公开(公告)号：US07129694B2

公开(公告)日：2006-10-31

申请号：US10155796

申请日：2002-05-23

Applicant: Matthias Brunner ,  Shinichi Kurita ,  Wendell T. Blonigan ,  Edgar Kehrberg

Inventor： Matthias Brunner ,  Shinichi Kurita ,  Wendell T. Blonigan ,  Edgar Kehrberg

IPC: G01R31/28

CPC classification number: H01L21/67748 ,  G01R31/01 ,  H01L21/67288 ,  H01L21/682

Abstract: A system and method for testing substrates is generally provided. In one embodiment, a test system for testing a substrate includes a load lock chamber, a transfer chamber and a test station. The load lock chamber and the test station are disposed on top of one another and coupled to the transfer chamber. The transfer chamber includes a robot adapted to transfer a substrate between the load lock chamber, which is at a first elevation, and the test station, which is at a second elevation. In another embodiment, a test station is provided having a turntable adapted to rotate the substrate. The turntable enables the range of motion required to test the substrate to be substantially reduced while facilitating full test and/or inspection of the substrate.

公开(公告)号：US07105833B2

公开(公告)日：2006-09-12

申请号：US10477664

申请日：2002-03-04

Applicant: Matthias Brunner ,  Ralf Schmid

Inventor： Matthias Brunner ,  Ralf Schmid

IPC: H01J3/14

CPC classification number: H01J37/153 ,  H01J37/147

Abstract: A particle beam apparatus and a device for an energy corrected deflection by a predetermined deflection angle of a particle beam coming in along a beam axis are disclosed, whereby the particle beam consists of charged particles with energy values scattered around a predetermined energy value. The device comprises a corrector, whereby the corrector, by means of a first electric field and a superimposed first magnetic field, deflects the charged particles depending on their energies, and whereby the direction of the charged particles with the predetermined energy value is maintained during the passage through the corrector. The device further comprises a deflector applied after the corrector, whereby the deflector, by means of a second electric field or by means of a second magnetic field, deflects the charged particles with the predetermined energy vague by the predetermined deflection angle away from the beam axis, whereby the deflector focuses the charged particles. Further, the device comprises a controller to control the corrector and the deflector.

Abstract translation: 公开了一种粒子束装置和用于通过沿着光束轴线进入的粒子束的预定偏转角的能量校正偏转的装置，由此粒子束由具有以预定能量值散射的能量值的带电粒子组成。 该装置包括校正器，由此校正器借助于第一电场和叠加的第一磁场根据其能量使带电粒子偏转，并且由此在期间保持具有预定能量值的带电粒子的方向 通过校正器。 该装置还包括在校正器之后施加的偏转器，由此偏转器借助于第二电场或借助于第二磁场使预定能量的带电粒子偏转远离光束轴线的预定偏转角 由此偏转器将带电粒子聚焦。 此外，该装置包括用于控制校正器和偏转器的控制器。

公开(公告)号：US06730906B2

公开(公告)日：2004-05-04

申请号：US09977549

申请日：2001-10-15

Applicant: Matthias Brunner ,  Ralf Schmid

Inventor： Matthias Brunner ,  Ralf Schmid

IPC: H01J3728

CPC classification number: H01J37/244 ,  H01J37/28

Abstract: A method and apparatus for testing a substrate, wherein a particle beam is directed onto the substrate and emitted secondary particles are detected with a detector and then evaluated. The location of the site at which the secondary particles are emitted on the substrate relative to the position of the detector is taken into consideration during testing.

Abstract translation: 一种用于测试衬底的方法和装置，其中将粒子束引导到衬底上，并且用检测器检测发射的次级颗粒，然后进行评估。 在测试期间考虑相对于检测器的位置在基底上发射次级粒子的位置的位置。

公开(公告)号：US5414374A

公开(公告)日：1995-05-09

申请号：US123218

申请日：1993-09-20

Applicant: Matthias Brunner ,  Reinhold Schmitt

Inventor： Matthias Brunner ,  Reinhold Schmitt

IPC: G01R31/02 ,  G01R31/302 ,  G01R31/305 ,  G01R31/308 ,  G02F1/136 ,  G02F1/1362 ,  G02F1/1368 ,  G09F9/35 ,  G09G3/18 ,  G01R31/00

CPC classification number: G01R31/305 ,  G01R31/302 ,  G01R31/308 ,  G02F2001/136254

Abstract: Method for particle beam testing of substrates for liquid crystal displays (LCD). This is directed to methods wherein, given a substrate (SUB1) for a liquid crystal display, either potentials or, respectively, currents are set in defined fashion with a particle beam (S1, S2 and S4) and/or potentials are measured by detecting secondary electrons (S5) at different switch statuses of the switch elements (T) of the substrate (SUB1). The geometrical integrity and the electrical functionability of the substrate (SUB1) are thereby tested, even though, for example, a supplementary plane electrode is not present for forming a capacitor. An important advantage of the method is that faulty substrates can be repaired or can be segregated even before further-processing and, thus, costs can be reduced.

