Micro-electro-mechanical sensing device and manufacturing method thereof
    51.
    发明授权
    Micro-electro-mechanical sensing device and manufacturing method thereof 有权
    微机电传感装置及其制造方法

    公开(公告)号:US09244093B2

    公开(公告)日:2016-01-26

    申请号:US13688099

    申请日:2012-11-28

    Abstract: A micro-electro-mechanical sensing device including a substrate, a semiconductor layer, a supporting pillar, a first suspended arm, a connecting member, a second suspended arm, and a proof mass is provided. The semiconductor layer is disposed on or above the substrate. The supporting pillar is disposed on or above the semiconductor layer. The first suspended arm is disposed on the supporting pillar. The supporting connects a portion of the first suspended arm. The connecting member directly or indirectly connects another portion of the first suspended arm. The second suspended arm has a first surface and a second surface opposite to the first surface. The connecting member connects a portion of the first surface. The proof mass connects the second suspended arm and it includes a portion of the second suspended arm as a portion of the proof mass. A method for manufacturing the device is also provided.

    Abstract translation: 提供了一种包括衬底,半导体层,支撑柱,第一悬臂,连接构件,第二悬臂和校验块的微机电感测装置。 半导体层设置在基板上或上方。 支撑柱设置在半导体层上或上方。 第一悬挂臂设置在支撑柱上。 支撑件连接第一悬臂的一部分。 连接构件直接或间接连接第一悬臂的另一部分。 第二悬臂具有与第一表面相对的第一表面和第二表面。 连接构件连接第一表面的一部分。 检验质量块连接第二悬臂,并且其包括第二悬臂的一部分作为证明块的一部分。 还提供了一种用于制造该装置的方法。

    INPUT SYSTEM
    53.
    发明申请
    INPUT SYSTEM 审中-公开
    输入系统

    公开(公告)号:US20130342442A1

    公开(公告)日:2013-12-26

    申请号:US13907182

    申请日:2013-05-31

    Abstract: An input system includes a first gesture detection unit and a second gesture detection unit. The first gesture detection unit includes a first light emitting device for emitting a first light beam, a first light sensing device for receiving the first light beam reflected by a first motion trajectory generated by a user and outputting a first image signal, and a first processing unit for processing the first image signal and outputting a first command signal. The second gesture detection unit includes a second light emitting device for emitting a second light beam, a second light sensing device for receiving the second light beam reflected by a second motion trajectory generated by the user and outputting a second image signal, and a second processing unit for processing the second image signal and outputting a second command signal.

    Abstract translation: 输入系统包括第一手势检测单元和第二手势检测单元。 第一手势检测单元包括用于发射第一光束的第一发光装置,用于接收由用户生成的第一运动轨迹反射并输出第一图像信号的第一光束的第一光感测装置,以及第一处理 单元,用于处理第一图像信号并输出​​第一命令信号。 第二手势检测单元包括用于发射第二光束的第二发光装置,用于接收由用户产生的第二运动轨迹反射并输出第二图像信号的第二光束的第二光感测装置,以及第二处理 单元,用于处理第二图像信号并输出​​第二命令信号。

    Three-Dimensional Micro-Electro-Mechanical-System Sensor
    54.
    发明申请
    Three-Dimensional Micro-Electro-Mechanical-System Sensor 有权
    三维微机电系统传感器

    公开(公告)号:US20130139595A1

    公开(公告)日:2013-06-06

    申请号:US13482989

    申请日:2012-05-29

    Abstract: The present invention discloses a three-dimensional micro-electro-mechanical-system sensor. The sensor includes movable first electrodes, plural movable second electrodes, plural fixed third electrodes, and plural fixed fourth electrodes. The first electrodes and their adjacent third electrodes form at least one first capacitor and at least one second capacitor, and the second electrodes and their adjacent fourth electrodes form at least one third capacitor. The capacitance change of the first capacitor reflects the displacement of the proof mass along a first axis, the capacitance change of the second capacitor reflects the displacement of the proof mass along a second axis, and the capacitance change of the third capacitor reflects the displacement of the proof mass along a third axis. The first, second, and third axes define a three-dimensional coordinate system.

    Abstract translation: 本发明公开了一种三维微机电系统传感器。 传感器包括可移动的第一电极,多个可移动的第二电极,多个固定的第三电极和多个固定的第四电极。 第一电极及其相邻的第三电极形成至少一个第一电容器和至少一个第二电容器,并且第二电极及其相邻的第四电极形成至少一个第三电容器。 第一电容器的电容变化反映了沿着第一轴的检测质量块的位移,第二电容器的电容变化反映了沿第二轴的检验质量块的位移,并且第三电容器的电容变化反映了第三电容器的位移 沿着第三轴的检验质量。 第一,第二和第三轴定义三维坐标系。

    INPUT DEVICE AND INPUT METHOD
    55.
    发明申请
    INPUT DEVICE AND INPUT METHOD 审中-公开
    输入设备和输入方法

    公开(公告)号:US20120326975A1

    公开(公告)日:2012-12-27

    申请号:US13603337

    申请日:2012-09-04

    CPC classification number: G06F3/042 G06F3/017 G06F3/0304 G06F3/0416

    Abstract: The present invention discloses an input device and an input method. The input device comprises: an image acquiring device for acquire sequence of images when an object moves in front of the field of view of the image acquiring device; and a processor for generating a rotation signal according to the rotation status of the object.

