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    Inspection apparatus and inspection method
    61.
    发明授权
    Inspection apparatus and inspection method 有权
    检验仪器和检验方法

    公开(公告)号：US08345233B2

    公开(公告)日：2013-01-01

    申请号：US13312663

    申请日：2011-12-06

    Applicant: Tadashi Suga ,  Shuichi Chikamatsu ,  Masayuki Ochi ,  Takahiko Suzuki ,  Seiji Otani

    Inventor： Tadashi Suga ,  Shuichi Chikamatsu ,  Masayuki Ochi ,  Takahiko Suzuki ,  Seiji Otani

    IPC: G01N21/00

    CPC classification number: G03F7/70858 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2201/0231 ,  H01L21/67248

    Abstract: A defect inspection apparatus emits light to a test object, detects reflected of scattered light from the test object and detects a defect in the test object The apparatus comprises a temperature-controlled part accommodating section that accommodates parts having a need for controlling a temperature, which is out of a plurality of parts in the defect inspection apparatus. A first temperature measuring instrument measures a temperature in the temperature-controlled part accommodating section; and a temperature control unit controls a temperature of the interior of the temperature-controlled part accommodating section at a prescribed temperature according to the temperature measured by the first temperature measuring instrument. Accordingly, a defect inspection apparatus can efficiently perform temperature control without involving an enlarged size can be achieved.

    Abstract translation: 缺陷检查装置向被检体发光，检测来自被检体的散射光的反射，检测被检体内的缺陷。该装置包括：温度控制部容纳部，容纳需要控制温度的部位， 在缺陷检查装置中的多个部分之外。 第一温度测量仪器测量温度控制部分容纳部分中的温度; 并且温度控制单元根据由第一温度测量仪器测量的温度将温度控制部分容纳部分的内部温度控制在规定的温度。 因此，可以有效地执行不需要扩大尺寸的温度控制的缺陷检查装置。

    Refractometer
    62.
    发明授权
    Refractometer 有权
    折射仪

    公开(公告)号：US08284389B2

    公开(公告)日：2012-10-09

    申请号：US12823401

    申请日：2010-06-25

    Applicant: Christian Forrer ,  Erwin Bossart ,  Félix Bécheiraz

    Inventor： Christian Forrer ,  Erwin Bossart ,  Félix Bécheiraz

    IPC: G01N21/41

    CPC classification number: G01N21/41 ,  B01L3/508 ,  B01L7/00 ,  B01L2200/04 ,  B01L2300/043 ,  B01L2300/046 ,  B01L2300/048 ,  B01L2300/0809 ,  G01N2201/0224 ,  G01N2201/0231

    Abstract: A refractometer has a housing (1), a measurement cell (8) arranged in the housing (1), and a lid unit (2). The lid unit has a base plate (3) with a cutout (7) allowing access to the measurement cell, and a lid (4) for covering the measurement cell. The lid is connected to the base plate by way of a hinge. The lid unit also has a lid insert (11, 17, 18, 28, 31, 35, 39) that is arranged replaceably in the lid. The lid unit (2) is detachably connected to the housing by means of a connecting element that is itself connected to the base plate.

    Abstract translation: 折射计具有壳体（1），布置在壳体（1）中的测量单元（8）和盖单元（2）。 盖单元具有带有切口（7）的基板（3），允许进入测量单元，以及用于覆盖测量单元的盖子（4）。 盖子通过铰链连接到基板。 盖单元还具有可替换地布置在盖中的盖插入件（11,17,18,28,31,35,39）。 盖单元（2）通过本身连接到基板的连接元件可拆卸地连接到壳体。

    INSPECTION APPARATUS AND INSPECTION METHOD
    63.
    发明申请
    INSPECTION APPARATUS AND INSPECTION METHOD 有权
    检查装置和检查方法

    公开(公告)号：US20120140212A1

    公开(公告)日：2012-06-07

    申请号：US13312663

    申请日：2011-12-06

    Applicant: Tadashi Suga ,  Shuichi Chikamatsu ,  Masayuki Ochi ,  Takahiko Suzuki ,  Seiji Otani

