公开(公告)号：US10683200B2

公开(公告)日：2020-06-16

申请号：US16050924

申请日：2018-07-31

Applicant: STMicroelectronics S.r.l.

Inventor： Dario Paci ,  Domenico Giusti ,  Irene Martini

IPC: B81B3/00 ,  H04N5/232 ,  H04N5/225 ,  B81B7/02

Abstract: A MEMS device includes a semiconductor support body having a first cavity, a membrane including a peripheral portion, fixed to the support body, and a suspended portion. A first deformable structure is at a distance from a central part of the suspended portion of the membrane and a second deformable structure is laterally offset relative to the first deformable structure towards the peripheral portion of the membrane. A projecting region is fixed under the membrane. The second deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a first direction, and the first deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a second direction.