公开(公告)号：US09321081B2

公开(公告)日：2016-04-26

申请号：US13851336

申请日：2013-03-27

Applicant: George Whitaker

Inventor： George Whitaker

IPC: H01L41/083 ,  B06B1/06 ,  B06B1/02

CPC classification number: B06B1/06 ,  B06B1/0207 ,  B06B1/0618 ,  B06B2201/20 ,  B06B2201/55 ,  B06B2201/71 ,  B06B2201/74

Abstract: An apparatus and method associated with amplifying piezoelectric sonic and ultrasonic outputs is presented which provides high power output from piezoelectric devices, especially at high ultrasonic frequencies, in open air, which mitigates or eliminates overheating of the piezoelectric devices when stimulated at or near their peak outputs for extended periods. In addition, the invention provides a means of amplifying a piezoelectric sonic and ultrasonic device if a desired output power exceeds a normal maximum capability of the piezoelectric device.

Abstract translation: 提出了一种与放大压电声波和超声波输出相关联的装置和方法，其提供来自压电装置的高功率输出，特别是在高空气中的高超声波频率下，其在峰值输出处或其附近受到刺激时减轻或消除压电装置的过热 长时间 此外，本发明提供一种如果所需的输出功率超过压电器件的正常最大容量，则可以放大压电声波和超声波装置。

公开(公告)号：US20160089620A1

公开(公告)日：2016-03-31

申请号：US14870952

申请日：2015-09-30

Applicant: FloDesign Sonics, Inc.

Inventor： Bart Lipkens ,  Jeff King ,  David Sokolowski ,  Anthony B. Masi ,  Brian T. Kennedy ,  Brian McCarthy ,  Benjamin Ross-Johnsrud ,  Jason Dionne ,  Dane Mealey ,  Jason Barnes

IPC: B01D21/28 ,  B06B1/06 ,  B01J19/10 ,  C12N13/00 ,  C12M1/00

CPC classification number: B01D21/283 ,  B01D17/044 ,  B01D17/06 ,  B01D19/0078 ,  B06B1/06 ,  B06B1/0622 ,  B06B1/0644 ,  B06B2201/71 ,  C12M47/04 ,  C12N13/00

Abstract: Acoustophoretic devices for separating particles from a non-flowing host fluid are disclosed. The devices include a substantially acoustically transparent container and a separation unit, with the container being placed within the separation unit. An ultrasonic transducer in the separation unit creates a planar or multi-dimensional acoustic standing wave within the container, trapping particles disposed within the non-flowing fluid and causing them to coalesce or agglomerate, then separate due to buoyancy or gravity forces.

Abstract translation: 公开了用于从非流动主流体分离颗粒的声学装置。 这些装置包括基本上声透明的容器和分离单元，容器被放置在分离单元内。 分离单元中的超声波换能器在容器内产生平面或多维声驻波，捕获设置在非流动流体内的颗粒，并使其聚结或附聚，然后由于浮力或重力而分离。

公开(公告)号：US20160001333A1

公开(公告)日：2016-01-07

申请号：US14435784

申请日：2013-10-15

Applicant: ALPHASONICS (ULTRASONIC CLEANING SYSTEMS) LTD

Inventor： David Stanley Jones ,  Neil Hodgson

IPC: B08B3/12 ,  B06B1/02

CPC classification number: B08B3/12 ,  B06B1/0207 ,  B06B1/0276 ,  B06B1/0284 ,  B06B2201/71

Abstract: An ultrasonic cleaning apparatus comprising: a tank for in use receiving a cleaning liquid and an item to be cleaned; a plurality of transducers arranged, when driven, to direct ultrasonic pressure waves into the tank; and a controller arranged in use to drive the transducers. First and second transducers from the plurality of transducers are arranged in use to direct ultrasonic pressure waves into an overlapping volume; and the controller is arranged in use to drive the first and second transducers to produce ultrasonic pressure waves at different frequencies from each other. The controller is arranged to in use produce first and second drive signals for the transducers using first and second frequency generators to each switch between primary and secondary operation, with the sequential switching taking place to cause different combinations of primary and secondary operation for the first and second frequency generators to occur over time.

Abstract translation: 一种超声波清洗装置，包括：用于使用的容器，用于接收清洁液体和待清洁物品; 多个换能器，当被驱动时被布置成将超声波压力波引导到所述罐中; 以及用于驱动换能器的控制器。 使用多个换能器的第一和第二换能器将超声波压力波引导到重叠的体积中; 并且控制器被布置在使用中以驱动第一和第二换能器以产生彼此不同频率的超声波压力波。 控制器设置成在使用中产生用于换能器的第一和第二驱动信号，其使用第一和第二频率发生器对主操作和次操作之间的每个切换进行顺序切换，以引起第一和第二操作的第一和第二操作的不同组合 第二频率发生器随时间发生。

公开(公告)号：US20140123997A1

公开(公告)日：2014-05-08

申请号：US14035709

申请日：2013-09-24

Applicant: Sematech, Inc.

