形成的支撑结构支撑。
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53.
公开(公告)号:US20070019922A1
公开(公告)日:2007-01-25
申请号:US11491047
申请日:2006-07-21
Applicant: Teruo Sasagawa , Clarence Chui , Manish Kothari , SuryaPrakash Ganti , Jeffrey Sampsell
Inventor: Teruo Sasagawa , Clarence Chui , Manish Kothari , SuryaPrakash Ganti , Jeffrey Sampsell
IPC: G02B6/00
CPC classification number: G02B26/0841 , B81B2201/042 , B81B2203/0307 , B81C1/00595 , B81C2201/0136 , G02B6/3584 , G02B26/001
Abstract: A microelectromechanical systems device having support structures formed of sacrificial material that is selectively diffused with a dopant material or formed of a selectively oxidized metal sacrificial material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a diffused or oxidized sacrificial material.
Abstract translation: 具有由牺牲材料形成的支撑结构的微机电系统装置,该牺牲材料选择性地用掺杂剂材料扩散或由选择性氧化的金属牺牲材料形成。 微机电系统装置包括其上形成有电极的基板。 另一电极通过空腔与第一电极分离,并形成可移动层,其由由扩散或氧化的牺牲材料形成的支撑结构支撑。
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公开(公告)号:US07142346B2
公开(公告)日:2006-11-28
申请号:US11051251
申请日:2005-02-04
Applicant: Clarence Chui , Mithran C. Mathew , Marc Mignard
Inventor: Clarence Chui , Mithran C. Mathew , Marc Mignard
CPC classification number: G09G3/3466 , G02B26/001 , G09G3/2011 , G09G3/207 , G09G3/2074 , G09G2300/06
Abstract: A system and method for addressing an array of MEMS display elements, such as interferometric modulators, from a drive control. A display includes groups of display elements that are addressed with a commonly applied drive signal. In one embodiment, the groups of display elements are configured to have different response times and are driven by pulses of varying length indicative of those response times. In another embodiment, the groups of display elements are configured to have different actuation voltages and are driven by pulses of varying voltage indicative of those actuation voltages.
Abstract translation: 用于从驱动控制器寻址诸如干涉式调制器的MEMS显示元件阵列的系统和方法。 显示器包括通过常用的驱动信号寻址的显示元件组。 在一个实施例中,显示元件组被配置为具有不同的响应时间并由指示那些响应时间的变化长度的脉冲驱动。 在另一个实施例中,显示元件组被配置为具有不同的致动电压并由指示这些致动电压的变化电压的脉冲驱动。
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公开(公告)号:US20060219435A1
公开(公告)日:2006-10-05
申请号:US11436345
申请日:2006-05-18
Applicant: Manish Kothari , Clarence Chui , Lauren Palmateer
Inventor: Manish Kothari , Clarence Chui , Lauren Palmateer
IPC: H01R13/46
CPC classification number: G02B26/001 , B81B7/0038
Abstract: A MEMS device is packaged with a control material that is included in the package to affect an operation of a moveable element of the device. The control material may affect operational characteristics including actuation and release voltages and currents, mechanical affects including damping and stiffness, lifetime of the device, optical properties, thermal affects and corrosion. The control material may be inserted into the package as part of any of several structural components of the package or the MEMS device.
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公开(公告)号:US20060077529A1
公开(公告)日:2006-04-13
申请号:US11198127
申请日:2005-08-05
Applicant: Clarence Chui , Jeffrey Sampsell
Inventor: Clarence Chui , Jeffrey Sampsell
IPC: G02B26/00
CPC classification number: B81C1/00142 , B81B2201/042 , G02B26/001
Abstract: Provided is a MEMS device comprising an integrated post and deformable layer. In some embodiments, the transition between the post and deformable layer comprises substantially a single arcuate or convex surface, thereby providing a mechanically robust structure. Some embodiments provide a method for fabricating a MEMS device comprising the use of a self-planarizing sacrificial material, which provides a surface conducive to the formation of a relatively uniform deformable layer thereon.
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公开(公告)号:US20060077508A1
公开(公告)日:2006-04-13
申请号:US11112734
申请日:2005-04-22
Applicant: Clarence Chui , William Cummings , Brian Gally
Inventor: Clarence Chui , William Cummings , Brian Gally
IPC: G02F1/03
CPC classification number: G02B26/001 , Y10T29/49002
Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.
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公开(公告)号:US20060067651A1
公开(公告)日:2006-03-30
申请号:US11208420
申请日:2005-08-19
Applicant: Clarence Chui
Inventor: Clarence Chui
IPC: G02B6/00
CPC classification number: G02B26/001
Abstract: An optical device includes a non-transparent substrate. The optical device further includes a first optical layer which is at least partially transmissive and at least partially reflective to incident light. The optical device further includes a second optical layer which is at least partially reflective to incident light. The second optical layer is spaced from the first optical layer. At least one of the first optical layer and the second optical layer is movable between a first position with a first distance between the first and second optical layers and a second position with a second distance between the first and second optical layers. Movement of the at least one of the first optical layer and the second optical layer between the first and second positions modulates the reflectivity of the device.
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公开(公告)号:US20060067643A1
公开(公告)日:2006-03-30
申请号:US11096545
申请日:2005-04-01
Applicant: Clarence Chui
Inventor: Clarence Chui
IPC: G02B6/00
CPC classification number: G02B26/001 , G09G3/2011 , G09G3/207 , G09G3/2074 , G09G3/3466 , G09G2300/0439 , Y10S385/901
Abstract: A display having a plurality of reflective display elements. In one embodiment, the display elements comprise at least one electrode having a plurality of active areas. In one embodiment, at least two of the sizes of the active areas are different with respect to each other, e.g., they are non-uniform in size. The interferometric modulators have a plurality of states, wherein selected ones of the interferometric modulators are configured to be actuated depending differing electrostatic forces in the interferometric modulators. The electrostatic forces in the interferometric modulators are different at least in part due to variations in the sizes of the active areas of the electrodes.
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公开(公告)号:US20060067641A1
公开(公告)日:2006-03-30
申请号:US11045738
申请日:2005-01-28
Applicant: Lauren Palmateer , William Cummings , Brian Gally , Mark Miles , Jeffrey Sampsell , Clarence Chui , Manish Kothari
Inventor: Lauren Palmateer , William Cummings , Brian Gally , Mark Miles , Jeffrey Sampsell , Clarence Chui , Manish Kothari
IPC: G02B6/00
CPC classification number: G02B26/007 , B81B2201/047 , B81C1/00285 , B81C1/00333 , B81C2203/0136 , B81C2203/0145 , G02B26/001 , G02B26/0825 , G02B26/0833
Abstract: A package structure and method of packaging for an interferometric modulator. A thin film material is deposited over an interferometric modulator and transparent substrate to encapsulate the interferometric modulator. A gap or cavity between the interferometric modulator and the thin film provides a space in which mechanical parts of the interferometric modulator may move. The gap is created by removal of a sacrificial layer that is deposited over the interferometric modulator.
Abstract translation: 用于干涉式调制器的封装结构和封装方法。 将薄膜材料沉积在干涉式调制器和透明衬底上以封装干涉式调制器。 干涉式调制器和薄膜之间的间隙或腔提供干涉式调制器的机械部分可以移动的空间。 通过去除沉积在干涉式调制器上的牺牲层产生间隙。
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