Abstract:
A method of generating an inspection data used for inspecting an inspection-object pattern on a substrate, the inspection-object pattern formed by transferring a first mask pattern formed on a first mask and a second mask pattern formed on a second mask onto one layer on the substrate, a part of a first transferred pattern of the first mask pattern and a part of a second transferred pattern of the second mask pattern being overlapped on the layer. The method performs a corner process on each corner of a first design data of the first mask pattern and each corner of a second design data of the second mask pattern and generates an inspection data by performing a logical operation using the corner-processed first design data and the corner processed second design data.
Abstract:
A resist pattern (5) is formed in a dimension of a limitation of an exposure resolution over a hard mask material film (4) over a work film (3). The material film (4) is processed using the resist pattern (5) as a mask. A hard mask pattern (6) is thereby formed. Thereby a resist pattern (7), over a non-selected region (6b), having an opening (7a) through which a selection region (6a) in the mask pattern is exposed is formed. Only the mask pattern (6a) exposed through the opening (7a) is slimmed by performing a selection etching, the work film (3) is etched by using the mask pattern (6). A work film pattern (8) is thereby formed, which include a wide pattern section (8a) of a dimension width of the limitation of the exposure resolution and a slimmed pattern section (8a) of a dimension that is not more than the limitation of the exposure resolution.
Abstract:
A pattern correcting method for correcting a design pattern to form a desired pattern on a wafer is disclosed, which comprises defining an allowable dimensional change quantity of each of design patterns, defining a pattern correction condition for the each design pattern based on the allowable dimensional change quantity defined for the each design pattern, and correcting the each design pattern based on the pattern correction condition defined for the each design pattern.
Abstract:
A method of generating mask data, for a set of masks used to transfer a pattern for delineating a circuit pattern of a semiconductor integrated circuit, includes preparing design data having a design pattern corresponding to the pattern to be transferred on a semiconductor substrate; generating resized data by enlarging the design data by a resizing quantity; generating first mask data by filling a space area having a space width of a space quantity or less of the resized data; and generating second mask data, to be aligned with the first mask data, having a window portion for selectively exposing an area determined by enlarging the space area by the resizing quantity.
Abstract:
The present invention provides a steel sheet excellent in workability, which may be used for components of an automobile or the like, and a method for producing the same. More specifically, according to one exemplary embodiment of the present invention, a steel sheet excellent in workability, including in mass, 0.08 to 0.25% C, 0.001 to 1.5% Si, 0.01 to 2.0% Mn, 0.001 to 0.06% P, at most 0.05% S, 0.001 to 0.007% N, 0.008 to 0.2% Al, at least 0.01% Fe. The steel sheet having an average r-value of at least 1.2, an r-value in the rolling direction of at least 1.3, an r-value in the direction of 45 degrees to the rolling direction of at least 0.9, and an r-value in the direction of a right angle to the rolling direction of at least 1.2.
Abstract:
A process cartridge is detachably mountable to a main assembly of an electrophotographic image forming apparatus The cartridge includes a photosensitive drum, and a developing roller for developing a latent image. A development decoupling portion is provided adjacent to one axial end of the developing roller, with the development coupling portion including an engaging portion configured and positioned (a) to receive a driving force for rotating the developing roller, and (b) to be movable in a direction crossing the axis of the developing roller relative to the developing roller. The cartridge also includes an urging portion configured and positioned to urge the engaging portion in a direction crossing the axis of the developing roller. Also, an abutting portion is configured and positioned so that movement of the engaging portion can be prevented when the engagement portion has not established engagement with a development coupling member of the main assembly.
Abstract:
A process cartridge detachably mountable to a main assembly of an electrophotographic image forming apparatus includes a drum unit containing a movably connected to a developing unit containing a developing roller between a contact position where the roller contacts the drum and a spaced position where the roller is spaced from the drum, a drum coupler engaging a first main assembly drive transmitter transmitting a first rotational driving force to the drum, when the process cartridge is mounted to the main assembly, a shaft coupler transmitting a second rotational driving force with a deviation permitted between an axis of a second main assembly drive transmitter and an axis of the roller, from the second main assembly drive transmission member to the roller when the process cartridge is mounted to the main assembly.
Abstract:
There is provided a nucleotide primer set for LAMP amplification, used for detecting genotypes of single-nucleotide polymorphisms G590A, G857A and T341C of a NAT2 gene. There is also provided a nucleotide probe for detection of an amplification product amplified with the primer set according to the present invention. There is also provided a method of detecting the genotypes of NAT2 gene single-nucleotide polymorphisms G590A, G857A and T341C by using the primer set according to the present invention.
Abstract:
It is possible to surely commit a revision made on a software component in a software component database and a software product group and to create a new software product from the same database. Provided is a software configuration management system which includes a software component database and a software product management unit and accepts data transmission/reception from a software component database management client and a software product operation client. The software configuration management system further includes: a component-product correspondence table, component-file correspondence information, a synchronization unit for mutually committing a modification of the software component database and a modification of a software product; update information; and a correspondence table update unit.
Abstract:
A process cartridge is detachably mountable to a main assembly of an electrophotographic image forming apparatus. The main assembly includes first and second rotatable main assembly drive transmission members. The cartridge includes an electrophotographic photosensitive drum, a developing roller, a drum coupling member, provided on one axial end of the drum, for engaging the first m transmission member and transmitting a first rotational driving force to the drum, when the cartridge is mounted to the main assembly, and a shaft coupler provided on one axial end of the developing roller, for transmitting a second rotational driving force with a deviation permitted between an axis of the second transmission member and an axis of the developing roller. The shaft coupler includes an engaging portion for engaging the second transmission member and receiving the second rotational driving force, when the cartridge is mounted to the main.