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    Phosphine generator for producing phosphine-containing gas
    84.
    发明授权
    Phosphine generator for producing phosphine-containing gas 有权
    用于生产含磷化氢气体的磷化氢发生器

    公开(公告)号：US06315965B1

    公开(公告)日：2001-11-13

    申请号：US09351129

    申请日：1999-07-12

    Applicant: Franziskus Horn Feja ,  Christoph Reichmuth

    Inventor： Franziskus Horn Feja ,  Christoph Reichmuth

    IPC: B01J808

    CPC classification number: A23L3/3409 ,  A23B9/18 ,  A23L3/358 ,  B01J4/00 ,  B01J7/02 ,  C01B25/06 ,  C01B25/081 ,  C01B25/085 ,  Y02P20/145

    Abstract: A process and apparatus is disclosed for generating a mixture of phosphine and diluent gas(es). A hydrolysable metal phosphide, preferably magnesium phosphide, is released directly into liquid water under an atmosphere of gas inert to phosphine and in a free-flowing particulate form, composed of loose metal phosphide particles. The generated mixture of phosphine and inert carrier gas, e.g. CO2, is used as such or is diluted into a gas mixing chamber with air to a concentration below the ignitability limit before being used in fumigation. Using argon as a carrier gas the phosphine mixture is suitable for semiconductor doping.

    Abstract translation: 公开了用于产生磷化氢和稀释气体的混合物的方法和装置。 可水解的金属磷化物，优选磷化镁，在对磷化氢惰性气体和由松散金属磷化物颗粒组成的自由流动的颗粒形式的气氛中直接释放到液态水中。 生成的膦和惰性载气的混合物，例如 二氧化碳原样使用，或者在用于熏蒸之前用空气稀释至浓度低于可燃极限的气体混合室。 使用氩作为载气，磷化氢混合物适用于半导体掺杂。

    Chemical delivery system employing containment crate
    86.
    发明授权
    Chemical delivery system employing containment crate 失效
    化学输送系统采用遏制箱

    公开(公告)号：US6029718A

    公开(公告)日：2000-02-29

    申请号：US105423

    申请日：1998-06-26

    Applicant: Robert M. Jackson ,  Craig Esser ,  Eric Serdahl ,  John N. Gregg

    Inventor： Robert M. Jackson ,  Craig Esser ,  Eric Serdahl ,  John N. Gregg

    IPC: B01J4/00 ,  B67D7/02 ,  B67D7/84 ,  C23C16/44 ,  C23C16/448 ,  F17C7/00 ,  F17C7/02 ,  F17C9/00 ,  F17C13/02 ,  F17C13/04 ,  F17C13/08 ,  B65B1/04

    CPC classification number: F17C13/087 ,  B01J4/00 ,  B67D7/0272 ,  B67D7/0277 ,  B67D7/84 ,  B67D7/845 ,  C23C16/4402 ,  C23C16/448 ,  F17C13/02 ,  F17C13/04 ,  F17C7/00 ,  F17C7/02 ,  F17C9/00 ,  F17C2201/0104 ,  F17C2203/012 ,  F17C2203/0629 ,  F17C2205/0308 ,  F17C2205/0323 ,  F17C2270/0518

    Abstract: This invention concerns a shipping and containment cart, comprising: a base having three sides and one or more doors attached thereto, wheels attached to the base, a top attached to the sides having a tank hole, wherein the base, sides, and doors have been attached to provide a sealed compartment. This invention also concerns a chemical delivery cabinet, comprising: a base, three sides, and one or more doors attached to one or more sides, a valve manifold affixed to an inner wall of the cabinet, process control instrumentation which connects to and controls the valve manifold, wherein at least one of the doors has a touch control pad mounted thereon. This invention is also a chemical refill system, comprising a canister housed in a transportation cart, wherein the cart comprises a base having three sides and one or more doors attached thereto, wheels attached to the base, a top attached to the sides having a canister hole, wherein the top has been fastened to the sides such that the canister hole fits over a vertical sheath on the canister, wherein the base, sides, and doors have been attached to provide a sealed compartment. In one embodiment of this invention, the system is been placed in the chemical delivery cabinet.

    Abstract translation: 本发明涉及一种运输和安全壳推车，包括：具有三个侧面和一个或多个门的基座，一个或多个门附接到其上，附接到基座的轮子，附接到具有罐孔的侧面的顶部，其中底座，侧面和门具有 被附接以提供密封隔室。 本发明还涉及一种化学输送柜，包括：一个底座，三个侧面，以及连接到一个或多个侧面的一个或多个门，固定在机柜内壁上的阀门歧管，连接到控制器 阀歧管，其中至少一个门具有安装在其上的触摸控制垫。 本发明还是一种化学填充系统，其包括容纳在运输车中的罐，其中，所述推车包括具有三个侧面的基座和附接到其上的一个或多个门，附接到所述基座的轮子，附接到具有罐的侧面的顶部 孔，其中顶部已经紧固到侧面，使得罐孔安装在罐上的垂直护套上，其中底座，侧面和门已经被附接以提供密封隔室。 在本发明的一个实施例中，该系统被放置在化学输送柜中。

