公开(公告)号：US06812461B1

公开(公告)日：2004-11-02

申请号：US10290014

申请日：2002-11-07

Applicant: David L. Adler ,  Marian Mankos

Inventor： David L. Adler ,  Marian Mankos

IPC: H01J3773

CPC classification number: H01J37/29 ,  G01N23/203 ,  H01J1/34 ,  H01J3/021 ,  H01J37/073 ,  H01J37/244 ,  H01J2237/06316 ,  H01J2237/2817

Abstract: One embodiment disclosed is an electron beam apparatus for examination of a specimen. The apparatus includes a photocathode source, an objective lens, a beam separator, and a projection lens. The photocathode source generates a primary electron beam with reduced energy spread. The low energy spread beam is focused onto the specimen by the objective lens. The beam separator separates a scattered electron beam from the primary electron beam, and the projection lens images the scattered electron beam. Software routines may analyze the image data for purposes of automated inspection or review.

Abstract translation: 公开的一个实施例是用于检查样本的电子束装置。 该装置包括光电阴极源，物镜，光束分离器和投影透镜。 光电阴极源产生具有降低的能量传播的一次电子束。 低能量扩散光束通过物镜聚焦在样品上。 光束分离器将分散的电子束与一次电子束分离，并且投影透镜对散射的电子束进行成像。 软件程序可以分析图像数据，以便进行自动检查或检查。

公开(公告)号：US20040183420A1

公开(公告)日：2004-09-23

申请号：US10730911

申请日：2003-12-10

Applicant: SAMSUNG SDI CO., LTD.

Inventor： Yong-wan Jin ,  Jung-woo Kim ,  Jae-eun Jung ,  Young-Jun Park

IPC: H01J001/02 ,  H01J001/14

CPC classification number: H01J29/481 ,  B82Y10/00 ,  H01J3/021 ,  H01J29/467 ,  H01J2201/30469 ,  H01J2329/00

Abstract: A field emission device using carbon nanotubes (CNTs) is provided. The field emission device includes a cathode on which a plurality of CNT emitters are arranged, a gate insulating layer having a through hole through which electrons emitted from the CNT emitters pass, and a gate electrode which corresponds to the through hole of the gate insulating layer and has an enlongated gate hole that forms an electric field having different strengths in a first direction and in a second direction orthogonal to the first direction.

Abstract translation: 提供了使用碳纳米管（CNT）的场致发射器件。 场致发射器件包括其上布置有多个CNT发射体的阴极，具有通孔的栅极绝缘层，通过该通孔从CNT发射体发射的电子通过;栅极电极，其对应于栅极绝缘层的通孔 并且具有扩大的栅极孔，其在与第一方向正交的第一方向和第二方向上形成具有不同强度的电场。

公开(公告)号：US06794822B2

公开(公告)日：2004-09-21

申请号：US10293539

申请日：2002-11-12

Applicant: Keisuke Koga ,  Toru Kawase ,  Masahide Yamauchi ,  Koji Fujii ,  Takashi Itoh

Inventor： Keisuke Koga ,  Toru Kawase ,  Masahide Yamauchi ,  Koji Fujii ,  Takashi Itoh

IPC: H01J2308

CPC classification number: H01J3/021 ,  H01J3/029 ,  H01J29/46 ,  H01J29/481 ,  H01J29/488

Abstract: A field emission electron source includes: a field emission array portion composed of an insulation layer with a plurality of apertures, which is formed on a substrate, an extraction electrode formed on the insulation layer, and a plurality of cathodes formed respectively on the substrate in the plurality of apertures; a cathode base for fixing the field emission array portion; and an electron lens portion composed of a plurality of electrode members having a function of accelerating and converging an electron beam emitted from the field emission array portion. An emission axis of the electron beam emitted from the field emission array portion has a predetermined angle with respect to an optical axis of the electron lens portion. Thus, the field emission array portion can be protected from impact caused by ions generated in the electron lens portion, thereby improving the life of a field emission electron source.

Abstract translation: 场发射电子源包括：场致发射阵列部分，其由具有多个孔的绝缘层组成，形成在衬底上，形成在绝缘层上的引出电极和分别形成在衬底上的多个阴极 多个孔; 用于固定场致发射阵列部分的阴极基座; 以及电子透镜部分，其由具有加速和会聚从场发射阵列部分发射的电子束的功能的多个电极部件组成。 从场发射阵列部分发射的电子束的发射轴相对于电子透镜部分的光轴具有预定的角度。 因此，可以防止场发射阵列部分免受在电子透镜部分中产生的离子的影响，从而提高场发射电子源的寿命。

公开(公告)号：US06784604B2

公开(公告)日：2004-08-31

申请号：US10405703

申请日：2003-04-03

Applicant: Takahiro Niiyama ,  Mitsuru Tanaka ,  Yuji Obara

Inventor： Takahiro Niiyama ,  Mitsuru Tanaka ,  Yuji Obara

IPC: H01J102

CPC classification number: H01J1/304 ,  H01J3/021 ,  H01J9/025 ,  H01J29/04 ,  H01J2329/00

Abstract: A field emission element includes a substrate, a cathode conductor disposed on the substrate, an insulating layer structure on the cathode conductor that has a first insulating layer on the cathode conductor and a second insulating layer on the first insulating layer, a gate disposed on the second insulating layer, a gate hole provided through the gate and the insulating layer structure to expose a portion of the cathode conductor therethrough, and an emitter on the exposed portion of the cathode conductor in the gate hole. The first insulating layer is covered by the second insulating layer at a side surface of the gate hole and a dielectric constant of the first insulating layer is different from that of the second insulating layer.