    Inventor： Tadashi Suga ,  Shuichi Chikamatsu ,  Masayuki Ochi ,  Takahiko Suzuki ,  Seiji Otani

    IPC: G01N21/88

    CPC classification number: G03F7/70858 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2201/0231 ,  H01L21/67248

    Abstract: A defect inspection apparatus emits light to a test object, detects reflected of scattered light from the test object and detects a defect in the test object The apparatus comprises a temperature-controlled part accommodating section that accommodates parts having a need for controlling a temperature, which is out of a plurality of parts in the defect inspection apparatus. A first temperature measuring instrument measures a temperature in the temperature-controlled part accommodating section; and a temperature control unit controls a temperature of the interior of the temperature-controlled part accommodating section at a prescribed temperature according to the temperature measured by the first temperature measuring instrument. Accordingly, a defect inspection apparatus can efficiently perform temperature control without involving an enlarged size can be achieved.

    Abstract translation: 缺陷检查装置向被检体发光，检测来自被检体的散射光的反射，检测被检体内的缺陷。该装置包括：温度控制部容纳部，容纳需要控制温度的部位， 在缺陷检查装置中的多个部分之外。 第一温度测量仪器测量温度控制部分容纳部分中的温度; 并且温度控制单元根据由第一温度测量仪器测量的温度将温度控制部分容纳部分的内部温度控制在规定的温度。 因此，可以有效地执行不需要扩大尺寸的温度控制的缺陷检查装置。

    Inspection apparatus and inspection method
    64.
    发明授权
    Inspection apparatus and inspection method 有权
    检验仪器和检验方法

    公开(公告)号：US08102522B2

    公开(公告)日：2012-01-24

    申请号：US11989018

    申请日：2007-06-29

    Applicant: Tadashi Suga ,  Shuichi Chikamatsu ,  Masayuki Ochi ,  Takahiko Suzuki ,  Seiji Otani

    Inventor： Tadashi Suga ,  Shuichi Chikamatsu ,  Masayuki Ochi ,  Takahiko Suzuki ,  Seiji Otani

    IPC: G01N21/00

    CPC classification number: G03F7/70858 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2201/0231 ,  H01L21/67248

    Abstract: A defect inspection apparatus enable to efficiently perform a temperature control without involving an enlarged size can be achieved.The parts constituting the defect inspection apparatus are classified into parts need temperature control and parts not to need temperature control; all the parts need temperature control are accommodated together into a temperature-controlled part accommodating section 604, and the parts not to need temperature control are arranged in a heat radiating unit 605. The temperature in the temperature-controlled part accommodating section 604 is measured by a temperature measuring instrument 603 and a control CPU 602 in a temperature control unit 601 carries out control according to the measured temperature so that the interior of the temperature-controlled part accommodating section 604 is kept at a fixed temperature. Therefore, it becomes easy to keep the fixed temperature, when compared with a case in which individual parts are temperature-controlled separately by being heated or cooled, yielding an energy saving effect.

    Abstract translation: 可以实现能够有效地执行不涉及放大尺寸的温度控制的缺陷检查装置。 构成缺陷检查装置的部件分为需要温度控制的部件和不需要温度控制的部件; 将所有需要温度控制的部件一起放入温度控制部件容纳部分604中，并且不需要温度控制的部件被布置在散热单元605中。温度控制部件容纳部分604中的温度由 温度控制单元601中的温度测量装置603和控制CPU 602根据测量的温度执行控制，使得温度控制部分容纳部分604的内部保持在固定温度。 因此，与单独部件通过加热或冷却分别进行温度控制的情况相比，容易保持固定温度，产生节能效果。

    OPTICAL ANALYZER AND WAVELENGTH STABILIZED LASER DEVICE FOR ANALYZER
    65.
    发明申请
    OPTICAL ANALYZER AND WAVELENGTH STABILIZED LASER DEVICE FOR ANALYZER 有权
    用于分析仪的光学分析仪和波长稳定激光器件

