公开(公告)号：US5825037A

公开(公告)日：1998-10-20

申请号：US658882

申请日：1996-05-30

Applicant: Samuel V. Nablo

Inventor： Samuel V. Nablo

IPC: H01J33/02 ,  H01J37/30

CPC classification number: H01J33/02

Abstract: A compact, selfshielded electron beam processing technique for three dimensional products includes a treatment zone bounded by at least one material of high atomic number. Energetic electrons are directed into the treatment zone in such a manner that electron reflection from the boundary of the treatment zone assists in filling the treatment zone with energetic electrons. The products to be treated are caused to travel through the treatment zone without any mechanical contact therewith (such as by ballistic or pneumatic techniques).

Abstract translation: 用于三维产品的紧凑的自屏电子束处理技术包括由至少一种高原子数量的材料界定的处理区域。 能量电子被引导到处理区域，使得来自处理区域的边界的电子反射有助于用高能电子填充处理区域。 待处理的产品不经任何机械接触（例如通过弹道或气动技术）行进通过处理区。

公开(公告)号：US5200670A

公开(公告)日：1993-04-06

申请号：US592048

申请日：1990-10-04

Applicant: Simon J. Scott

Inventor： Simon J. Scott

IPC: H05H1/22 ,  H01J3/02 ,  H01J33/02 ,  H01J35/22 ,  H01S3/038 ,  H01S3/0971 ,  H05H7/08

CPC classification number: H01J3/025 ,  H01S3/038 ,  H01S3/09716

Abstract: A surface discharge plasma cathode electron beam generating assembly (1) includes an anode (2) maintainable at a substantially constant first potential, a cathode device (3) having a first electrically conductive member (4), a dielectric member (5) at least partially surrounding the first member (4) and electrically conductive means (6) located on the outer surface of the dielectric member (5) and insulated therefrom. A capacitative divider circuit (7) is provided for maintaining the first electrically conductive member (4) at a second potential different from the first potential and for maintaining the electrically conductive means (6) at a high negative third potential relative to the first and second potentials.

公开(公告)号：US5014076A

公开(公告)日：1991-05-07

申请号：US434425

申请日：1989-11-13

Applicant: Wendell J. Caley, Jr. ,  William R. Buchan ,  Robert A. Moore

Inventor： Wendell J. Caley, Jr. ,  William R. Buchan ,  Robert A. Moore

IPC: G03G15/05 ,  B41J2/415 ,  G03G15/22 ,  G03G15/32 ,  H01J33/02

CPC classification number: B41J2/415 ,  G03G15/323

Abstract: An electrode array forms a latent image by generating an electrical breakdown region and extracting an imagewise distribution of charge carriers which are accelerated toward a separate surface. Different control mechanisms, environments and ranges of operating parameters provide controlled amounts of charge delivered by electrons or ions for improved latent image production. High speed, high resolution and high uniformity of charge deposition are accomplished by different structures within the scope of the invention.

公开(公告)号：US4584479A

公开(公告)日：1986-04-22

申请号：US708104

申请日：1985-03-05

Applicant: John R. Lamattina ,  Paul F. Petric

Inventor： John R. Lamattina ,  Paul F. Petric

IPC: F16J15/00 ,  F16J15/16 ,  H01J37/18 ,  H01J37/301 ,  H01J33/02

CPC classification number: F16J15/006 ,  F16J15/168 ,  H01J37/18 ,  H01J37/301

Abstract: An envelope apparatus is provided for facilitating the production of a vacuum at a localized region on the surface of an article such as a semiconductor wafer. The vacuum permits vacuum processing in the localized region. The envelope apparatus includes an internal processing zone in which the requisite processing level vacuum is maintained. The envelope apparatus also includes intermediate vacuum zones surrounding the internal processing zone. The internal processing zone and surrounding intermediate vacuum zones are exposed at an external surface so that when the external surface is placed in spaced apart, close coupled opposition to the article being processed a graded vacuum seal is formed. The graded seal extends from the internal processing zone, past the intermediate vacuum zones and out to ambient. The envelope apparatus is held either in a fixed position with respect to the surface of the article or actively tracks the topography of the surface of the article so that the gap between the external surface and the surface of the article lies within an acceptable range. For semiconductor processing applications, it has been found that a graded seal formed by two-stage differential pumping and having a gap in the range of 20 micrometers to 40 micrometers will permit vacuums on the order of 10.sup.-5 Torr to be maintained within the interior processing zone of the envelope apparatus.

Abstract translation: 提供了一种包围装置，用于促进在诸如半导体晶片的物品的表面上的局部区域处产生真空。 真空允许在局部区域进行真空处理。 信封装置包括内部处理区域，其中维持必要的处理级真空度。 信封装置还包括围绕内部处理区的中间真空区。 内部处理区域和周围的中间真空区域在外部表面露出，使得当外部表面间隔开时，与待处理的制品紧密结合，形成梯度真空密封。 分级密封件从内部处理区域延伸，经过中间真空区域并延伸至环境。 信封装置相对于制品的表面保持在固定位置，或者主动地跟踪制品表面的形貌，使得外表面和制品表面之间的间隙处于可接受的范围内。 对于半导体加工应用，已经发现通过两级差分泵浦形成的间隔在20微米至40微米范围内的梯度密封将允许10-5乇数量级的真空保持在内部 信封设备的处理区域。

