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公开(公告)号：US20250141172A1
公开(公告)日：2025-05-01
申请号：US18882513
申请日：2024-09-11
Applicant: Gigaphoton Inc.
Inventor： Yoichi SASAKI , Osamu WAKABAYASHI
Abstract: A laser device includes a laser chamber configured to accommodate laser gas including fluorine, a pair of discharge electrodes arranged inside the laser chamber, a gas supply port arranged in the laser chamber, and an XeF2 crystal to be vaporized as being arranged in an XeF2 vaporization space communicating with the gas supply port.
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公开(公告)号：US20250138438A1
公开(公告)日：2025-05-01
申请号：US18907047
申请日：2024-10-04
Applicant: Gigaphoton Inc.
Inventor： Ken YAMADA
IPC: G03F7/00
Abstract: An electric component box includes a first box into which a wiring from the extreme ultraviolet light generation chamber device is introduced and capable of being fixed to a placement surface; a second box into which a wiring from the first box is introduced and capable of being switched, by being raised and lowered, between a fixed state and a movable state; and a connection device providing connection as allowing the second box to be rotatable with respect to the first box, from a facing state in which a predetermined side wall of the first box and a predetermined side wall of the second box face each other, in a direction in which the predetermined side wall of the first box and the predetermined side wall of the second box move away from each other, and to be capable of being raised and lowered with respect to the first box.
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公开(公告)号：US20250100076A1
公开(公告)日：2025-03-27
申请号：US18975840
申请日：2024-12-10
Applicant: Gigaphoton Inc.
Inventor： Natsushi SUZUKI
IPC: B23K26/12 , B23K26/70 , B23K101/36
Abstract: A laser apparatus includes a laser chamber connected to a gas circulating system including a merging pipe where exhaust gases exhausted from multiple laser apparatuses merge with each other, and configured to select one of a fresh gas containing xenon and a circulating gas flowing through the merging pipe and supply the multiple laser apparatuses with the selected gas; an exhaust pipe which is connected to and between the laser chamber and the merging pipe, and through which the exhaust gas exhausted from the laser chamber flows toward the merging pipe; a fluorine trap connected to a halfway point of the exhaust pipe and configured to remove fluorine from the exhaust gas; and a xenon adder connected to a halfway point of the exhaust pipe and configured to add an additive gas having a xenon concentration higher than a xenon concentration in the fresh gas to the exhaust gas.
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4.发明申请公开(公告)号：US20250096515A1
公开(公告)日：2025-03-20
申请号：US18968755
申请日：2024-12-04
Applicant: Gigaphoton Inc.
Inventor： Kazuki NAGAI , Yoichi SASAKI , Jeffrey P. SERCEL , Michael von DADELSZEN
Abstract: A chamber for a gas laser device includes first and second main electrodes arranged with a longitudinal direction being along a predetermined direction as being spaced apart from and facing each other in the internal space, a window arranged at a wall surface of the chamber, and a first preionization electrode arranged beside one side of the first main electrode. The first preionization electrode includes a first dielectric pipe extending along the longitudinal direction, a first preionization inner electrode arranged in the first dielectric pipe and extending along the longitudinal direction, and a first preionization outer electrode extending along the longitudinal direction, including a first end portion facing an outer circumference surface of the first dielectric pipe, and extending from the first end portion in a direction away from the first dielectric pipe. In a plane perpendicular to the longitudinal direction, a first corona discharge angle is an acute angle.
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5.发明申请公开(公告)号：US20250071880A1
公开(公告)日：2025-02-27
申请号：US18762753
申请日：2024-07-03
Applicant: Gigaphoton Inc.
Inventor： Masaki NAKANO
IPC: H05G2/00
Abstract: An extreme ultraviolet light generation chamber device includes a chamber in which a target substance irradiated with laser is turned into plasma and extreme ultraviolet light is generated, a tank configured to store the target substance, a nozzle having an internal space which communicates with the tank and the chamber, an exhaust device configured to exhaust the chamber, a supply device configured to supply a purge gas to the chamber, a pressure sensor configured to measure a pressure in the chamber, and a processor. Here, the processor causes, before the target substance is melted, the exhaust device to exhaust a gas from the chamber, and after the gas is exhausted, performs supply operation to cause the supply device to supply the purge gas into the chamber and exhaust operation to cause the exhaust device to exhaust the purge gas from the chamber.
