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公开(公告)号：US07129010B2
公开(公告)日：2006-10-31
申请号：US10628059
申请日：2003-07-25
Applicant: Jochen Alkemper , Lutz Aschke , Hrabanus Hack
Inventor： Jochen Alkemper , Lutz Aschke , Hrabanus Hack
Abstract: The present invention relates to a substrate in particular of EUV microlithography, to the production of a substrate of this type and to the use of this substrate as a substrate for mirrors and/or masks or mask blanks in particular in EUV microlithography.
Abstract translation: 本发明涉及特别是EUV微光刻技术的基板，这种基板的生产以及该基板作为反射镜和/或掩模或掩模毛坯的基板的使用，特别是在EUV微光刻中。
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公开(公告)号：US4725139A
公开(公告)日：1988-02-16
申请号：US731785
申请日：1985-05-08
Applicant: Hrabanus Hack , Rainer Haspel
Inventor： Hrabanus Hack , Rainer Haspel
IPC: G01N21/89 , G01B11/30 , G01N21/896 , G01N21/88
CPC classification number: G01N21/896 , G01N2021/8845
Abstract: A method of detecting defects present at the surface and/or internally in transparent materials, particularly of detecting included foreign bodies or bubbles in glass, is disclosed. The test material is scanned with an electromagnetic radiation of a single wavelength which is set to the penetration depth in the test material. The intensity reflected by the defects is picked up and analyzed. By this method only defects located up to a specified depth in the material are detected. Visible light as well as UV- or IR radiation may be applied. The associated test rig comprises a tunable Laser (2), a conveyor belt (6) carrying the test material (5), a fast rotating mirror-wheel (3) which directs the light beam (4) at high speed over the test material (5), and an optical sensor (7) connected with an analyzer unit (8).
Abstract translation: 公开了一种检测在表面和/或内部透明材料中存在的缺陷的方法，特别是检测玻璃中包括的异物或气泡。 测试材料用测试材料中的穿透深度设置的单一波长的电磁辐射进行扫描。 拾取并分析缺陷反映的强度。 通过该方法，仅检测到材料中指定深度的缺陷。 可以应用可见光以及UV或IR辐射。 相关联的测试台包括可调谐激光器（2），承载测试材料（5）的传送带（6），快速旋转镜轮（3），其将光束（4）高速地引导到测试材料 （5）和与分析器单元（8）连接的光学传感器（7）。
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公开(公告)号：US20090109654A1
公开(公告)日：2009-04-30
申请号：US12269192
申请日：2008-11-12
Applicant: Joerg Hinrich Fechner , Brigitte Hueber , Franz Ott , Hrabanus Hack
Inventor： Joerg Hinrich Fechner , Brigitte Hueber , Franz Ott , Hrabanus Hack
CPC classification number: G02B5/223 , C03C3/068 , C03C3/091 , C03C3/093 , C03C3/095 , C03C4/082 , C03C17/3417 , C03C2217/734 , C03C2218/365 , G02F1/133604 , G02F1/133606 , G02F2001/133628 , G02F2201/08 , G02F2202/09 , G02F2203/11 , H01J61/302 , H01J61/40
Abstract: A backlight system for background illumination of displays or screens includes at least one light source with a glass envelope, whereby the glass composition of the glass envelope is doped with one or more doping oxides which absorb the IR-radiation, and/or whereby the glass envelope has an outside and/or inside coating which absorbs the IR-radiation, and/or whereby the backlight system has a coating on components other than the glass envelope, absorbing the IR-radiation.