    System for delivering a substantially constant vapor flow to a chemical process reactor
    88.
    发明授权
    System for delivering a substantially constant vapor flow to a chemical process reactor 失效
    用于将基本上恒定的蒸气流输送到化学处理反应器的系统

    公开(公告)号：US5966499A

    公开(公告)日：1999-10-12

    申请号：US901217

    申请日：1997-07-28

    Applicant: Luke D. Hinkle ,  D. Jeffrey Lischer

    Inventor： Luke D. Hinkle ,  D. Jeffrey Lischer

    IPC: B05C11/10 ,  B01J4/00 ,  B01J4/02 ,  B01J19/00 ,  C23C16/448 ,  F01K1/18 ,  F02M15/04 ,  F02M23/00 ,  F22B1/28 ,  F22B29/06 ,  G05D7/06 ,  H01L21/205 ,  B01D7/00 ,  C23C16/00

    CPC classification number: G05D7/0635 ,  B01J19/0006 ,  B01J4/00 ,  C23C16/4485

    Abstract: A vapor delivery system for delivering a vapor-phase reactant to a chemical process reactor at a substantially constant flow rate. The vapor delivery system includes a source of a reactant material, means for converting the reactant material to a vapor and for maintaining a predetermined volume of vapor in a vapor phase, a flow controller for providing a controlled flow of the vapor-phase reactant to the process reactor, means for detecting a parameter related to the availability of the vapor-phase reactant material to the process reactor from the flow controller, and means responsive to the detection signal for controlling the supply of reactant material to the vapor converter. In one embodiment the parameter is the pressure of the vapor within the predetermined volume. In another embodiment the parameter is the fluid conductance of a control valve within the flow controller. The vapor delivery system of the present invention can operate in either a substantially continuous or a noncontinuous delivery mode.

    Abstract translation: 一种用于以基本恒定的流速将气相反应物输送到化学处理反应器的蒸气输送系统。 蒸气输送系统包括反应物料源，用于将反应物料转化为蒸汽并用于保持气相中预定体积的蒸气的装置，流动控制器，用于将气相反应物的受控流动提供给 工艺反应器，用于从流量控制器检测与所述工艺反应器的气相反应物料的可用性有关的参数的装置，以及响应于所述检测信号用于控制向所述蒸气转化器供应反应物料的装置。 在一个实施例中，该参数是预定体积内蒸汽的压力。 在另一个实施例中，该参数是流量控制器内的控制阀的流体电导。 本发明的蒸气输送系统可以以基本上连续的或非连续的输送模式操作。

    Delivery system and manifold
    89.
    发明授权
    Delivery system and manifold 失效
    交货系统和流通

    公开(公告)号：US5964254A

    公开(公告)日：1999-10-12

    申请号：US893913

    申请日：1997-07-11

    Applicant: Robert M. Jackson

    Inventor： Robert M. Jackson

    IPC: B01J4/00 ,  B67D7/02 ,  B67D7/84 ,  C23C16/44 ,  C23C16/448 ,  F17C7/00 ,  F17C9/00 ,  F17C13/02 ,  F17C13/04 ,  B65B1/16

    CPC classification number: B67D7/0272 ,  B01J4/00 ,  B67D7/0277 ,  B67D7/84 ,  B67D7/845 ,  C23C16/4402 ,  C23C16/448 ,  F17C13/02 ,  F17C13/04 ,  F17C7/00 ,  F17C9/00 ,  F17C2205/0146 ,  F17C2205/0335 ,  F17C2221/014 ,  F17C2221/016 ,  F17C2221/017 ,  F17C2225/0123 ,  F17C2227/044 ,  F17C2250/043 ,  F17C2250/0636 ,  F17C2270/0518 ,  Y10T137/3127

    Abstract: This invention concerns a manifold for use in refill of canister containing chemicals. The manifold may comprise a vacuum supply valve; a vacuum generator; a pressure vent valve; a gas inlet valve; a bypass valve; an isolation valve; a control valve; a canister inlet valve; a canister outlet valve; a canister inlet coupler; and a canister outlet coupler. In the manifold the vacuum supply valve may be connected to the vacuum generator; the vacuum generator may be connected to the pressure vent valve and the control valve; the gas inlet valve may be connected to pressure vent valve and bypass valve; the bypass valve may be further connected to the isolation valve and the canister inlet valve; the isolation valve may also be connected to the canister outlet valve. In addition, the canister inlet valve may be connected to control valve, the canister inlet coupler, and the canister outlet valve; and the canister outlet valve may be further connected to the canister inlet coupler and the canister outlet coupler.

    Abstract translation: 本发明涉及一种用于补充含有罐的化学品的歧管。 歧管可以包括真空供应阀; 真空发生器; 压力通风阀; 进气阀; 旁通阀; 隔离阀; 一个控制阀; 罐入口阀; 罐出口阀; 罐入口联接器; 和罐出口联接器。 在歧管中，真空供应阀可以连接到真空发生器; 真空发生器可以连接到压力通风阀和控制阀; 进气阀可以连接到压力通风阀和旁通阀; 旁通阀可以进一步连接到隔离阀和罐进口阀; 隔离阀也可以连接到罐出口阀。 另外，罐入口阀可以连接到控制阀，罐入口联接器和罐出口阀; 并且罐出口阀可以进一步连接到罐入口联接器和罐出口联接器。

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