Inventor： Abbas Rastegar

IPC: H01L21/67 ,  H01L21/02

CPC classification number: H01L21/67046 ,  B06B1/0276 ,  B06B1/0622 ,  B06B2201/20 ,  B06B2201/55 ,  B06B2201/71 ,  B08B3/12 ,  H01L21/02041

Abstract: An apparatus, system, and method for a Gigasonic Brush for cleaning surfaces is presented. One embodiment of the system includes an array of acoustic transducers coupled to a substrate where the individual acoustic transducers have sizes in the range of 9 um2 to 250,000 um2. The system may include a positioning mechanism coupled to at least one of a target surface or the array of acoustic transducers, and configured to position the array of acoustic transducers within 1 millimeter of a target surface. The system may also include a cleaning liquid supply arranged to provide cleaning liquid for coupling the array of acoustic transducers to the target surface. The system may further include a controller coupled to the array of acoustic transducers and configured to activate the array of acoustic transducers.

Abstract translation: 介绍了一种用于清洁表面的Gigasonic Brush的设备，系统和方法。 该系统的一个实施例包括耦合到衬底的声学换能器阵列，其中各个声学换能器的尺寸在9um2至250,000um2的范围内。 系统可以包括耦合到目标表面或声换能器阵列中的至少一个的定位机构，并且被配置为将声换能器阵列定位在目标表面的1毫米内。 该系统还可以包括布置成提供用于将声换能器阵列耦合到目标表面的清洁液体的清洁液体供应。 系统还可以包括耦合到声换能器阵列并被配置为激活声换能器阵列的控制器。

公开(公告)号：US06914364B2

公开(公告)日：2005-07-05

申请号：US10167704

申请日：2002-06-12

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: B01J19/10 ,  B06B1/02 ,  B06B1/06 ,  G10K11/00 ,  H01L41/08

CPC classification number: B01J19/10 ,  B06B1/0276 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/71 ,  G10K11/004 ,  G10K11/006

Abstract: The invention utilizes harmonics of certain clamped ultrasound transducers to generate ultrasound within the liquid of an ultrasonic tank and in a frequency range of between about 100 khz to 350 khz (i.e., “microsonic” frequencies). The application of microsonic frequencies to liquid preferably occurs simultaneously with a sweeping of the microsonic frequency within the transducer's harmonic bandwidth to reduce or eliminate (a) standing waves within the liquid, (b) other resonances, (c) high energy cavitation implosion, and (d) non-uniform sound fields, each of which is undesirable for cleaning and/or processing of semiconductor wafers and other delicate parts. The invention can also drive ultrasonic transducers such that the frequency of applied energy has a sweep rate within the ultrasonic bandwidth of the transducers; and that sweep rate is also varied so that the sweep rate is substantially non-constant during operation. This reduces or eliminates resonances which are created by transducers operating with a single sweep rate. An ultrasound generator of the invention sometimes utilizes amplitude modulation (AM), and the AM frequency is swept over time so as to reduce resonances. AM control is preferably provided by selecting a portion of the rectified power line frequency. In applications which utilize multiple generators, multiple transducers, and one or more tanks, simultaneously, the invention synchronizes the operation of the generators to a common FM signal to reduce beat frequencies between generators. Each such generator can also be adjusted, through AM, to control the process characteristics within the associated tank. Two or more transducers are sometimes used by the invention, in combination, to broaden the overall bandwidth of acoustical energy applied to the liquid around the primary frequency or one of the harmonics. The bandwidths of the transducers are made to overlap such that an attached generator can drive the transducers, in combination, to deliver ultrasound to the liquid in a broader bandwidth. In a single chamber ultrasound system, two or more generators, each operating or optimized to generate a different range of frequencies, are connected to a multiplexer; and the desired frequency range is selected, and hence the right generator, according to the cavitation implosion energy that is desired within the tank chemistry.

公开(公告)号：US20050017599A1

公开(公告)日：2005-01-27

申请号：US10855135

申请日：2004-05-27

Applicant: William Puskas

Inventor： William Puskas

IPC: B01J19/10 ,  B06B1/02 ,  B06B1/06 ,  B08B3/12 ,  G10K11/00 ,  H01L41/09

CPC classification number: G10K11/004 ,  B01J19/10 ,  B06B1/0269 ,  B06B1/0276 ,  B06B1/0284 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/70 ,  B06B2201/71 ,  B06B2201/72 ,  B08B3/12 ,  B08B2203/002 ,  G10K11/006

Abstract: The invention utilizes a multiple frequency ultrasound generator driving a multiple frequency harmonic transducer array to improve cleaning and processing effects while eliminating damage to parts being cleaned. An AC switch and circuitry to modify the output of an ultrasound generator in combination with techniques such as random AM and FM signals are used to produce ultrasound waves that have no single frequency components which eliminates exciting parts being cleaned into resonance. Generator signals that increase cavitation efficiency and that have successive time periods with predominately stable cavitation and predominantly transient cavitation further improve the performance of the cleaning or processing systems.

