公开(公告)号：US08701490B2

公开(公告)日：2014-04-22

申请号：US13180970

申请日：2011-07-12

Applicant: Leyue Jiang ,  Hanqin Zhou ,  Yang Zhao

Inventor： Leyue Jiang ,  Hanqin Zhou ,  Yang Zhao

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0831 ,  G01P2015/0837

Abstract: A Z-axis capacitive accelerometer includes a substrate, a capacitance sensing plate, a proof mass and at least one pair of spring beams. The capacitance sensing plate includes two symmetrical sense areas to create differential capacitive measurement. A decoupling structure separates the proof mass and the capacitance sensing plate and their rotational motions from each other. In the proposed Z axis capacitive accelerometer, the distance of the capacitance sensing plate relative to its rotation axis is considerably increased, thereby effectively enhancing the sensitivity when measuring the Z-axis acceleration.

Abstract translation: Z轴电容式加速度计包括基板，电容检测板，检验质量块和至少一对弹簧梁。 电容感测板包括两个对称的感测区域，以产生差分电容测量。 解耦结构将检测质量和电容感测板以及它们的旋转运动彼此分开。 在提出的Z轴电容式加速度计中，电容感测板相对于其旋转轴的距离大大增加，从而在测量Z轴加速度时有效提高灵敏度。

公开(公告)号：US20120048019A1

公开(公告)日：2012-03-01

申请号：US12869222

申请日：2010-08-26

Applicant: Hanqin Zhou ,  Leyue Jiang ,  Mathew Varghese ,  Haidong Liu

Inventor： Hanqin Zhou ,  Leyue Jiang ,  Mathew Varghese ,  Haidong Liu

IPC: G01P15/125 ,  C23F1/00

CPC classification number: G01P15/125 ,  G01P2015/0814

Abstract: Micro-machined capacitive sensors implemented in micro-electro-mechanical system (MEMS) processes that have higher sensitivity, while providing an increased linear capacitive sensing range. Capacitive sensing is achieved via variable-area sensing, which employs a transduction mechanism in which the relationship between changes in the capacitance of variable, parallel-plate capacitors and displacements of a proof mass is generally linear. Each respective variable, parallel-plate capacitor is formed by a finger/electrode pair, in which both the finger and the electrode have rectangular tooth profiles that include a plurality of rectangular teeth. Because changes in the overlapping area of the finger and the electrode are multiplied by the number of rectangular teeth, while the standing capacity of the micro-machined capacitive sensor remains relatively high, the sensitivity of the micro-machined capacitive sensor employing variable-area sensing is significantly increased per unit area of the finger and the electrode.

Abstract translation: 在微机电系统（MEMS）工艺中实现的微加工电容传感器具有更高的灵敏度，同时提供增加的线性电容感测范围。 通过可变区域感测实现电容感测，其采用转换机制，其中可变平行板电容器的电容变化与校准质量的位移之间的关系通常是线性的。 每个可变平行板电容器由手指/电极对形成，其中手指和电极均具有包括多个矩形齿的矩形齿廓。 由于手指和电极的重叠区域的变化乘以矩形齿的数量，而微加工的电容式传感器的静态容量保持相对较高，所以采用可变面积感测的微加工电容传感器的灵敏度 手指和电极的每单位面积显着增加。

公开(公告)号：US20120125103A1

公开(公告)日：2012-05-24

申请号：US13180970

申请日：2011-07-12

Applicant: Leyue Jiang ,  Hanqin Zhou ,  Yang Zhao

Inventor： Leyue Jiang ,  Hanqin Zhou ,  Yang Zhao

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0831 ,  G01P2015/0837

Abstract: A Z-axis capacitive accelerometer includes a substrate, a capacitance sensing plate, a proof mass and at least one pair of spring beams. The capacitance sensing plate includes two symmetrical sense areas to create differential capacitive measurement. A decoupling structure separates the proof mass and the capacitance sensing plate and their rotational motions from each other. In the proposed Z axis capacitive accelerometer, the distance of the capacitance sensing plate relative to its rotation axis is considerably increased, thereby effectively enhancing the sensitivity when measuring the Z-axis acceleration.

Abstract translation: Z轴电容式加速度计包括基板，电容检测板，检验质量块和至少一对弹簧梁。 电容感测板包括两个对称的感测区域，以产生差分电容测量。 解耦结构将检测质量和电容感测板以及它们的旋转运动彼此分开。 在提出的Z轴电容式加速度计中，电容感测板相对于其旋转轴的距离大大增加，从而在测量Z轴加速度时有效提高灵敏度。