公开(公告)号：US06614135B1

公开(公告)日：2003-09-02

申请号：US09531458

申请日：2000-03-20

Applicant: Thomas Joseph Clapham

Inventor： Thomas Joseph Clapham

IPC: G01J100

CPC classification number: F41H13/0093

Abstract: An apparatus for generating electromagnetic pulses includes circuitry comprising an induction coil having a silver anode projecting into the coil. Moveable silver mass elements are adjustably mounted on the anode. The circuitry is immersed in liquid hydrogen and when energized produces electromagnetic pulses. If is believed that some of the anode material is consumed during the production of EMP converting the anode material into electromagnetic radiation energy. As the consumption continues the elongate anode assembly produces a composite wave form that equates to the size, shape and arrangement of the mass elements.

Abstract translation: 一种用于产生电磁脉冲的装置包括电路，该电路包括具有突出到线圈中的银阳极的感应线圈。 可移动的银质元件可调节地安装在阳极上。 电路浸入液态氢气中，当被激励时产生电磁脉冲。 如果相信在生产将阳极材料转化成电磁辐射能量的EMP期间消耗一些阳极材料。 当消耗继续时，细长阳极组件产生等同于质量元件的尺寸，形状和布置的复合波形。

公开(公告)号：US06606149B1

公开(公告)日：2003-08-12

申请号：US09533815

申请日：2000-03-24

Applicant: Munehiro Ogasawara ,  Jun Takamatsu ,  Hitoshi Sunaoshi ,  Naoharu Shimomaura

Inventor： Munehiro Ogasawara ,  Jun Takamatsu ,  Hitoshi Sunaoshi ,  Naoharu Shimomaura

IPC: G01J100

CPC classification number: H01J37/304 ,  H01J2237/30433 ,  H01J2237/3175

Abstract: A method for adjusting an optical system of an energy beam apparatus by using a mark signal that is obtained by one-dimensionally or two-dimensionally scanning a mark on a sample with an energy beam. The mark has a one-dimensional or two-dimensional periodic structure. A first mark signal is detected by scanning the mark with a beam. The mark is set on the optical axis of the optical system. A second mark signal is detected by scanning the mark with a beam. The mark is located at a position that is deviated from the optical axis. A deviation of a deflection position is determined based on a phase difference between the first and second mark signals.

Abstract translation: 一种能量束装置的光学系统的调整方法，该方法是利用能量束对样品上的标记进行二维或二维扫描而得到的标记信号。 标记具有一维或二维周期性结构。 通过用光束扫描标记来检测第一标记信号。 标记设置在光学系统的光轴上。 通过用光束扫描标记来检测第二标记信号。 标记位于偏离光轴的位置。 基于第一和第二标记信号之间的相位差来确定偏转位置的偏差。

公开(公告)号：US06597441B1

公开(公告)日：2003-07-22

申请号：US09256581

申请日：1999-02-24

Applicant: Jenn-Tsair Tsai ,  Chieng-Ming Tsaur

Inventor： Jenn-Tsair Tsai ,  Chieng-Ming Tsaur

IPC: G01J100

CPC classification number: H04N1/03 ,  G02B27/0031 ,  H04N1/1013 ,  H04N1/193 ,  H04N2201/02433 ,  H04N2201/02449 ,  H04N2201/02487 ,  H04N2201/0448

Abstract: An apparatus and a method adapted to be used in manufacturing an image scanning apparatus for calibrating a reflective lens on a carriage are disclosed. A calibrating device has thereon a first set of three projective points from three point light beams and a first set of three calibrating points corresponding to three point light sources. The calibrating device further includes thereon a second set of three projective points and a second set of three calibrating points for matching each of the projective points on the calibrating device with a corresponding one of the calibrating points by adjusting an angle and a position of the reflective lens on the carriage so as to achieve a calibrating function.

Abstract translation: 公开了一种用于制造用于校准滑架上的反射镜的图像扫描装置的装置和方法。 校准装置具有来自三点光束的第一组三个投影点和对应于三点光源的三个校准点的第一组。 校准装置还包括第二组三个投影点和第二组三个校准点，用于通过调整反射镜的角度和位置来将校准装置上的每个投影点与对应的一个校准点相匹配 镜头在滑架上，以达到校准功能。

公开(公告)号：US06590643B2

公开(公告)日：2003-07-08

申请号：US09818452

申请日：2001-03-27

Applicant: Hiroshi Kubota ,  Yoshiya Egashira ,  Tomoaki Furuse ,  Satoshi Hirose

Inventor： Hiroshi Kubota ,  Yoshiya Egashira ,  Tomoaki Furuse ,  Satoshi Hirose

IPC: G01J100

CPC classification number: G01J1/4228 ,  G01J1/0242 ,  G01J1/04 ,  G01J1/0403 ,  G01J1/0411 ,  G01J1/0414

Abstract: An apparatus is provided for measuring viewing angle characteristic of luminance and positional characteristic of a radiant object under measurement, by moving a condensing device and an imaging device relative to the object. The apparatus includes a first mechanism for moving the light receiving elements of the condensing device while keeping constant the solid angle subtended by the light receiving element at the radiant area. A second mechanism is provided for moving the imaging device in association with the condensing device, while maintaining thereon the image of the radiant area. A memory is provide. A circuit is provided for calculating viewing angle dependent and position dependent characteristics. A display device is provided for displaying radiance characteristic and distribution characteristic of the object and the result of evaluation of the calculated characteristic of luminance.

