Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
An ozone generator for generating ozone by applying a specified process to oxygen by discharge includes a first raw material gas supply unit for supplying the oxygen as a first raw material gas, and a second raw material gas supply unit for supplying an oxide compound gas as a second raw material gas, in which, by excited light, excited and generated by a discharge in the oxygen and the oxide compound gas, the oxide compound gas is dissociated, or the oxide compound gas is excited accelerating dissociation of the oxygen, and ozone is generated. In this way, ozone generation efficiency is raised.
Abstract:
The present invention discloses an ozone generator with reduced NOx comprising an air stream generating means; a drying means; an electrical field generating unit; a high-voltage generating means; and a cooling means. The flow velocity of the air stream in the ozone generating area can be increased by means of the air stream generating means up to 700 s.c.c.m, The temperature in the ozone generating area can be lowered by means of the cooling system to lower than 10null C. By means of the above, the amount of NOx produced by the disclosed ozone generator can be reduced substantially.
Abstract:
There is provided a highly efficient and compact ozone generating apparatus in which a very short air gap of about 0.2 mm is formed at high accuracy. Non-discharge portions are dispersed and disposed to cover an entire discharge space, or a spacer is provided to form the non-discharge portion. Further, an elastic body is mounted on a back face of an electrode, thereby enhancing an air gap accuracy of the discharge space.
Abstract:
Ozonizer (10) which supplies a feed gas to ozone generating cell (11) under application of a high voltage and which delivers an ozone gas through an ozone gas transport path (consisting of pipes (14) and (15)) as it has been generated in said ozone generating cell (11) is characterized in that the ozone gas transport path is furnished with means for removing at least one of NOx, HF and SOx (in the drawings, the means is for removing NOx) and that the ozone gas from the ozone generating cell (11) is passed through said removing means, whereby at least one of NOx, HF and SOx in said ozone gas is removed before it is delivered to a subsequent stage. The product ozone is not contaminated with Cr compounds at all or insufficiently contaminated to cause any practical problems in the fabrication of highly integrated semiconductor devices.Alternatively, ozonizer (10) which comprises an ozone generating cell (11) having an inlet (8) for supplying a feed gas, high voltage applying means (35) and an outlet (29) for discharging the ozone generated, and ozone delivery paths (30) and (31) for delivering the generated ozone is characterized in that oxygen (1) supplemented with 10-20 vol % of carbon dioxide and/or carbon monoxide (2) is used as the feed gas. The thus produced ozone is significantly low in the level of Cr compounds and, hence, can suitably be used in the formation of metal oxides, in particular, silicon oxide.
Abstract:
A process for conditioning an ozone gas recycle stream in an ozone pulp bleaching process, wherein the level of carbon dioxide in the recycle stream is controlled to allow full capacity operation of the ozone generator. Carbon dioxide concentration is identified over the relevant operational ranges and maximum concentration is identified for full capacity/optimum efficiency operation. Specific methods are described for controlling carbon dioxide concentration including purging a portion of the recycle stream, counter-current scrubbing of the recycle stream with an alkaline solution and passing the recycle stream through an adsorbent material. Contaminants entering the system also may be reduced by directing the purged recycle stream, which is relatively oxygen rich, into the dewatering press where pulp consistency is increased. In this manner nitrogen surrounding the pulp is displaced by oxygen and thus, does not enter the bleaching/ozone system with the pulp.
Abstract:
The ozonization installation comprises a group of n ozonizers supplied with energy by a common source in a successive alternating voltage wave train mode, the application of the wave trains being controlled by a control device. The latter produces initiating signals which selectively enable the passage of the electric energy in the form of wave trains coming from the common source to the ozonizer. The installation comprises a servo system chain comprising devices for controlling the duration of the initiating signals by means of a set signal, having regard to the total ozonization produced by the n ozonizers. This duration corresponds to that of each successive wave train. Synchronization devices are provided for connecting the common energy source to solely one ozonizer at a time.