Abstract translation: 场发射元件包括衬底，设置在衬底上的阴极导体，阴极导体上的绝缘层结构，阴极导体上具有第一绝缘层，在第一绝缘层上具有第二绝缘层，栅极设置在阴极导体上 第二绝缘层，通过栅极设置的栅极孔和绝缘层结构，以暴露阴极导体的一部分，以及位于栅极孔中的阴极导体的暴露部分上的发射极。 第一绝缘层在栅极孔的侧面由第二绝缘层覆盖，第一绝缘层的介电常数与第二绝缘层的介电常数不同。

公开(公告)号：US20040140432A1

公开(公告)日：2004-07-22

申请号：US10697715

申请日：2003-10-29

Applicant: Applied Materials, Inc.

Inventor： Juan Ramon Maldonado ,  Steven T. Coyle

IPC: H01J037/073

CPC classification number: H01J9/12 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/34 ,  H01J3/021 ,  H01J37/073 ,  H01J37/3177 ,  H01J2237/06333 ,  H01J2237/31762 ,  H01J2237/31774 ,  H01J2237/31779

Abstract: An electron beam apparatus comprises a beam source to generate a radiation beam that is directed onto a photocathode to generate an electron beam. The photocathode comprises an electron-emitting material composed of activated alkali halide, such as for example, cesium bromide or cesium iodide. The activated alkali halide has a lower minimum electron emission energy level than the same material in the un-activated state, and provides efficient photoyields when exposed to radiation having an energy level that is higher than the minimum electron emission energy level. The emitted electrons can be collimated into beams and used to write on, inspect, or irradiate a workpiece.

Abstract translation: 电子束装置包括用于产生被引导到光电阴极上以产生电子束的辐射束的光束源。 光电阴极包括由活化的碱金属卤化物，例如溴化铯或碘化铯组成的电子发射材料。 活化的碱金属卤化物在未激活状态下具有比相同材料更低的最小电子发射能量水平，并且当暴露于具有高于最小电子发射能级的能级的辐射时，提供有效的光电子场。 发射的电子可以被准直成束，并用于写入，检查或照射工件。

公开(公告)号：US20030214218A1

公开(公告)日：2003-11-20

申请号：US10423098

申请日：2003-04-25

Inventor： Takashi Itoh ,  Masahide Yamauchi ,  Koji Fujii

IPC: H01J001/62

CPC classification number: H01J29/481 ,  H01J3/021 ,  H01J29/467

Abstract: The CRT device comprises a cold cathode electron gun that includes cathodes, a peripheral focusing electrode, and an accelerating electrode. The cathode has a structure in which an emitter electrode and a gate electrode are joined together with an insulating layer interposed therebetween. The electric potential difference from the emitter electrode is 60V for the gate electrode, 0V for the peripheral focusing electrode, and 4.6 kV for the accelerating electrode.

Abstract translation: CRT装置包括一个包含阴极的冷阴极电子枪，外围聚焦电极和加速电极。 阴极具有其中发射极和栅电极之间具有绝缘层而接合在一起的结构。 与发射电极的电位差为栅电极为60V，外围聚焦电极为0V，加速电极为4.6kV。

公开(公告)号：US20030193296A1

公开(公告)日：2003-10-16

申请号：US10305527

申请日：2002-11-27

Applicant: Sony Corporation ,  Sony Electronics Inc.

Inventor： Benjamin Edward Russ ,  Jack Barger

IPC: G09G003/10

CPC classification number: H01J3/021 ,  H01J29/467 ,  H01J29/481 ,  H01J31/127

Abstract: An electron emitting structure, for example, for use as a cathode plate of a field emission display (FED). The structure comprises a substrate, base electrodes formed on the substrate and gate electrodes crossing over the base electrodes. An insulating material is formed on the substrate and the base electrodes that separates the gate electrodes from the base electrodes, the gate electrodes formed on the insulating material. And an electron emitting material is deposited on active regions of the base electrodes, each active region defined as a portion of each base electrode between a respective pair of gate electrodes. In one implementation, the FED produces a substantially uniform electric field in the active region in order to produce a substantially straight electron emission little dispersion.