公开(公告)号：US4578617A

公开(公告)日：1986-03-25

申请号：US548972

申请日：1983-11-07

Applicant: Charles Kerr, III ,  Mark Forell

Inventor： Charles Kerr, III ,  Mark Forell

IPC: G09F13/22 ,  H01J33/02 ,  G01D11/28

CPC classification number: G09F13/22 ,  G09F2013/227

Abstract: The weight of an electroluminescent instrument panel is substantially reduced by manufacturing it from a pair of complementary plastic shells, which are molded together by a potting compound. The front shell of the panel is made by vacuum drawing a sheet of plastic over a first die plate, which forms in the back of the sheet a central recess, which has therein a plurality of rearwardly projecting, hollow bosses, and which is surrounded by a shallow overflow trough. One or more EL lamp elements are placed in the central recess with registering openings therein positioned over and surrounding the rearwardly projecting bosses, after which a potting compound is poured into the central recess to cover the EL elements. The complementary rear or back shell, which is also vacuum formed over a second die plate, is then forced into the back of the front shell, thereby causing excess potting material to flow out of the central recess in the front shell and into the surrounding overflow trough. After the potting compound has set the trough section containing the excess potting compound and the closed ends of the registering bosses in the complementary shells are milled away to provide openings for instruments and panel mounting screws.

Abstract translation: 电致发光仪表板的重量通过从一对补充塑料壳制造而大大减少，这些塑料外壳通过灌封化合物一起模制在一起。 面板的前壳通过在第一模板上真空拉伸塑料制成，其在纸的背面形成中央凹部，其中具有多个向后突出的中空凸起，并且其被 一个浅的溢流槽。 一个或多个EL灯元件放置在中央凹部中，其中定位开口位于向后突出的凸起之上并围绕其向后突出的凸起，之后将灌封化合物注入中心凹部以覆盖EL元件。 然后将在第二模板上真空成型的互补的后壳或后壳强制进入前壳的后部，从而使多余的灌封材料从前壳中的中心凹部流出并流入周围的溢流 槽。 在灌封化合物已经设置包含多余的灌封化合物的槽部分之后，互补壳体中的配准凸台的封闭端被磨掉以提供用于仪器和面板安装螺钉的开口。

公开(公告)号：US4328443A

公开(公告)日：1982-05-04

申请号：US129469

申请日：1980-03-11

Applicant: Oswald L. Zappa

Inventor： Oswald L. Zappa

IPC: H01J27/00 ,  H01J33/04 ,  H01S3/03 ,  H01S3/09 ,  H01J33/02

CPC classification number: H01J33/04

Abstract: An electron beam device having a vacuum chamber in which an electron beam generator generates a directed stream of electrons. An electron beam window comprising a foil which seals the vacuum chamber is in the path of the stream of electrons and permits passage of the stream of electrons into a working region exterior of the chamber and adjacent the electron beam window. An electrode is positioned closely adjacent the foil and a second electrode is spaced from the foil to form an elongated working or, in the case of a laser, a lasing region between them. The electrodes are maintained at a high electrical potential which, along with the electron beam, molecularly excites a gaseous working medium between the electrodes. The included angle of electrons passing through and scattered by the foil is limited and the electron beam confined to a desired region by an external shield or bezel overlying the foil. The bezel is provided with a series of openings which may be in the form of holes or slots of predetermined depth, size and spacing one from another to provide the electrons emerging from the foil with a desired included angle of emergence while maintaining losses at a minimum.

Abstract translation: 一种具有真空室的电子束装置，其中电子束产生器产生指向的电子流。 包括密封真空室的箔的电子束窗处于电子流的路径中，并且允许电子流通过室的外部和电子束窗附近的工作区域。 电极被定位成紧邻箔片，并且第二电极与箔间隔开以形成细长的工作，或者在激光的情况下，它们之间的激光区域。 电极被保持在高电位，其与电子束一起在电极之间分子上激发气态工作介质。 通过箔散射的电子的夹角受到限制，电子束通过覆盖箔的外部屏蔽或边框限制在所需区域。 边框设置有一系列开口，其可以是预定深度，尺寸和间隔的孔或狭槽的形式，以便以期望的包围角度出现，从而提供从箔出现的电子，同时将损失保持在最小 。

公开(公告)号：US4317982A

公开(公告)日：1982-03-02

申请号：US35688

申请日：1979-05-03

Applicant: Heinz Taudt ,  Dieter Grieger ,  Siegfried Beisswenger

Inventor： Heinz Taudt ,  Dieter Grieger ,  Siegfried Beisswenger

IPC: B41C1/02 ,  B41C1/04 ,  B41C1/18 ,  H01J33/02 ,  B23K15/00

CPC classification number: H01J33/02

Abstract: An orifice for coupling a highly-evacuated electron beam gun to a rotating print form cylinder for engraving is provided such that the gun has a rigid cover with an opening for the electron beam at its end facing the print form cylinder and a flexible band is arranged at the cover which partially surrounds the print form cylinder. The band is pivoted at the cover and at least one of the pivot points is elastically designed and pivoting occurs with the aid of springs which are adjustable with respect to the spring force.

Abstract translation: 提供了一种用于将高度抽真空的电子束枪耦合到用于雕刻的旋转印刷版圆柱体的孔，使得枪具有刚性盖，其刚性盖在其面向印刷版圆柱体的端部处具有用于电子束的开口，并且布置柔性带 在部分包围印刷版滚筒的盖子上。 带子在盖子处枢转，并且枢转点中的至少一个被弹性地设计并且借助于相对于弹簧力可调节的弹簧发生枢转。