Abstract translation: 提供一种用于通过相对于物体移动冷凝装置和成像装置来测量测量的辐射物体的亮度和位置特性的视角特性的装置。 该装置包括用于移动聚光装置的光接收元件的第一机构，同时保持由受光元件在辐射区域对着的立体角。 提供第二机构，用于与冷凝装置相关联地移动成像装置，同时在其上保持辐射区域的图像。 提供记忆。 提供了一种用于计算视角和位置相关特性的电路。 提供一种用于显示物体的辐射特性和分布特性的显示装置以及所计算的亮度特性的评估结果。

公开(公告)号：US06559934B1

公开(公告)日：2003-05-06

申请号：US09395809

申请日：1999-09-14

Applicant: Kingman Yee ,  Terrance N. Clapham

Inventor： Kingman Yee ,  Terrance N. Clapham

IPC: G01J100

CPC classification number: G01J1/4257 ,  A61B2017/00725 ,  A61F9/00814 ,  A61F2009/00855 ,  A61F2009/00872 ,  B23K26/705 ,  G01J2001/4261

Abstract: A method of determining the dimensions of a laser beam spot, comprising: scanning the laser beam in a path across a reference-edge having a photodetector positioned therebehind; and measuring an output signal from the photodetector during the scanning, the output signal corresponding to an area of the laser beam spot incident on the photodetector during the scanning. A method of aligning a laser beam delivery system, the method comprising: positioning a measurement/alignment tool at a target location; firing the laser beam on the tool; observing the laser beam using the tool; and adjusting the system in response to the sensed laser beam.

Abstract translation: 一种确定激光束光斑尺寸的方法，其特征在于包括：扫描沿着具有定位在其上的光电检测器的参考边缘的路径中的激光束; 1.一种对准激光束传送系统的方法，所述方法包括：将测量/测量装置定位在所述扫描过程中， 对准工具在目标位置; 在工具上激发激光束; 使用该工具观察激光束; 以及响应于所感测的激光束来调整系统。

公开(公告)号：US06541777B1

公开(公告)日：2003-04-01

申请号：US09548197

申请日：2000-04-13

Applicant: Leo R. Lombardo ,  Robert L. Jett

Inventor： Leo R. Lombardo ,  Robert L. Jett

IPC: G01J100

CPC classification number: G01J1/429

Abstract: An ultra violet light sterilizing apparatus includes in one embodiment a fluid chamber, at least one ultraviolet light source configured to emit ultraviolet light into the fluid chamber, and at least one ultraviolet light sensor that includes a photodiode. The photodiode is a silicon carbide photodiode, a gallium nitride photodiode, or an aluminum gallium nitride photodiode. Each UV light sensor includes a sealed outer housing having an optically transparent window. The photodiode is located inside the housing adjacent the transparent window. Each UV light sensor also includes a signal amplification unit that includes an amplifier mounted on a printed circuit board located inside the housing. The UV sterilization apparatus also includes a controller configured to receive, as input, a signal from each ultraviolet light sensor. The controller compares the input signal to a desired UV light intensity and outputs a control signal to each ultraviolet light source to adjust the intensity of the ultraviolet light emitted from each ultraviolet light source.

Abstract translation: 紫外光消毒装置在一个实施方案中包括流体室，被配置为向流体室中发射紫外光的至少一个紫外光源以及包括光电二极管的至少一个紫外光传感器。 光电二极管是碳化硅光电二极管，氮化镓光电二极管或氮化镓铝光电二极管。 每个UV光传感器包括具有光学透明窗口的密封外壳。 光电二极管位于壳体内部，与透明窗相邻。 每个UV光传感器还包括信号放大单元，其包括安装在位于壳体内部的印刷电路板上的放大器。 UV灭菌装置还包括控制器，其被配置为接收来自每个紫外光传感器的信号作为输入。 控制器将输入信号与期望的UV光强度进行比较，并向每个紫外光源输出控制信号，以调节从每个紫外光源发射的紫外线的强度。

公开(公告)号：US06490031B1

公开(公告)日：2002-12-03

申请号：US09675535

申请日：2000-09-29

Applicant: Michael Goldstein ,  Keith Andresen

Inventor： Michael Goldstein ,  Keith Andresen

IPC: G01J100

CPC classification number: G01J1/42 ,  G01J1/0271 ,  G01J1/04

Abstract: Scattered light is detected radiometrically in a photolithography system. A photodetector makes direct measurements of scatter at points in the line or plane of illumination, and a generalized scatter function is derived from these measured data.

