Abstract:
An object of the invention is to provide a technology that can timely collects particulates in sample water even when abnormality is observed in the result obtained by a measurement unit for measuring particulates in sample water. Provided is a particulate-measuring method comprising filtering sample water continuously, even when a measurement unit for measuring particulates in sample water and a filtration unit of filtering the sample water and collecting the particulates for analysis by direct microscopic method are both in operation and abnormality is observed in the result obtained by the measurement unit.
Abstract:
Provided is an ultrapure water producing apparatus equipped with fewer reverse osmosis membrane separation units. The ultrapure water producing apparatus includes a primary water purification system 2 and a subsystem 3 configured to treat water treated by the primary water purification system 2. A reverse osmosis membrane separation unit is provided in at least the primary water purification system 2. The reverse osmosis membrane separation unit installed in the primary water purification system 2 is a high-pressure reverse osmosis membrane separation unit installed in a single stage. The high-pressure reverse osmosis membrane separation unit has a standard operating pressure of 5.52 MPa, a pure water flux of 0.5 m3/m2·D or more, and a NaCl rejection of 99.5% or more (32,000 mg/L NaCl).
Abstract translation:本发明提供一种装有较少的反渗透膜分离装置的超纯水制造装置。 超纯水生成装置包括一次净水系统2和配置成处理由一次净水系统2处理的水的子系统3.至少在一次净水系统2中设置反渗透膜分离单元。反渗透 安装在初级水净化系统2中的膜分离单元是安装在单级中的高压反渗透膜分离单元。 高压反渗透膜分离装置的标准工作压力为5.52MPa,纯水通量为0.5m 3 / m 2·D以上,NaCl排除率为99.5%以上(32,000mg / L NaCl)。
Abstract:
A radioactive material adsorbent having large adsorption capacity is provided. The radioactive material adsorbent contains a titanate represented by a chemical formula M2Ti2O5 (M: univalent cation). The M2Ti2O5 has a large cation exchange capacity, exhibits thermal stability, exhibits excellent chemical resistance to acids, alkalis, and the like and, therefore is suitable for an adsorbent for a water treatment. The mechanical strength is improved by adding a binder to this titanate and performing forming and firing, so that pulverization due to vibration, impact, and the like applied during transportation and the like, and falling off of primary particles at the time of putting into water can be reduced.
Abstract:
A method and system for cleaning a semiconductor substrate in which Al is at least partially exposed on a silicon substrate and which is silicided with a metallic substance, without damaging Al and a silicide layer, comprising a cleaning portion (2) for cleaning a semiconductor substrate 100 in which Al is at least partially exposed on a silicon substrate and which is silicided with a metallic substance; a delivery portion (30) disposed in the cleaning portion for delivering a cleaning solution to the semiconductor substrate in the cleaning portion to bring the cleaning solution into contact with the semiconductor substrate; a sulfuric acid solution transfer path (5) connected to the delivery portion for transferring a sulfuric acid solution comprising an oxidant to the delivery portion; and an adsorptive inhibitor solution transfer path (11) connected to the delivery portion for transferring a solution comprising an adsorptive inhibitor having any one or more of N-based, S-based, and P-based polar groups to the delivery portion. The sulfuric acid solution and the adsorptive inhibitor solution may be mixed or separately transferred to come into contact with or on the semiconductor substrate.
Abstract:
Provided are a distributor capable of feeding a liquid in a state of evenly flowing out from an entire opening while avoiding the opening from being blocked by sludge and keeping a pressure loss small, a settling tank that employs the distributor, and a method for operating the settling tank. A distributor 10 being in the form of a rectangular frame and having straight tubular sides 11 to 14 is disposed in a lower space within a settling tank 1. A liquid outlet opening 16 extending in a lengthwise direction of the distributor 10 is formed in a bottom surface of the distributor 10. An open angle θ of the opening 16 with respect to a tube axis is 60 to 180°, and preferably 90 to 150°.
Abstract:
The invention is directed to a liquid heater for rapidly heating a liquid without overheating the liquid. The liquid heater comprises a liquid flow channel having a passage through which liquid flows, a heating part disposed outside the liquid flow channel, a heat reflecting part facing a heat radiating side of the heating part, and a cooling part through which a cooling medium flows adjacent a reverse side of a reflecting surface of the heat reflecting part for cooling the heat reflecting part. Radiant heat not absorbed in the liquid is reflected by the heat reflecting part. The heat reflecting part reflects radiant heat cooled by the cooling part so that the body of the liquid heater and peripheral members are maintained at a temperature not higher than a predetermined temperature to prevent overheating the liquid.
Abstract:
An electrodeionization apparatus has an anolyte compartment 17 having an anode 11, a catholyte compartment 18 having a cathode 12, concentrating compartments 15, and desalting compartments 16. The concentrating compartments 15 and the desalting compartments 16 are alternately formed between the anolyte compartment 17 and the catholyte compartment 18 by alternately arranging a plurality of anion-exchange membranes 13 and a plurality of cation-exchange membranes 14. The desalting compartments 16 are filled with ion-exchanger and the concentrating compartments 15 are filled with ion-exchanger, activated carbon, or electric conductor. Electrode water flows into the anolyte compartment 17 and the catholyte compartment 18. Concentrated water is introduced into the concentrating compartments 15. Raw water is fed into the desalting compartment 16 to produce the deionized water from the desalting compartment 16. Water containing silica or boron at a lower concentration than the raw water is introduced into the concentrating compartments 15 as the concentrated water in a direction from a side near an outlet for the deionized water toward a side near an inlet for the raw water of the desalting compartments 16. At least a part of concentrated water flowing out of the concentrating compartments 15 is discharged out of a circulatory system.
Abstract:
According to the method of treating water in a cooling water system, adhesion of fouling is on-line monitored by a compact and inexpensive apparatus and a slime control treatment is intensified according to the result of on-line monitoring. The water treatment is intensified in response to the change of electric potential of a sensor monitoring microbial fouling 11 made of sensitized metallic material. When the electric potential of the sensor exceeds a threshold value, an agent is added through both chemical feeding pumps 15 and 17. When the electric potential lowers to the normal value, the agent is added only through the pump 15.
Abstract:
A method for operating a desalting device having a first desalting device and a second desalting device, includes: a normal operation step, in which a water to be treated is supplied to a first desalting device and separated into a first concentrated water and a first desalted water, and the first concentrated water is supplied to a second desalting device and separated into a second concentrated water and a second desalted water; and a dilute water passing operation step, in which a dilute water having a lower concentration than the first concentrated water is passed through the second desalting device before a corrected permeated water amount of the second desalting device decreases.