Abstract:
An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects an EVENT (i.e., one of the chambers in the multi-chamber tool coming on-line or off-line) and in response provides a power instruction to the ozone generator in accordance with a predictive control algorithm. The first concentration controller has a fast (i.e, about 1 second) response time. The second concentration controller is masked from the ozone generator during the EVENT, but otherwise controls the generator after an interval of time has lapsed after the EVENT. The second concentration controller has a slower response time than the first concentration controller, however the second concentration controller provides the system with long-term stability and can be used to provide updated data to the predictive control algorithm.
Abstract:
An ozone generator for in-situ sterilization of water, which may be pocket-sized, is disclosed. The ozone generator includes a power source, at least a supercapacitor, a switching circuitry and at least a pair of electrodes. The power source is adapted for providing a reaction energy to generate ozone gas within the water to be treated. The supercapacitor is adapted for amplifying the reaction energy provided by the power source. The circuitry is adapted for controlling the supercapacitor to deliver consistent power supply to generate ozone. The electrodes are adapted for receiving the amplified reaction energy from the supercapacitor to generate ozone within the water to be treated.
Abstract:
A ozonated liquid dispensing unit is described. The unit produces and dispenses an ozonated liquid that may be used to clean and sanitize a variety of articles or used in conjunction with cleaning processes and other apparatus. The unit includes a liquid input port to receive liquid into the unit. The unit includes a first dielectric cell for producing ozone gas from ambient air and a second dielectric cell for producing ozone gas. The first dielectric cell is in supply communication with the second dielectric cell for supplying the second dielectric cell with a supply gas containing the ozone gas generated from the ambient air. The second dielectric cell produces ozone gas from the supply gas. An injector is in fluidic communication with the liquid input port. The injector in supply communication with the second dielectric cell for receiving the ozone gas from the second dielectric cell, and the injector mixes the ozone gas from the second dielectric cell with the liquid from the liquid input port to produce an ozonated liquid. A liquid output port discharges the ozonated liquid from the unit. A faucet or spray may be used to control the discharge of the ozonated liquid from the unit.
Abstract:
An electro chemical conversion cell that can break down certain gasses to provide ozone and monovalent oxygen from a supplied volume of a suitable 02-containing gas. The conversion cell is provided with at least one metal mesh electrode within a generator reaction chamber, and a power supply which is adapted to supply a high alternating electric current voltage to at least partially break-down O2 in the input gas to yield ozone. A fluid flow passage extends through the reaction chamber as a generally elongated passage through the reaction cavity. The fluid flow passage extends from an upstream end, where the O2-containing gas is initially supplied into the housing, to a downstream end where treated gas either flows outwardly therefrom under pressure or is evacuated from the housing. In a simplified construction, the fluid flow passage is delineated by a series of electrically insulating plates and/or spacers which are used to partition the reaction cavity.
Abstract:
An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects an EVENT (i.e., one of the chambers in the multi-chamber tool coming on-line or off-line) and in response provides a power instruction to the ozone generator in accordance with a predictive control algorithm. The first concentration controller has a fast (i.e, about 1 second) response time. The second concentration controller is masked from the ozone generator during the EVENT, but otherwise controls the generator after an interval of time has lapsed after the EVENT. The second concentration controller has a slower response time than the first concentration controller, however the second concentration controller provides the system with long-term stability and can be used to provide updated data to the predictive control algorithm.
Abstract:
An ozone generator system (1) in which a multitude of plate type ozone generators (2) are arranged adjacent to each other in a block (3). Each ozone generator comprises a chamber, adapted for converting oxygen to ozone by a corona discharge, and each chamber is provided with an inlet for oxygen or an oxygen-rich gas and an outlet for ozone. Said ozone generators are arranged in a block module (26) in which they are affixed by a block rack (4). Said block rack comprises an inlet port (5) adapted for introduction of oxygen gas, and an outlet port (6) adapted for discharge of ozone created through conversion within the generators comprised in the block module. A multitude of first conduits (7), each running between said inlet port and one chamber inlet, and a multitude of second conduits (8), each running between said outlet port and one chamber outlet, are provided within said block rack. Said conduits are arranged so that the flow distance between the inlet and outlet ports has the same length, regardless of which generator the introduced gas passes through, thereby achieving an even gas pressure and gas flow, through parallel connection of the generators.
Abstract:
A process and reactor for chemical conversion is taught. The process allows the selective breaking of chemical bonds in a molecule by use of fast rise alternating current or fast rise pulsed direct current, each fast rise portion being selected to have a suitable voltage and frequency to break a selected chemical bond in a molecule. The reactor for carrying out such a process includes a chamber for containing the molecule and a generator for generating and applying the selected fast rise current.
Abstract:
An ozone generating apparatus has a plurality of ozone generating units connected in series to form a plurality of stages along the flow path of a gas. Each ozone generating unit has an ozonizing chamber having a material gas inlet and a product gas outlet and ozonizer discharge electrodes disposed in the ozonizing chamber and connected to an AC high-voltage source. The voltage applied to said ozonizing discharge electrodes of each successive stages is so varied that the ozonizing discharge electrodes of each downstream stage, as viewed in the direction of flow of the gas, is supplied with a lower voltage than the voltage supplied to said ozonizer discharge electrodes of an adjacent upstream stage. A series connection of a plurality of ozone generating units can form a composite ozone generating unit, and a plurality of such composite units may be connected in series to form a plurality of stages. The voltages applied to such successive stages is varied in the same manner a above. The ozone generating unit and the AC high-voltage source can have modular construction.
Abstract:
A tubular type ozone generator with inner and outer concentric electrodes and a middle dielectric member. One end is sealed to permit feed gas traversing the inner gap between the inner electrode and the dielectric member to reverse direction and to traverse the outer gap between the dielectric member and the outer electrode. A method for producing ozone using a tubular type ozone generator where first the total feed gas is passed in one direction between an electrode and the dielectric member for producing ozone, reversed, and then passed in the reverse direction between the dielectric member and the other electrode producing additional ozone. A hollow inner electrode permits more efficient cooling of the inner electrode. A plurality of ozone generators are combined with intake and output manifolds for the feed gas and produced ozone.
Abstract:
Ozone is added to captured water by a method and apparatus which involves corona discharge into an oxygen-containing gas in regions in a generator which alternate with regions where the newly formed ozone is cooled. The alternating corona and cooling regions permit the ozone to form without being thermally decomposed as soon as it is formed. Also disclosed is an overall system and method of controlling the level of dissolved ozone in a body of captured water which modulates the output of an ozone generator in accordance with readings of oxidation-reduction potential in the water.