Abstract translation: 在光刻系统中通过放射学检测散射光。 光电检测器直接测量照明线或平面中的点处的散射，并且从这些测量数据导出广义散射函数。

公开(公告)号：US06480267B2

公开(公告)日：2002-11-12

申请号：US09748894

申请日：2000-12-26

Applicant: Eiichi Yanagi ,  Makoto Fujino

Inventor： Eiichi Yanagi ,  Makoto Fujino

IPC: G01J100

CPC classification number: G01J9/00

Abstract: A wavefront sensor includes a plurality of lenses disposed in the same plane, and an area sensor that receives a bundle of rays of light collected through each of the lenses as a luminous point. Each of the lenses comprises a plurality of concentric areas with different focal lengths, and the area sensor is located substantially halfway between a first position in which a plane wave forms an image after passing through one of the concentric areas with a minimum focal length, and a second position in which the plane wave fronts an image after passing through another area with a medium focal length. With the wavefront sensor thus arranged, the measurement can be always achieved with high accuracy without involving noticeable blurring of luminous points on the area sensor regardless of the wavefront shape of a light beam indent to the lenses.

Abstract translation: 波前传感器包括设置在同一平面中的多个透镜，以及区域传感器，其接收通过每个透镜收集的光束作为发光点。 每个透镜包括具有不同焦距的多个同心区域，并且区域传感器基本上位于第一位置之间，其中平面波在通过具有最小焦距的其中一个同心区域之后形成图像;以及 第二位置，其中平面波在通过具有中等焦距的另一区域之后面向图像。 通过如此布置的波前传感器，可以始终以高精度实现测量，而不会考虑区域传感器上的发光点的显着模糊，而与透镜的光束的波前形状无关。

公开(公告)号：US06420719B1

公开(公告)日：2002-07-16

申请号：US05543296

申请日：1975-01-20

Applicant: Philip M. Johnson

Inventor： Philip M. Johnson

IPC: G01J100

CPC classification number: H04K3/44 ,  B64D47/06 ,  F41J2/02 ,  H04K3/68 ,  H04K3/825 ,  H04K2203/14 ,  H04K2203/24

Abstract: A modulated infrared source is disclosed in which spatial modulation is accomplished by the sweeping of an infrared beam past a point in space. In one embodiment close to 100% of the energy from the infrared source is focused by rotating optics including parabolically shaped reflectors about the source such that energy losses due to the modulation technique are minimized due to a single reflection of the energy from the IR source. The speed of the rotation of the reflective optics is minimized while maintaining sufficiently high modulation frequencies by the provision of four beams from a single source. In another embodiment a squirrel cage reflecting system is provided in which the energy from the IR source is reflected twice.

Abstract translation: 公开了一种调制的红外源，其中通过将红外光束扫过空间中的点来实现空间调制。 在一个实施例中，来自红外源的接近100％的能量通过旋转光学器件聚焦，所述光学器件包括围绕源的抛物面形反射器，使得由于来自IR源的能量的单次反射而使由调制技术引起的能量损失最小化。 反射光学器件的旋转速度被最小化，同时通过从单个源提供四个光束来保持足够高的调制频率。 在另一个实施例中，提供了一种鼠笼式反射系统，其中来自IR源的能量被反射两次。

公开(公告)号：US06356345B1

公开(公告)日：2002-03-12

申请号：US09247446

申请日：1999-02-10

Applicant: Bruce B. McArthur ,  Adlai H. Smith

Inventor： Bruce B. McArthur ,  Adlai H. Smith

IPC: G01J100

CPC classification number: G01M11/0264 ,  G01J9/00 ,  G01M11/0207 ,  G03F7/706

Abstract: A device, method of measurement and method of data analysis are described for imaging and quantifying in a practice sense the luminous intensity of the effective illumination source of an image system. The device, called a source metrology instrument, produces images and other quantitative measurements of the combined condenser and light source that are taken in-situ and without any significant alteration of the optical or mechanical set up. As such, the device can be used to monitor and assess the coherence properties of the illumination source with a minimum of interruptions to the optical tools productive time. It can be used with photolithographic step and repeat reduction or nonreducing imaging systems (steppers), scanning image systems, fixed field step and repeat aberration systems, scanning aberration systems, or any other projection imaging or aberration systems.

Abstract translation: 描述了一种设备，测量方法和数据分析方法，用于在实践中对图像系统的有效照明源的发光强度进行成像和量化。 该设备称为源计量仪器，可以对现有的组合电容器和光源进行图像和其他定量测量，并且不会对光学或机械设置造成任何明显的改变。 因此，该装置可以用于以最小的光学工具生产时间的中断来监视和评估照明源的相干性质。 它可以与光刻步骤和重复还原或非还原成像系统（步进器），扫描图像系统，固定场步和重复像差系统，扫描像差系统或任何其他投影成像或像差系统一起使用。