DEBRIS DETERMINATION METHOD
    78.
    发明公开

    公开(公告)号:US20240281961A1

    公开(公告)日:2024-08-22

    申请号:US18568996

    申请日:2022-06-16

    Inventor: Masato OHNISHI

    Abstract: A debris determination method of determining, from an image obtained by an appearance inspection device, debris that occurs around an HLM on a backside of a wafer, including: replacing luminance data of the image with matrix data; extracting an HLM-printed region; obtaining a least-squares plane of luminance; obtaining normalized matrix data by subtracting the least-squares plane from the printed region; obtaining protrusion-side matrix data by substituting 0 for matrix values less than 0; obtaining recess-side matrix data by inverting the sign of the normalized matrix data and substituting 0 for matrix values representing dots and noise; obtaining composite matrix data from the protrusion- and recess-side matrix data; obtaining low-pass matrix data by processing the composite matrix data; and determining debris from the low-pass matrix data with a predetermined threshold and obtaining an area ratio of the debris to determine the presence or absence of debris in the printed region.

    RECOGNITION DEVICE AND RECOGNITION METHOD
    80.
    发明公开

    公开(公告)号:US20240265662A1

    公开(公告)日:2024-08-08

    申请号:US18569438

    申请日:2021-06-25

    Abstract: An image analysis section executes instruction processing to image electronic component while changing a shutter speed of measurement camera between a predetermined lower limit speed and a predetermined upper limit speed calculation processing of comparing an image of lower surface of each lead included in each of multiple imaging data acquired from the measurement camera with an ideal image of lower surface of each lead included in ideal imaging data to calculate a missing rate at which the image of lower surface of each lead is missing with respect to the ideal image for each of the multiple imaging data, detection processing of detecting imaging data having a missing rate equal to or less than a predetermined first threshold among multiple missing rates calculated by the calculation processing, and selection processing of selecting a shutter speed used for capturing the imaging data detected by the detection processing.

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