Abstract translation: 例如，用作场发射显示器（FED）的阴极板的电子发射结构。 该结构包括基板，形成在基板上的基极电极和跨越基极的栅电极。 在基板上形成绝缘材料，并将基极与基极分离，形成在绝缘材料上的栅电极。 并且电子发射材料沉积在基极的有源区上，每个有源区被限定为在相应的一对栅电极之间的每个基极的一部分。 在一个实施方案中，FED在有源区域中产生基本均匀的电场，以便产生基本上直的电子发射的小分散体。

公开(公告)号：US20030189396A1

公开(公告)日：2003-10-09

申请号：US10405703

申请日：2003-04-03

Applicant: FUTABA CORPORATION

Inventor： Takahiro Niiyama ,  Mitsuru Tanaka ,  Yuji Obara

IPC: H01J001/02

CPC classification number: H01J1/304 ,  H01J3/021 ,  H01J9/025 ,  H01J29/04 ,  H01J2329/00

Abstract: A field emission element includes a substrate, a cathode conductor disposed on the substrate, an insulating layer structure on the cathode conductor that has a first insulating layer on the cathode conductor and a second insulating layer on the first insulating layer, a gate disposed on the second insulating layer, a gate hole provided through the gate and the insulating layer structure to expose a portion of the cathode conductor therethrough, and an emitter on the exposed portion of the cathode conductor in the gate hole. The first insulating layer is covered by the second insulating layer at a side surface of the gate hole and a dielectric constant of the first insulating layer is different from that of the second insulating layer.

Abstract translation: 场发射元件包括衬底，设置在衬底上的阴极导体，阴极导体上的绝缘层结构，阴极导体上具有第一绝缘层，在第一绝缘层上具有第二绝缘层，栅极设置在阴极导体上 第二绝缘层，通过栅极设置的栅极孔和绝缘层结构，以暴露阴极导体的一部分，以及位于栅极孔中的阴极导体的暴露部分上的发射极。 第一绝缘层在栅极孔的侧面由第二绝缘层覆盖，第一绝缘层的介电常数与第二绝缘层的介电常数不同。

公开(公告)号：US06583567B2

公开(公告)日：2003-06-24

申请号：US09808041

申请日：2001-03-15

Applicant: Shunji Tsuida ,  Hironori Imura ,  Hideo Makishima

Inventor： Shunji Tsuida ,  Hironori Imura ,  Hideo Makishima

IPC: H01J2534

CPC classification number: H01J23/02 ,  H01J3/021 ,  H01J23/06 ,  H01J25/34

Abstract: A method and device are provided for preventing deterioration of a cold cathode in an electron tube device that utilizes the cold cathode as an electron source. In accordance with the expression defining the beam current of the electron tube device, Ib

Abstract translation: 提供一种方法和装置，用于防止利用冷阴极作为电子源的电子管装置中的冷阴极的劣化。 根据限定电子管器件的电流Ib（PmuxVa3 / 2）的表达式，其中Pmu表示电子枪的电位，Va表示施加在加速电极上的电压，加速电极的电位或 所有相邻电极始终保持在电子管中所有电极的最高水平。

公开(公告)号：US06566801B1

公开(公告)日：2003-05-20

申请号：US09598540

申请日：2000-06-21

Applicant: Nijs C. Van Der Vaart ,  Petrus H. F. Trompenaars ,  Eduard M. J. Niessen ,  Gerardus G. P. Van Gorkom

Inventor： Nijs C. Van Der Vaart ,  Petrus H. F. Trompenaars ,  Eduard M. J. Niessen ,  Gerardus G. P. Van Gorkom

IPC: H01J2948

CPC classification number: H01J3/021 ,  H01J29/481

Abstract: A cathode ray tube comprising an electron source and an electron beam guidance cavity having an input aperture and an output aperture, wherein at least a part of the wall of the electron beam guidance cavity near the output aperture comprises an insulating material having a secondary emission coefficient &dgr;1 for cooperation with the cathode. Furthermore, the cathode ray tube comprises a first electrode connectable to a first voltage source for applying, in operation, an electric field with a first field strength E1 between the cathode and the output aperture. &dgr;1 and E1 have values which enable electron transport through the electron beam guidance cavity. A second electrode is placed between the cathode and the cavity. The second electrode is connected to a second voltage source for applying, in operation, an electric field with a second field strength E2 between the cathode and the second electrode for controlling the emission of electrons.

Abstract translation: 一种阴极射线管，包括电子源和具有输入孔和输出孔的电子束引导腔，其中电子束引导腔的靠近输出孔的壁的至少一部分包括具有二次发射系数的绝缘材料 delta1与阴极配合使用。 此外，阴极射线管包括可连接到第一电压源的第一电极，用于在工作中施加在阴极和输出孔之间具有第一场强E1的电场。 δ1和E1具有能够通过电子束引导腔的电子传输的值。 第二电极被放置在阴极和空腔之间。 第二电极连接到第二电压源，用于在工作中施加在阴极和第二电极之间具有第二场强E2的电场，以控制电子的发射。