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51.发明授权
公开(公告)号：US5188983A
公开(公告)日：1993-02-23
申请号：US816972
申请日：1992-01-03
Applicant: Henry Guckel , Jeffry Sniegowski
Inventor： Henry Guckel , Jeffry Sniegowski
CPC classification number: H03H9/02259 , G01L1/183 , G01L1/186 , G01L9/0019 , G01L9/002 , H03H3/0072 , B81C2203/0145 , H03H2009/02511 , Y10T29/49103
Abstract: Force transducers are formed of a beam of polysilicon which is mounted at its ends to a silicon substrate and is encapsulated within a polysilicon shell which defines, with the substrate, a cavity around the resonating beam. The cavity is sealed off from the atmosphere and evacuated to maximize the Q of the resonating beam. The beam is produced by deposition of polysilicon in such a way that, combined with subsequent annealing steps, the beam is in zero or low tensile strain. Resonant excitation of the beam may be accomplished in various ways, including capacitive excitation, and the vibratory motion of the beam may be detected utilizing an implanted resistor which is piezoresistive. Formation of the beam is carried out by depositing the beam on a sacrificial layer and surrounding it in a second sacrificial layer before the encapsulating polysilicon shell is formed. The sacrificial layers are etched out with liquid etchant which passes through channels in the periphery of the shell. Following etching, the interior of the cavity surrounding the beam is maintained in a wash liquid so that the beam is not deflected toward any of the adjacent surfaces, and the wash liquid is removed by freezing and suThis invention was made with United States government support awarded by the National Science Foundation (NSF), Grant # EET-88-15285. The United States Government has certain rights in this invention.
Abstract translation: 力传感器由多晶硅束形成，多晶硅束的端部安装在硅衬底上，并被封装在多晶硅外壳内，该多晶硅外壳与衬底在共振梁周围形成空腔。 将空腔从大气中密封并抽真空以最大化谐振梁的Q。 光束是通过沉积多晶硅制成的，其结合随后的退火步骤，光束处于零或低拉伸应变。 可以以各种方式实现光束的共振激励，包括电容激发，并且可以使用压阻式的注入电阻器来检测光束的振动运动。 通过在形成封装多晶硅壳之前将光束沉积在牺牲层上并将其围绕在第二牺牲层中来进行光束的形成。 牺牲层用液体蚀刻剂蚀刻出来，其通过壳体周边的通道。 在蚀刻之后，围绕光束的空腔的内部保持在洗涤液体中，使得光束不会朝向任何相邻的表面偏转，并且通过冷冻和升华除去洗涤液体。 空腔的内表面和梁的外表面被钝化，并且通向空腔的通道可以在氧化气氛中通过氧化而被密封，这也导致空腔内的氧气的消耗。
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公开(公告)号：US4879914A
公开(公告)日：1989-11-14
申请号：US316341
申请日：1989-02-27
Applicant: Brian L. Norling
Inventor： Brian L. Norling
IPC: G01L1/00 , G01L1/10 , G01L1/16 , G01L1/18 , G01P15/08 , G01P15/097 , G01P15/10 , G01P15/12 , H01L41/09 , H01L41/113
CPC classification number: H01L41/1132 , G01L1/162 , G01L1/183 , G01P15/0802 , G01P15/097 , G01P15/0975 , G01P15/123 , G01P2015/0828
Abstract: A push-pull force transducer comprising a unitary body formed from a crystalline substrate. The body comprises first and second mounting elements for mounting the force transducer to first and second structures, and first and second force sensing elements connected to the mounting elements. Each force sensing element has first and second ends, a line extending from the second to the first end defining a force sensing axis for the force sensing elements. The force sensing elements are oriented with their force sensing axes parallel to and aligned with one another. The first force sensing element has its first end connected to the second mounting element and its second end connected to the first mounting element. The second force sensing element has its first end connected to the first mounting element and its second end connected to the second mounting element. Also described are embodiments utilizing strain relief flexures and an embodiment featuring a leveraged design.
Abstract translation: 推力力传感器，包括由结晶基底形成的整体。 主体包括用于将力传感器安装到第一和第二结构的第一和第二安装元件以及连接到安装元件的第一和第二力感测元件。 每个力感测元件具有第一和第二端，从第二端延伸到第一端的线限定用于力感测元件的力感测轴线。 力传感元件的力传感轴线彼此平行并对准。 第一力感测元件的第一端连接到第二安装元件，其第二端连接到第一安装元件。 第二力传感元件的第一端连接到第一安装元件，其第二端连接到第二安装元件。 还描述了使用应变消除挠曲的实施例和具有杠杆设计的实施例。
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公开(公告)号：US12072254B2
公开(公告)日：2024-08-27
申请号：US17597687
申请日：2020-07-20
Applicant: Sciosense B.V.