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Patent Agency Ranking
公开(公告)号：US20250062587A1
公开(公告)日：2025-02-20
申请号：US18939232
申请日：2024-11-06
Applicant: Gigaphoton Inc.
Inventor： Takayuki OSANAI
Abstract: A laser system includes a pump laser device outputting pump laser light having a first wavelength, a signal laser device outputting signal laser light having a second wavelength, and an amplification system including optical parametric crystals outputting amplification light. The optical parametric crystals include first and second optical parametric crystals. The amplification system is arranged such that beam waist positions of first amplification light and the pump laser light coincide with each other, and that the first amplification light and the pump laser light are coaxially incident on the second optical parametric crystal; and includes a first beam diameter adjustment optical system in which a ratio of a beam waist diameter of the pump laser light to that of the first amplification light is set larger than a ratio of a beam waist diameter of the pump laser light to that of the signal laser light.
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公开(公告)号：US12207382B2
公开(公告)日：2025-01-21
申请号：US18163023
申请日：2023-02-01
Applicant: Gigaphoton Inc.
Inventor： Nozomu Oue , Yutaka Shiraishi
Abstract: A target supply system includes a target generation unit configured to generate a liquid target substance by melting a solid target substance at an inside thereof, and output the liquid target substance; an input mechanism configured to introduce the solid target substance to the target generation unit; a heater arranged at the target generation unit; a sensor configured to detect a temperature of the target generation unit; and a processor configured to control an input timing at which the solid target substance is introduced to the target generation unit, perform feedback control on the heater based on a present temperature detected by the sensor, and perform feedforward control on the heater based on the input timing while performing feedback control on the heater.
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公开(公告)号：US20240396284A1
公开(公告)日：2024-11-28
申请号：US18796335
申请日：2024-08-07
Applicant: Gigaphoton Inc.
Inventor： Takeshi UEYAMA , Hiroshi UMEDA
Abstract: A gas laser device includes a power source, a main capacitor, a solid-state switch, a step-up transformer, a first magnetic pulse compression circuit including a first transfer capacitor and a first magnetic switch, and connected to a secondary side of the step-up transformer, a second magnetic pulse compression circuit including a second transfer capacitor and a second magnetic switch, and connected subsequently to the first magnetic pulse compression circuit, a peaking capacitor connected subsequently to the second magnetic pulse compression circuit, a pair of discharge electrodes, a regenerative transformer transferring charges generated by the discharge electrodes to the main capacitor after main discharge, and a reset circuit resetting the first magnetic switch and the second magnetic switch. Potential of the cathode electrode in a period of 0.5 μs to 20 μs both inclusive after the main discharge starts is within a range of −200 V to 200 V both inclusive.
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公开(公告)号：US20240394762A1
公开(公告)日：2024-11-28
申请号：US18797560
申请日：2024-08-08
Applicant: Gigaphoton Inc.
Inventor： Yuji MINEGISHI
IPC: G06Q30/0283
Abstract: A residual pulse cost calculation method for a component of a light source which outputs a pulse laser beam includes, by a processor, acquiring first data in which the component of the light source and an operation pulse count of the component sequentially stored through an operation of the light source are associated with each other, acquiring second data in which the component and a standard guaranteed pulse count of the component are associated with each other, acquiring third data in which the light source and a pulse unit price of the light source are associated with each other, calculating a residual pulse count of the component from the operation pulse count and the standard guaranteed pulse count, calculating a residual pulse cost of the component from the residual pulse count and the pulse unit price, and outputting the residual pulse cost.
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10.发明申请公开(公告)号：US20240394446A1
公开(公告)日：2024-11-28
申请号：US18797559
申请日：2024-08-08
Applicant: Gigaphoton Inc.
Inventor： Norimasa FUJITA , Kunihiko ABE
IPC: G06F30/27 , G06F119/02 , G06F119/18
Abstract: A training model creating method includes creating a database by breaking a component in a laser device on a Digital Twin constructed by modeling electrical hardware and software of the laser device, and accumulating data in which the broken component and a failure phenomenon output from the Digital Twin are associated with each other; and training a training model using the data in the database as training data for machine learning so that, upon receiving an input of information on a failure phenomenon, the training model outputs information on a malfunction location corresponding to the input.
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