    Abstract translation: 本发明公开了一种输入装置和输入方法。 输入装置包括:图像获取装置,用于当对象在图像获取装置的视场前移动时获取图像序列; 以及根据对象的旋转状态产生旋转信号的处理器。

    MEMS microphone device and method for making same
    56.
    发明申请
    MEMS microphone device and method for making same 有权
    MEMS麦克风装置及其制作方法

    公开(公告)号:US20120261775A1

    公开(公告)日:2012-10-18

    申请号:US13135417

    申请日:2011-07-06

    CPC classification number: B81B7/0051 H04R19/005 H04R19/04

    Abstract: The present invention discloses a MEMS microphone device and its manufacturing method. The MEMS microphone device includes: a substrate including a first cavity; a MEMS device region above the substrate, wherein the MEMS device region includes a metal layer, a via layer, an insulating material region and a second cavity; a mask layer above the MEMS device region; a first lid having at least one opening communicating with the second cavity, the first lid being fixed above the mask layer; and a second lid fixed under the substrate.

    Abstract translation: 本发明公开了一种MEMS麦克风装置及其制造方法。 MEMS麦克风装置包括:基板,包括第一腔; 在所述衬底上方的MEMS器件区域,其中所述MEMS器件区域包括金属层,通孔层,绝缘材料区域和第二腔体; 在MEMS器件区域上方的掩模层; 第一盖,其具有与所述第二腔连通的至少一个开口,所述第一盖固定在所述掩模层的上方; 以及固定在基板下方的第二盖。

    High dynamic range imager circuit and method for reading high dynamic range image
    57.
    发明申请
    High dynamic range imager circuit and method for reading high dynamic range image 有权
    高动态范围成像电路和读取高动态范围图像的方法

    公开(公告)号:US20120256077A1

    公开(公告)日:2012-10-11

    申请号:US13373265

    申请日:2011-11-09

    CPC classification number: H01L27/14609 H01L27/14643 H04N5/3559 H04N5/37452

    Abstract: The present invention discloses a high dynamic range imager circuit and a method for reading high dynamic range image with an adaptive conversion gain. The high dynamic range image circuit includes a variable capacitor. The capacitance of the variable capacitor is adjusted according to sensed light intensity or by internal feedback control, to adaptively adjust the conversion gain of the high dynamic range image circuit as it reads a signal which relates to a pixel image sensed by an image sensor device. In each cycle, the signal can be read twice or more with different dynamic ranges, to enhance the accuracy of the signal.

    Abstract translation: 本发明公开了一种高动态范围成像器电路和用于读取具有自适应转换增益的高动态范围图像的方法。 高动态范围图像电路包括可变电容器。 可变电容器的电容根据感测的光强度或通过内部反馈控制进行调整,以便在读取与由图像传感器装置感测到的像素图像有关的信号时自适应地调整高动态范围图像电路的转换增益。 在每个周期中,信号可以用不同的动态范围读取两次或更多,以提高信号的准确性。

    MEMS sensing device and method for making same
    58.
    发明申请
    MEMS sensing device and method for making same 失效
    MEMS感测装置及其制造方法

    公开(公告)号:US20120248555A1

    公开(公告)日:2012-10-04

    申请号:US13134262

    申请日:2011-06-03

    Abstract: The present invention discloses a MEMS sensing device which comprises a substrate, a MEMS device region, a film, an adhesive layer, a cover, at least one opening, and a plurality of leads. The substrate has a first surface and a second surface opposite the first surface. The MEMS device region is on the first surface, and includes a chamber. The film is overlaid on the MEMS device region to seal the chamber as a sealed space. The cover is mounted on the MEMS device region and adhered by the adhesive layer. The opening is on the cover or the adhesive layer, allowing the pressure of the air outside the device to pressure the film. The leads are electrically connected to the MEMS device region, and extend to the second surface.

    Abstract translation: 本发明公开了一种MEMS感测装置,其包括衬底,MEMS器件区域,膜,粘合剂层,盖,至少一个开口和多个引线。 衬底具有与第一表面相对的第一表面和第二表面。 MEMS器件区域在第一表面上,并且包括腔室。 膜被覆盖在MEMS器件区域上,以密封腔室作为密封空间。 盖安装在MEMS器件区域上,并通过粘合剂层粘合。 开口在盖子或粘合剂层上,允许装置外的空气的压力对膜施加压力。 引线电连接到MEMS器件区域,并延伸到第二表面。

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