Inventor： Friedrich Bahnmüller , Oliver Hertner , Frank Lemke , Georg Jedelhauser
Abstract: In an embodiment an electric circuitry includes at least one first ring oscillator and at least one second ring oscillator being arranged on a substrate in different orientations, a time-to-digital converter having a converter ring oscillator and a processing circuit, wherein a first time is determined by a period duration of at least one first ring oscillator, this period duration depending on the propagation delay time of first delay elements, wherein a second time is determined by a period duration of at least one second ring oscillator, this period duration depending on the propagation delay time of second delay elements, and wherein the processing circuit is configured to determine a magnitude of the strain applied on the substrate based on a first state of the converter ring oscillator at the first time and a second state of the converter ring oscillator the second time.
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公开(公告)号：US20170276559A1
公开(公告)日：2017-09-28
申请号：US15532079
申请日：2015-11-25
Inventor： Davinson CASTANO CANO , Mathieu GROSSARD , Arnaud HUBERT
Abstract: A resonant sensor comprises a proof body subjected to a torque of forces produced by an external mechanical structure, the body comprising: a first and a second interface that can each come into contact with the structure; at least two sensitive zones arranged between these two interfaces; a sensitive zone formed by a plate embedded in a frame secured mechanically to the interfaces, the plate able to resonate under the effect of local mechanical excitations produced at particular points by excitation transducers bearing the plate at several resonant frequencies, sensors picking up the resonant signals produced at the particular points, measurement means measuring the resonant frequency shifts of signals which are linear combinations of the resonant signals picked up, the shifts being a function of mechanical stresses induced by the forces and transmitted to the plate by the frame, the components of the torque of forces being determined from the resonant frequency shifts measured on the plates of the sensitive zones.
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公开(公告)号：US09719967B2
公开(公告)日：2017-08-01
申请号：US13226199
申请日：2011-09-06
Applicant: Grzegorz Marian Kawiecki , Rosa Maria Rodriguez , Pawel Kudela , Wieslaw Ostachowicz
Inventor： Grzegorz Marian Kawiecki , Rosa Maria Rodriguez , Pawel Kudela , Wieslaw Ostachowicz
CPC classification number: G01N29/07 , G01L1/16 , G01L1/183 , G01M5/00 , G01N2291/0258 , G01N2291/103 , G01N2291/2694
Abstract: The present invention relates to a structural health monitoring system, for example a system used in the non-destructive evaluation of an aircraft structure. The present invention provides a method and apparatus for evaluating one or more anomalies within a structure using a structural health monitoring system that includes at least three transducers arranged in operative contact with the structure such that no two transducers are aligned to be parallel. A transducer excites an elastic wave that propagates through the structure, and reflections from any anomalies within the structure are collected by the three transducers. These collected signals are analyzed to identify an anomaly within the structure. Time of flight techniques are used to determine the location of the anomaly.
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Patent Agency Ranking
公开(公告)号：US09121785B2
公开(公告)日：2015-09-01
申请号：US13454917
申请日：2012-04-24
Applicant: Fraser M. Smith
Inventor： Fraser M. Smith
CPC classification number: G01M7/08 , A42B3/046 , G01L1/06 , G01L1/183 , G01L5/0052
Abstract: A non-powered impact recorder is disclosed. The non-powered impact recorder includes a resonator tuned for a resonant response within a predetermined frequency range. A reduced cross-sectional area portion is formed within the resonator and configured to structurally fail when the resonator experiences the resonant response. Additionally, the non-powered impact recorder includes an electric circuit element disposed about the reduced cross-sectional area portion of the resonator. Upon structural failure of the resonator, the electric circuit element is broken to cause a discontinuity in the electric circuit element. Interrogation of the discontinuous electric circuit element facilitates approximation of impact frequency and/or impact energy.
Abstract translation: 公开了一种非动力冲击记录器。 非动力冲击记录器包括谐振器，其被调谐以在预定频率范围内的谐振响应。 在谐振器内形成减小的横截面积部分，并且在谐振器经历谐振响应时构造成在结构上失效。 另外，非动力冲击式记录器包括围绕谐振器的减小横截面积部分设置的电路元件。 在谐振器结构故障时，电路元件断开，导致电路元件的不连续。 不连续电路元件的询问有助于近似冲击频率和/或冲击能量。
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公开(公告)号：US08739641B2
公开(公告)日：2014-06-03
申请号：US13511130
申请日：2010-11-22
Applicant: Mehdi Boukallel , Mathieu Grossard
Inventor： Mehdi Boukallel , Mathieu Grossard
CPC classification number: G01L1/162 , G01L1/106 , G01L1/183 , G01L9/0022
Abstract: A micro-force sensor comprising a one-piece plate including a first area defining a first recess, which must be held in position relative to a mounting, a second area connected to the first area defining the first recess and a second recess, a measuring beam across the first recess having a first end embedded in the first area and a second end connected to the second area, an excitation beam across the second recess having two ends embedded in the second area and being provided with at least one excitation element, a third area connected to the first area and an effector beam having one free end for receiving the force being measured and one end-embedded in the third area, and a fourth area connecting the embedded end of the effector beam to the second end of the measuring beam, which is provided with a measuring element.