    公开(公告)号：US20110019183A1

    公开(公告)日：2011-01-27

    申请号：US12935155

    申请日：2009-03-27

    Applicant: Juichiro Ukon ,  Takuya Ido ,  Susumu Mimura

    Inventor： Juichiro Ukon ,  Takuya Ido ,  Susumu Mimura

    IPC: G01N21/39 ,  H01S3/10 ,  G01J3/00

    CPC classification number: G01N21/39 ,  G01J3/108 ,  G01N21/3504 ,  G01N21/7703 ,  G01N2201/0231 ,  H01S5/02248 ,  H01S5/024 ,  H01S5/02415 ,  H01S5/06213 ,  H01S5/0687

    Abstract: Provided is an optical analyzer which can promote enhancement of measurement sensitivity, cost reduction, size reduction, structural flexibility, disturbance resistance, and the like, at the same time. A laser device to be used in such optical analyzer is also provided. An optical analyzer comprises a laser light source (2); a wavelength selection element (3) for selecting and leading out light having a wavelength substantially equal to the absorption wavelength of an analysis object from among light outputted from the laser light source (2); an optical detection means (5) for detecting the intensity of light red out from the wavelength selection element (3); and a drive current control means (6) for increasing or decreasing the drive current of the laser light source (2) near a specified current value thereof for outputting light of the absorption wavelength, and setting the drive current at such a current value as the intensity of light detected by the optical detection means (5) has a peak value. The laser light source (2), the wavelength selection element (3), and the optical detection means (5) are mounted on a single substrate (11) which can regulate the temperature to a constant level.

    Abstract translation: 提供了能够同时提高测量灵敏度，降低成本，降低尺寸，结构灵活性，抗干扰性等的光学分析仪。 还提供了用于这种光学分析仪的激光装置。 光学分析仪包括激光光源（2）; 波长选择元件（3），用于从激光源（2）输出的光中选择并引出具有与分析对象的吸收波长大致相同的波长的光; 用于检测从波长选择元件（3）发出的红光强度的光学检测装置（5）。 以及驱动电流控制装置（6），用于增加或减少靠近其规定电流值的激光光源（2）的驱动电流，用于输出吸收波长的光，并将驱动电流设定为如 由光检测装置（5）检测到的光的强度具有峰值。 激光光源（2），波长选择元件（3）和光学检测装置（5）安装在能够将温度调节到恒定水平的单个基板（11）上。

    REFRACTOMETER
    66.
    发明申请
    REFRACTOMETER 有权
    压力计

    公开(公告)号：US20100328652A1

    公开(公告)日：2010-12-30

    申请号：US12823401

    申请日：2010-06-25

    Applicant: Christian Forrer ,  Erwin Bossart ,  Félix Bécheiraz

    Inventor： Christian Forrer ,  Erwin Bossart ,  Félix Bécheiraz

    IPC: G01N21/41

    CPC classification number: G01N21/41 ,  B01L3/508 ,  B01L7/00 ,  B01L2200/04 ,  B01L2300/043 ,  B01L2300/046 ,  B01L2300/048 ,  B01L2300/0809 ,  G01N2201/0224 ,  G01N2201/0231

    Abstract: A refractometer has a housing (1), a measurement cell (8) arranged in the housing (1), and a lid unit (2). The lid unit has a base plate (3) with a cutout (7) allowing access to the measurement cell, and a lid (4) for covering the measurement cell. The lid is connected to the base plate by way of a hinge. The lid unit also has a lid insert (11, 17, 18, 28, 31, 35, 39) that is arranged replaceably in the lid. The lid unit (2) is detachably connected to the housing by means of a connecting element that is itself connected to the base plate.

