公开(公告)号：US20020131555A1

公开(公告)日：2002-09-19

申请号：US09809762

申请日：2001-03-15

Inventor： Ray Fleming ,  Constantin Popa

IPC: H05H001/00 ,  G21G004/00 ,  H01J035/00

CPC classification number: H05G2/003 ,  A61L2/082 ,  A61L2202/24 ,  H02M1/4208 ,  H02M3/3376 ,  H02M7/53871 ,  H05G1/20 ,  Y02B70/126 ,  Y02B70/1433 ,  Y02B70/1441

Abstract: The present invention relates to a vacuum arc discharge power supply. The power supply may be a high frequency resonant AC supply or it may be rectified to give resonant DC. The power supply of the present invention may be used in x-ray production, vacuum arc deposition equipment, vacuum metal refining, ion implantation devices, or other applications that perform vacuum arc discharge.

Abstract translation: 本发明涉及真空电弧放电电源。 电源可以是高频谐振AC电源，或者它可以被整流以产生谐振DC。 本发明的电源可用于进行真空电弧放电的x射线生产，真空电弧沉积设备，真空金属精炼，离子注入装置或其它应用中。

公开(公告)号：US20020054664A1

公开(公告)日：2002-05-09

申请号：US09792072

申请日：2001-02-26

Inventor： Jonas Tiren

IPC: H01J035/00

CPC classification number: A61N5/1001 ,  H01J35/32 ,  H01J2201/304 ,  H01J2235/164

Abstract: Miniature X-ray source comprising a support structure provided with a through-going hole, an anode is arranged at one end and a cathode (8,24) at the other end of the hole, thereby defining a cavity, the anode and cathode are adapted to be energised in order to generate X-ray radiation. The support structure has a cross-sectional shape that is determined such that a desired radiation distribution of the radiation generated by the X-ray source is achieved. Also a method of manufacturing miniature X-ray sources is disclosed.

Abstract translation: 包括具有通孔的支撑结构的微型X射线源，一端设置阳极，在该孔的另一端设有阴极（8,24），从而形成空腔，阳极和阴极 适于通电以产生X射线辐射。 支撑结构具有被确定为使得由X射线源产生的辐射的期望的辐射分布被实现的横截面形状。 还公开了一种制造微型X射线源的方法。

公开(公告)号：US20020044629A1

公开(公告)日：2002-04-18

申请号：US09974975

申请日：2001-10-12

Inventor： Hans Martin Hertz ,  Oscar Hemberg ,  Lars Rymell ,  Bjorn A.M. Hansson ,  Magnus Berglund

IPC: H01J035/00 ,  H05H001/00 ,  G21G004/00

CPC classification number: H05G2/003 ,  G03F7/70033 ,  H05G2/006 ,  H05G2/008

Abstract: A method and an apparatus is designed to produce X-ray or EUV radiation for use in lithography, microscopy, materials science, or medical diagnostics. The radiation is produced by urging a substance through an outlet (6) to generate a microscopic jet (2) in a direction from the outlet (6), and by directing at least one energy beam (1null) onto the jet (2), wherein the energy beam (1null) interacts with the jet (2) to produce the X-ray or EUV radiation. The temperature of the outlet (6) is controlled to increase the directional stability of the jet (2). The thus-achieved directional stability of the jet (2) provides for reduced pulse-to-pulse fluctuations of the produced radiation, improved spatial stability of the radiation source, as well as high average power since the energy beam (1null) can be tightly focused on the jet (2), even at a comparatively large distance from the jet-generating outlet (6). The large distance provides for low erosion of the outlet (6), even when using a high-power energy beam (1null).

Abstract translation: 一种方法和设备被设计用于产生用于光刻，显微镜，材料科学或医学诊断的X射线或EUV辐射。 辐射是通过将物质通过出口（6）推动以在从出口（6）的方向产生微观射流（2）并通过将至少一个能量束（1'）引导到射流（2）上而产生的， ，其中能量束（1'）与射流（2）相互作用以产生X射线或EUV辐射。 控制出口（6）的温度以增加射流（2）的方向稳定性。 这样实现的射流（2）的方向稳定性提供所产生的辐射的脉冲 - 脉冲波动减小，辐射源的改善的空间稳定性以及高平均功率，因为​​能量束（1'）可以是 即使在与喷气发生器出口（6）相距较远的距离处也紧密地聚焦在射流（2）上。 即使在使用大功率能量束（1'）时，大的距离也能够使出口（6）的侵蚀减少。

公开(公告)号：US20010050972A1

公开(公告)日：2001-12-13

申请号：US09739834

申请日：2000-12-20

Applicant: mediXtec Japan Corporation

Inventor： Koichi Yamada ,  Takeshige Tanigaki

IPC: H01J035/00

CPC classification number: H01J35/14 ,  H01J2235/087

Abstract: An X-ray generator, an X-ray inspector and an X-ray generation method capable of automatically focusing an energy beam, such as an electron beam for generating an X-ray, on a target are provided. The generation, inspector and the method have been developed by turning an attention on the fact that convergence conditions of an electron beam has a close relationship with a temperature on a surface of an X-ray tube target. The method comprises the steps of measuring the temperature changes at real time by a temperature sensor 14 and automatically controlling a current value of a focusing coil 6.

Abstract translation: 提供了能够将能量束（例如用于产生X射线的电子束）自动聚焦在目标上的X射线发生器，X射线检查器和X射线产生方法。 通过关注电子束的收敛条件与X射线管靶的表面上的温度有密切关系的事实，开发出生成，检查和方法。 该方法包括通过温度传感器14实时测量温度变化并自动控制聚焦线圈6的电流值的步骤。