Abstract translation: 本发明利用驱动多频谐波换能器阵列的多频超声波发生器来改善清洁和处理效果，同时消除对被清洁部件的损坏。 AC开关和用于修改超声波发生器的输出以及诸如随机AM和FM信号的技术的电路用于产生没有单一频率分量的超声波，其消除被清理成谐振的兴奋部分。 具有增加气蚀效率并且具有主要稳定的气蚀和主要是瞬时空化的连续时间段的发电机信号进一步改善了清洁或处理系统的性能。

公开(公告)号：US06822372B2

公开(公告)日：2004-11-23

申请号：US10178751

申请日：2002-06-24

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: H01L4108

CPC classification number: B06B1/0269 ,  B06B1/0284 ,  B06B2201/70 ,  B06B2201/71 ,  B06B2201/72 ,  B08B3/12

Abstract: The invention utilizes a multiple frequency ultrasound generator driving a multiple frequency harmonic transducer array to improve cleaning and processing effects while eliminating damage to parts being cleaned. An AC switch and circuitry to modify the output of an ultrasound generator in combination with techniques such as random AM and FM signals are used to produce ultrasound waves that have no single frequency components which eliminates exciting parts being cleaned into resonance.

Abstract translation: 本发明利用驱动多频谐波换能器阵列的多频超声波发生器来改善清洁和处理效果，同时消除对被清洁部件的损坏。 AC开关和用于修改超声波发生器的输出以及诸如随机AM和FM信号的技术的电路用于产生没有单一频率分量的超声波，其消除被清理成谐振的兴奋部分。

公开(公告)号：US20040174155A1

公开(公告)日：2004-09-09

申请号：US10359765

申请日：2003-02-06

Applicant: LAM RESEARCH CORPORATION

Inventor： Thomas W. Anderson ,  Robert Knop

IPC: G01R019/00

CPC classification number: H01L21/67253 ,  B06B1/0253 ,  B06B2201/71 ,  B08B3/12 ,  H01L21/67057

Abstract: A system and method of generating RF includes an RF generator, a variable DC power supply, and a comparator. The RF generator has an RF output coupled to an input of the transducer. The variable DC power supply has a control input and a DC output coupled to the RF generator. The comparator includes a first input coupled to a set point control signal, a second input coupled to the RF generator RF output, and a control signal output coupled to a voltage control input on the variable DC power supply.

Abstract translation: 产生RF的系统和方法包括RF发生器，可变直流电源和比较器。 RF发生器具有耦合到换能器的输入的RF输出。 可变直流电源具有耦合到RF发生器的控制输入和DC输出。 比较器包括耦合到设定点控制信号的第一输入，耦合到RF发生器RF输出的第二输入和耦合到可变直流电源上的电压控制输入的控制信号输出。

公开(公告)号：US20040157349A1

公开(公告)日：2004-08-12

申请号：US10360320

申请日：2003-02-06

Applicant: LAM RESEARCH CORPORATION

Inventor： Thomas W. Anderson ,  Robert Knop

IPC: H01L021/00 ,  B08B003/12

CPC classification number: H01L21/67253 ,  B06B1/0253 ,  B06B2201/71 ,  B08B3/12 ,  H01L21/67057 ,  Y10S134/902

Abstract: A system and method of providing RF to a transducer includes an oscillator, an RF generator, and a voltage phase detector. The oscillator has a frequency control input and an RF signal output. The RF generator has an input coupled to the oscillator RF signal output and an RF generator output coupled to the transducer. The voltage phase detector includes a first phase input coupled to the RF signal output of the oscillator, a second phase input coupled to the RF generator output, and a frequency control signal output coupled to the oscillator frequency control voltage input.

Abstract translation: 向换能器提供RF的系统和方法包括振荡器，RF发生器和电压相位检测器。 振荡器具有频率控制输入和RF信号输出。 RF发生器具有耦合到振荡器RF信号输出的输入端和耦合到换能器的RF发生器输出。 电压相位检测器包括耦合到振荡器的RF信号输出的第一相位输入，耦合到RF发生器输出的第二相输入和耦合到振荡器频率控制电压输入的频率控制信号输出。

公开(公告)号：US06640637B2

公开(公告)日：2003-11-04

申请号：US10230285

申请日：2002-08-29

Applicant: Seung Taek Baek

Inventor： Seung Taek Baek

IPC: G01P1500

CPC classification number: D06F37/203 ,  B06B1/045 ,  B06B2201/71 ,  G01H11/02

Abstract: A vibration detecting apparatus includes a bobbin having a moving path of desired length in an inner periphery of the bobbin; a core movable along the moving path in the inner periphery of the bobbin by vibration applied from exterior or vibration applied to the bobbin; and a coil wound on an outer periphery of the bobbin, the inductance of which being changed in accordance with the shift of the core.