    Abstract translation: 折射计具有壳体（1），布置在壳体（1）中的测量单元（8）和盖单元（2）。 盖单元具有带有切口（7）的基板（3），允许进入测量单元，以及用于覆盖测量单元的盖子（4）。 盖子通过铰链连接到基板。 盖单元还具有可替换地布置在盖中的盖插入件（11,17,18,28,31,35,39）。 盖单元（2）通过本身连接到基板的连接元件可拆卸地连接到壳体。

    Saturation Filtering NDIR Gas Sensing Methodology
    67.
    发明申请
    Saturation Filtering NDIR Gas Sensing Methodology 失效
    饱和过滤NDIR气体检测方法

    公开(公告)号：US20100258728A1

    公开(公告)日：2010-10-14

    申请号：US12759603

    申请日：2010-04-13

    Applicant: Jacob Y. Wong

    Inventor： Jacob Y. Wong

    IPC: G01N21/61

    CPC classification number: G01N21/3504 ,  G01N21/274 ,  G01N21/61 ,  G01N2021/3527 ,  G01N2201/0231

    Abstract: NDIR gas sensing methodology is advanced which renders the output of an NDIR gas sensor, when implemented with this new methodology, to remain stable or drift-free over time. Furthermore, the output of such a sensor will also be independent of the temperature of an environ wherein the sensor is in physical contact. This method utilizes the same narrow band-pass spectral filter for the detection of the gas of interest for both the signal and the reference channels. By so doing, the two channels always receive radiation of the same spectral content from the infrared source of the sensor convoluted with that from any external elements exposed to the sensor. While the same sample chamber through which the gas of interest to be detected flows is shared by the two channels, the detector package for the reference channel is hermetically sealed with 100% of the gas to be detected instead of 100% N2 as for the signal detector. In so doing, the reference channel is rendered almost completely “blind” to the presence or absence of the gas of interest flowing in the common sample chamber thereby creating an absorption bias or difference between the two channels enabling the concentration of the gas of interest to be detected by ratioing the outputs of the two channels via calibration.

    Abstract translation: NDIR气体传感方法是先进的，当使用这种新方法实现NDIR气体传感器的输出时，可以保持稳定或无漂移。 此外，这种传感器的输出也将与传感器物理接触的环境温度无关。 该方法利用相同的窄带通滤波器来检测信号和参考通道的感兴趣的气体。 通过这样做，两个通道总是从与暴露于传感器的任何外部元件的传感器的红外源的红外源接收相同光谱含量的辐射。 当要被检测的感兴趣的气体流过的相同的样品室流过两个通道时，用于参考通道的检测器封装件将被封闭，100％的待检测气体代替100％的N2，就像信号 探测器。 在这样做的过程中，参考通道对于在共同样品室中流动的感兴趣的气体的存在或不存在几乎完全“盲”，从而在两个通道之间产生吸收偏差或差异，使得可以将感兴趣的气体浓度 通过校准两个通道的输出比例来检测。

    ANALYSIS METHOD AND ANALYSIS APPARATUS
    69.
    发明申请
    ANALYSIS METHOD AND ANALYSIS APPARATUS 审中-公开
    分析方法与分析装置

    公开(公告)号：US20090311797A1

    公开(公告)日：2009-12-17

    申请号：US12376215

    申请日：2007-08-02

    Applicant: Hideki Tanji

    Inventor： Hideki Tanji

    IPC: G01N21/77 ,  G01N33/48 ,  G01N21/00 ,  G01N33/00

    CPC classification number: G01N35/00712 ,  G01N21/78 ,  G01N31/222 ,  G01N2035/00455 ,  G01N2201/0231 ,  G01N2201/0238 ,  G01N2201/1214

    Abstract: An analysis method includes the steps of causing a moist sample to react with a reagent and measuring concentration of a particular component contained in the sample based on the state after the reaction of the sample with the reagent. The reaction step and the measurement step are performed while the amount of moisture contained in the air in a space accommodating the sample and the reagent is directly or indirectly measured. The method further includes the step of correcting the measurement result of the concentration of the particular component based on the amount of moisture contained in the air.

    Abstract translation: 分析方法包括以下步骤：根据样品与试剂反应后的状态，使湿样品与试剂反应并测定样品中所含特定成分的浓度。 在容纳样品和试剂的空间中包含的水分的量直接或间接测量的同时进行反应步骤和测量步骤。 该方法还包括基于空气中含有的水分的量来校正特定成分的浓度的测量结果的步骤。

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