Method and apparatus for measuring the shape of a wave-front of an optical radiation field
    56.
    发明授权
    Method and apparatus for measuring the shape of a wave-front of an optical radiation field 有权
    用于测量光辐射场的波前形状的方法和装置

    公开(公告)号:US09442006B2

    公开(公告)日:2016-09-13

    申请号:US14751259

    申请日:2015-06-26

    CPC classification number: G01J1/4257 G01J1/0477 G01J9/00 G01J2009/002

    Abstract: Method for measuring shape of wavefront of optical radiation field generated by radiation source, includes: (a) setting diaphragm positions in pinhole diaphragm having diaphragm opening movable transversely to radiation source's optical axis, wherein a partial beam from radiation field passes through diaphragm opening at each diaphragm position and is imaged on optical sensor by imaging optics device; (b) recording lateral positions of partial beam relative to optical axis of imaging optics device, wherein lateral positions each with one of the diaphragm positions of pinhole diaphragm are recorded by optical sensor, and determining the shape of wavefront from recorded lateral positions of partial beam, wherein beam incidence range of the partial beam which is invariable for all diaphragm positions is set on imaging optics device with a pentaprism arrangement including at least first pentaprism and positioned between pinhole diaphragm and imaging optics device. A wavefront shape measuring device is also described.

    Abstract translation: 用于测量由辐射源产生的光辐射场的波前形状的方法,包括:(a)在具有可横向于辐射源的光轴可移动的光阑开口的针孔光阑中设置光阑位置,其中来自辐射场的部分光束通过每个 通过成像光学装置在光学传感器上成像; (b)记录部分光束相对于成像光学装置的光轴的横向位置,其中每个具有针孔光阑的一个光阑位置的横向位置由光学传感器记录,并且从部分光束的记录横向位置确定波前的形状 其中对于所有光阑位置不变的部分光束的光束入射范围被设置在具有至少第一五棱镜并且定位在针孔光阑和成像光学器件之间的五棱镜布置的成像光学器件上。 还描述了一种波前形状测量装置。

    METHOD AND APPARATUS FOR WAVEFRONT SENSING
    57.
    发明申请
    METHOD AND APPARATUS FOR WAVEFRONT SENSING 有权
    用于波前感测的方法和装置

    公开(公告)号:US20150300885A1

    公开(公告)日:2015-10-22

    申请号:US14587392

    申请日:2014-12-31

    Inventor: Seung-Whan Bahk

    CPC classification number: G01J9/0215 G01B9/02 G01J9/02 G01J2009/002 G03F7/706

    Abstract: A method of measuring characteristics of a wavefront of an incident beam includes obtaining an interferogram associated with the incident beam passing through a transmission mask and Fourier transforming the interferogram to provide a frequency domain interferogram. The method also includes selecting a subset of harmonics from the frequency domain interferogram, individually inverse Fourier transforming each of the subset of harmonics to provide a set of spatial domain harmonics, and extracting a phase profile from each of the set of spatial domain harmonics. The method further includes removing phase discontinuities in the phase profile, rotating the phase profile, and reconstructing a phase front of the wavefront of the incident beam.

    Abstract translation: 测量入射光束的波前特性的方法包括获得与通过透射掩模的入射光束相关联的干涉图,并对干涉图进行傅里叶变换以提供频域干涉图。 该方法还包括从频域干涉图中选择一个谐波子集,单独逆傅里叶变换谐波子集中的每一个以提供一组空间域谐波,以及从该组空间域谐波中的每一个提取相位分布。 该方法还包括去除相位分布中的相位不连续性,旋转相位分布,以及重建入射光束的波前的相位前沿。

    OPERATING METHOD OF FIRST DERIVATIVE MEASURING APPARATUS
    58.
    发明申请
    OPERATING METHOD OF FIRST DERIVATIVE MEASURING APPARATUS 有权
    第一衍生测量装置的操作方法

    公开(公告)号:US20150146213A1

    公开(公告)日:2015-05-28

    申请号:US14318003

    申请日:2014-06-27

    CPC classification number: G01J9/0215 G01J2009/002

    Abstract: Provided is an operating method of a measuring apparatus measuring a wavefront of a target. The operating method includes measuring a measurement wavefront on the basis of the wavefront of the target, measuring reference slope information and first to third slope information respectively corresponding to a reference direction and first to third directions on the basis of the measurement wavefront, obtaining first to third rotation angles on the basis of the measured reference slope information and first to third slope information, and outputting a wavefront of which an error is corrected, which is generated by rotation errors on the basis of the obtained first to third rotation angles, wherein the first to third rotation angles are differences in angle between the reference direction and the first to third directions.

    Abstract translation: 提供了测量目标的波前的测量装置的操作方法。 操作方法包括基于目标的波阵面测量测量波阵面,基于测量波阵面测量分别对应于参考方向和第一至第三方向的参考斜率信息和第一至第三斜率信息,首先获得 基于所测量的基准斜率信息和第一至第三斜率信息的第三旋转角度,并且基于获得的第一至第三旋转角度输出由旋转误差产生的误差校正的波阵面,其中, 第一至第三旋转角度是参考方向和第一至第三方向之间的角度差。

    Wavefront Sensor
    60.
    发明申请
    Wavefront Sensor 有权
    波前传感器

    公开(公告)号:US20110001960A1

    公开(公告)日:2011-01-06

    申请号:US12740753

    申请日:2008-10-29

    CPC classification number: A61B3/1015 G01J9/00 G01J2009/002 G01M11/0264

    Abstract: The present invention relates to a wavefront sensor using a pair of screens, each having a two-dimensional array of circular apertures, to achieve Moiré effects, and its use to measure the slope of a wavefront.

    Abstract translation: 本发明涉及使用一对屏幕的波前传感器,每个屏幕具有圆形孔径的二维阵列,以实现莫尔效应,以及用于测量波前斜率的用途。

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