Abstract translation: 一种微力传感器，包括一体式板，其包括限定第一凹部的第一区域，所述第一区域必须相对于安装件保持在适当位置，连接到限定所述第一凹部的所述第一区域的第二区域和第二凹部， 横跨第一凹部的第一凹部具有嵌入在第一区域中的第一端和连接到第二区域的第二端，跨越第二凹部的激发束，其具有嵌入第二区域中的两个端部并且设置有至少一个激励元件， 连接到第一区域的第三区域和具有一个自由端的效应器梁，用于接收被测量的力和一个端部嵌入在第三区域中;以及第四区域，其将效应束的嵌入端连接到测量的第二端 梁，其设有测量元件。
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公开(公告)号：US20130276538A1
公开(公告)日：2013-10-24
申请号：US13454917
申请日：2012-04-24
Applicant: Fraser M. Smith
Inventor： Fraser M. Smith
IPC: G01H13/00
CPC classification number: G01M7/08 , A42B3/046 , G01L1/06 , G01L1/183 , G01L5/0052
Abstract: A non-powered impact recorder is disclosed. The non-powered impact recorder includes a resonator tuned for a resonant response within a predetermined frequency range. A reduced cross-sectional area portion is formed within the resonator and configured to structurally fail when the resonator experiences the resonant response. Additionally, the non-powered impact recorder includes an electric circuit element disposed about the reduced cross-sectional area portion of the resonator. Upon structural failure of the resonator, the electric circuit element is broken to cause a discontinuity in the electric circuit element. Interrogation of the discontinuous electric circuit element facilitates approximation of impact frequency and/or impact energy.
Abstract translation: 公开了一种非动力冲击记录器。 非动力冲击记录器包括谐振器，其被调谐以在预定频率范围内的谐振响应。 在谐振器内形成减小的横截面积部分，并且在谐振器经历谐振响应时构造成在结构上失效。 另外，非动力冲击记录器包括围绕谐振器的减小的横截面部分设置的电路元件。 在谐振器结构故障时，电路元件断开，导致电路元件的不连续。 不连续电路元件的询问有助于近似冲击频率和/或冲击能量。
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公开(公告)号：US08347729B2
公开(公告)日：2013-01-08
申请号：US12616965
申请日：2009-11-12
Applicant: Tymon Barwicz , Hendrik F. Hamann , Levente Klein
Inventor： Tymon Barwicz , Hendrik F. Hamann , Levente Klein
IPC: G01L1/00
CPC classification number: G01L1/183 , G01P15/097 , G01P15/123 , H03H9/02259 , H03H9/2405
Abstract: An apparatus is provided and includes compressed conductive elements that each have independently adjustable dimensions sufficient to provide substantially enhanced piezoresistance to a current flowing across each conductive element with each of the conductive elements subjected to compressive strain, the conductive elements being oscillated in a direction parallel to that of the compressive strain at a defined frequency such that a resistance of the conductive elements to the current is thereby substantially reduced.
Abstract translation: 提供了一种装置并且包括压缩的导电元件，每个压缩导电元件具有足够的独立调节尺寸，以足以对流过每个导电元件的电流提供显着增强的压阻，导电元件经受压应变，导电元件在平行于 在限定的频率下的压缩应变，使得导电元件对电流的电阻因此显着降低。
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公开(公告)号：US06907785B1
公开(公告)日：2005-06-21
申请号：US09744818
申请日：1999-07-06
Applicant: John G Gallagher
Inventor： John G Gallagher
CPC classification number: G01N29/2437 , G01L1/183 , G01N9/002 , G01N11/16 , G01N29/036 , G01N29/12 , G01N2291/012 , G01N2291/014 , G01N2291/015 , G01N2291/02818 , G01N2291/0421
Abstract: A sensor of force or viscosity or other attributes of a fluid comprises a mechanical resonator (10) including an element (11; 18; 123) of which the stiffness at least partially determines a modal shape of the resonance of the resonator and means (21-23) for measuring a variation of a measure of the resonance as the stiffness of said element changes. The resonator (10) may comprise two beams (10a, 10b; 120, 121) connected at or near one end by a yoke (12; 122) which provides a clamped condition of the resonator at said one end and connected at or near another end by said element.
Abstract translation: 力或粘度的传感器或流体的其它属性包括包括元件（11; 18; 123）的机械谐振器（10），刚性至少部分地确定谐振器和装置（21）的谐振的模态形状 -23），用于当所述元件的刚度改变时测量谐振的测量的变化。 谐振器（10）可以包括通过轭（12; 122）在一端或其一端连接的两个梁（10a，10b; 120,121），所述轭（12; 122）在所述一端提供谐振器的夹紧状态， 靠近另一端由所述元件。
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