公开(公告)号：US08482740B1

公开(公告)日：2013-07-09

申请号：US12828031

申请日：2010-06-30

Applicant: Piotr Szwaykowski

Inventor： Piotr Szwaykowski

IPC: G01B11/02

CPC classification number: G01B11/02 ,  G01M11/005 ,  G01M11/0271

Abstract: A computer generated phase map and corresponding set of interference fringes calculated from a theoretical prescription of a measured aspheric surface comprises a Computer Generated Reference (CGR) that is used in an interferometer equipped with a spherical and/or flat reference element. moiré fringes created between real interference fringes and the CGR describe the difference between the measured object and its prescription. The moiré fringes can be nulled making the measurement of the aspheric surface analogous to the measurements of the regular spherical and/or flat surfaces.

Abstract translation: 计算机生成的相位图和从测量的非球面的理论处方计算出的相应的干涉条纹组包括用于配备有球形和/或平面参考元件的干涉仪中的计算机生成参考（CGR）。 在实际干涉条纹和CGR之间产生的莫尔条纹描述了被测物体与其处方之间的差异。 莫尔条纹可以无效，使得非球面表面的测量类似于规则球形和/或平坦表面的测量。

公开(公告)号：US08269980B1

公开(公告)日：2012-09-18

申请号：US12778009

申请日：2010-05-11

Applicant: Piotr Szwaykowski

Inventor： Piotr Szwaykowski

IPC: G01B11/02

CPC classification number: G01B9/02081 ,  G01B9/02076 ,  G01B9/0209 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70

Abstract: A simultaneous phase-shifting white light scanning interferometer comprises a white light scanning interferometer, a simultaneous phase-shifting module, and a scanner. Light from a short coherence length light source may be polarized and then split, by a polarization type beam-splitter, into orthogonally polarized reference and test beams. The simultaneous phase-shifting module comprises a plurality of detectors, allows for controlled phase shifts between the reference and test beams, and creates at least three independent interferograms, each with different phase shifts between the reference and test beams. The scanner translates the simultaneous phase-shifting module with respect to an object under measurement.

Abstract translation: 同时移相白光扫描干涉仪包括白光扫描干涉仪，同时移相模块和扫描仪。 来自短相干长度光源的光可以偏振，然后通过偏振型分束器分裂成正交偏振的参考和测试光束。 同步移相模块包括多个检测器，允许参考和测试波束之间受控的相移，并且产生至少三个独立的干涉图，每个独立的干涉图在参考和测试光束之间具有不同的相移。 扫描仪将同时移相模块相对于被测物体进行翻译。

公开(公告)号：US06937347B2

公开(公告)日：2005-08-30

申请号：US10245923

申请日：2002-09-18

Applicant: J. Kevin Erwin

Inventor： J. Kevin Erwin

IPC: G01B9/02

CPC classification number: G01J9/0215

Abstract: A lateral-shear interferometer utilizes two relatively thick glass plates bonded together in a single block with a tilted air gap between opposing inner surfaces. The thickness of the glass plates is selected to be sufficiently large to separate the output beams from the light reflected from the top and bottom surfaces of the block, thereby eliminating the need for antireflection coatings. The shear interferometer is combined with an external mirror mounted on a tilt stage actuated by a computer-controlled tilt actuator to perform phase-shifting interferometric analysis in conventional manner.

Abstract translation: 横向剪切干涉仪利用两个相对较厚的玻璃板，它们在单个块中结合在一起，在相对的内表面之间具有倾斜的气隙。 选择玻璃板的厚度足够大以将输出光束与从块的顶表面和底表面反射的光分离，从而不需要抗反射涂层。 剪切干涉仪与安装在由计算机控制的倾斜致动器致动的倾斜台上的外部反射镜组合，以常规方式进行相移干涉测量分析。

公开(公告)号：US07561279B2

公开(公告)日：2009-07-14

申请号：US11770582

申请日：2007-06-28

Applicant: Raymond Castonguay ,  Piotr Szwaykowski

Inventor： Raymond Castonguay ,  Piotr Szwaykowski

IPC: G01B9/02

CPC classification number: G01B9/02081 ,  G01B2290/45 ,  G01B2290/70 ,  G01J9/02 ,  G01J2009/0234 ,  G01J2009/0261

Abstract: An optical measuring apparatus for comprising, in combination, a polarization type interferometer including a polarization type beam splitter in which a polarized beam of light is split into orthogonally polarized reference and test beams, an array of detectors arranged in a line for creating a plurality of phase shifting interferograms, and a scanning device for moving the object in a direction perpendicular to a long axis of the detectors.

Abstract translation: 一种光学测量装置，包括组合的偏振型干涉仪，其包括偏振光束分离器，其中偏振光束被分成垂直偏振的参考和测试光束，一组检测器布置成一行，用于创建多个 相移干涉图，以及用于沿与检测器的长轴垂直的方向移动物体的扫描装置。

公开(公告)号：US07808654B1

公开(公告)日：2010-10-05

申请号：US12136746

申请日：2008-06-10

Applicant: Raymond Joseph Castonguay

Inventor： Raymond Joseph Castonguay

IPC: G01B11/24

CPC classification number: G01B11/24 ,  H04N1/00323 ,  H04N1/10 ,  H04N1/193 ,  H04N2201/0081

Abstract: An optical measuring apparatus for measuring 3D surface profiles of an object comprising, in combination: a linear detector array; an imaging system including a light source to image the object onto the detector array; and machine readable software for producing a 3D topology map from a 2D image, wherein the apparatus is calibrated by changing the optical focus distance between the detector array and the object for the purpose of 3D measurement calibration, and changing the relative lateral positions between the detector array and the object for the purpose of scanning the object's surface.

Abstract translation: 一种用于测量物体的3D表面轮廓的光学测量装置，包括：线性检测器阵列; 一种成像系统，包括将所述物体成像到所述检测器阵列上的光源; 以及用于从2D图像产生3D拓扑图的机器可读软件，其中通过改变检测器阵列和物体之间的光学焦距来进行3D测量校准，并且改变检测器之间的相对横向位置来校准装置 数组和对象的目的是扫描对象的表面。