Abstract translation: 液晶显示器（LCD）基板的粒子束测试方法。 这涉及以下方法：其中，给定用于液晶显示器的衬底（SUB1），电势或电流分别以粒子束（S1，S2和S4）的形式设定，和/或电位通过检测 在基板（SUB1）的开关元件（T）的不同开关状态下的二次电子（S5）。 因此，即使例如辅助平面电极不存在用于形成电容器，也可以测试基板（SUB1）的几何完整性和电功能性。 该方法的一个重要优点是，即使在进一步处理之前，有缺陷的基板可以被修复或者可以被分离，因此可以降低成本。

公开(公告)号：US5373233A

公开(公告)日：1994-12-13

申请号：US105760

申请日：1993-08-13

Applicant: Matthias Brunner ,  Ralf Schmid

Inventor： Matthias Brunner ,  Ralf Schmid

IPC: G01R31/02 ,  G01R31/306 ,  H01L21/66

CPC classification number: G01R31/306

Abstract: Method for the recognition of testing errors in a test of microwirings. The method for the recognition of testing errors in the test is used in particular in an electron beam test of microwirings in the form of a printed circuit board (LP) having a plurality of networks (NW1 . . . NW9). Every network has a plurality of contact points (1 . . . 24). Interruptions (U) in networks (NW2) and shorts (K1, K2) between networks (NW1 . . . NW3) of a test group (TG1) or, respectively, shorts (K3) between networks (NW2, NW4) of different test groups (TG1, TG2), that are found in a respective main test, are confirmed in a respective follow-up test or testing errors that arose in the main test, for example due to microfields or surface contaminations, are identified.

Abstract translation: 在微波测试中识别测试错误的方法。 用于识别测试中测试误差的方法特别用于具有多个网络（NW1 ... NW9）的印刷电路板（LP）形式的微线的电子束测试中。 每个网络都有多个接触点（1 ... 24）。 测试组（TG1）的网络（NW1 ... NW3）之间的网络（NW2）和短路（K1，K2）中的中断（U）或不同测试的网络（NW2，NW4）之间的短路（K3） 在相应的主要测试中发现的组（TG1，TG2）在相应的随访测试中被确认，或者在主要测试中出现的测试错误，例如由于微场或表面污染而被识别。

公开(公告)号：US5258706A

公开(公告)日：1993-11-02

申请号：US906564

申请日：1992-06-29

Applicant: Matthias Brunner ,  Ralf Schmid

Inventor： Matthias Brunner ,  Ralf Schmid

IPC: G01R31/02 ,  G01R31/306 ,  H01L21/66

CPC classification number: G01R31/306

Abstract: Method for the recognition of testing errors in a test of microwirings. The method for the recognition of testing errors in the test is used in particular in an electron beam test of microwirings in the form of a printed circuit board (LP) having a plurality of networks (NW1 . . . NW9). Every network has a plurality of contact points (1 . . . 24). Interruptions (U) in networks (NW 2) and shorts (K1, K2) between networks (NW1 . . . NW3) of a test group (TG1) or, respectively, shorts (K3) between networks (NW2, NW4) of different test groups (TG1, TG2), that are found in a respective main test, are confirmed in a respective follow-up test or testing errors that arose in the main test, for example due to microfields or surface contaminations, are identified.

Abstract translation: 在微波测试中识别测试错误的方法。 用于识别测试中测试误差的方法特别用于具有多个网络（NW1 ... NW9）的印刷电路板（LP）形式的微线的电子束测试中。 每个网络都有多个接触点（1 ... 24）。 测试组（TG1）的网络（NW1 ... NW3）之间的网络（NW2）和短路（K1，K2）中的中断（U）或分别为不同的网络（NW2，NW4）之间的短路（K3） 在相应的主要测试中发现的测试组（TG1，TG2）在各自的跟踪测试中被确认，或者在主要测试中出现的测试错误（例如由于微场或表面污染物）被识别出来。

公开(公告)号：US5190672A

公开(公告)日：1993-03-02

申请号：US703096

申请日：1991-05-22

Applicant: Hubert Coenen ,  Helmut Hubert ,  Friedhelm Bultmann ,  Matthias Brunner

Inventor： Hubert Coenen ,  Helmut Hubert ,  Friedhelm Bultmann ,  Matthias Brunner

IPC: B09B3/00 ,  C02F9/00 ,  C02F11/00 ,  C02F11/06 ,  C02F11/12 ,  F23G5/00 ,  F23G7/00 ,  F23J15/00

CPC classification number: F23J15/006 ,  B09B3/005 ,  C02F11/004 ,  C02F9/00 ,  F23G5/006 ,  F23G7/001 ,  C02F11/12 ,  C02F2101/20 ,  C02F2103/18 ,  F23J2215/20 ,  F23J2215/301 ,  F23J2215/60 ,  F23J2217/102 ,  F23J2217/40 ,  F23J2219/40 ,  Y02W10/40

Abstract: A method of thermal disposal of sewage sludge. The sludge is dried and incinerated. The flue gases from the incineration are washed. The flue gas dust resulting from the incineration and the sludge resulting from washing of the flue gases are treated together with high temperature combustion which includes melting of solids.

Abstract translation: 污水污泥热处理方法。 将污泥干燥并焚烧。 来自焚烧的烟道气被洗涤。 由焚烧产生的烟气和由烟气洗涤产生的污泥与包括固体熔化在内的高温燃烧一起处理。