Abstract translation: 用于显示器或屏幕的背景照明的背光系统包括具有玻璃外壳的至少一个光源，由此玻璃外壳的玻璃组合物掺杂有一种或多种吸收IR辐射的掺杂氧化物，和/或由此玻璃 外壳具有吸收IR辐射的外部和/或内部涂层，和/或由此背光系统在玻璃外壳以外的部件上具有涂层，从而吸收IR辐射。
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公开(公告)号：US20050215413A1
公开(公告)日：2005-09-29
申请号：US11087885
申请日：2005-03-23
Applicant: Jochen Alkemper , Joerg Schuhmacher , Hrabanus Hack , Oliver Sohr
Inventor： Jochen Alkemper , Joerg Schuhmacher , Hrabanus Hack , Oliver Sohr
CPC classification number: C03C3/06 , C03C2201/21 , C03C2201/42 , C03C2203/44 , C03C2203/50
Abstract: The invention discloses an SiO2—TiO2 glass, which is preferably made by flame-hydrolysis and which distinguishes itself by increased resistance to radiation, especially in connection with EUV lithography. By purposefully reducing the hydrogen content, clearly improved resistance to radiation and reduced shrinking is achieved.
Abstract translation: 本发明公开了一种SiO 2 -TiO 2 SiO 2玻璃，其优选通过火焰水解制备，并且通过增加的耐辐射性，特别是与EUV光刻相关联来自身区分。 通过有目的地降低氢含量，实现了明显改善的耐辐射性和减少的收缩。
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5.发明申请公开(公告)号：US20130209762A1
公开(公告)日：2013-08-15
申请号：US13587282
申请日：2012-08-16
Applicant: Thorsten DAMM , Hrabanus HACK , Christian HENN
Inventor： Thorsten DAMM , Hrabanus HACK , Christian HENN
IPC: C03C17/22
CPC classification number: C03C17/225 , C03C17/007 , C03C17/3435 , C03C2217/45 , C03C2217/475 , C03C2217/78 , Y10T428/24942
Abstract: Glass-ceramic is provided that is at least partly provided with a hard material layer to protect against external mechanical influences. The hard material layer contains at least two phases, which are present side by side and are mixed with one another. The at least two phases include at least one nanocrystalline phase and one amorphous phase. The hard material layer has a hardness of at least 26 GPa and a layer thickness of at least 0.5 μm. The hard material layer is chemically resistant in the temperature range from 200° C. to 1000° C. The coefficient of thermal expansion (α) of the glass-ceramic does not differ by more than +/−20% from the coefficient of thermal expansion (α) of the hard material layer.
Abstract translation: 提供玻璃陶瓷，其至少部分地设置有硬材料层以防止外部机械影响。 硬质材料层含有至少两相，它们彼此并排并且彼此混合。 至少两相包括至少一个纳米晶相和一个非晶相。 硬质材料层具有至少26GPa的硬度和至少0.5μm的层厚度。 硬质材料层在200°C至1000°C的温度范围内具有化学抵抗能力。玻璃 - 陶瓷的热膨胀系数（α）与热系数不相差大于+/- 20％ 硬质材料层的膨胀（α）。
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Patent Agency Ranking
6.发明申请Thermocatalytically Active Coating, Substrate Having The Thermocatalytically Active Coating At Least In Parts, And Process For Producing Same 有权具有热活性涂层的热催化活性涂层，至少部分产生的基材和生产相同的工艺公开(公告)号：US20100056362A1
公开(公告)日：2010-03-04
申请号：US12545249
申请日：2009-08-21
Applicant: Inka Henze , Hrabanus Hack , Gerhard Weber , Hans-Joachim Schmitt , Wolfgang Schmidbauer , Torsten Gabelmann
Inventor： Inka Henze , Hrabanus Hack , Gerhard Weber , Hans-Joachim Schmitt , Wolfgang Schmidbauer , Torsten Gabelmann
IPC: B01J23/04 , C01B25/30 , C01F11/36 , C01D3/00 , C01D5/08 , B32B5/16 , B01J31/06 , B01J21/02 , B01J21/08 , B01J23/10 , C07C53/10 , C07C59/265 , C07C53/122
CPC classification number: C03C17/008 , B01J21/066 , B01J23/04 , B01J37/0215 , B01J37/0221 , B01J37/038 , C03C2218/113 , C04B41/009 , C04B41/5027 , C04B41/5042 , C04B41/87 , C04B2111/0081 , Y10T428/2982 , Y10T428/31678 , C04B41/4537 , C04B2103/0008 , C04B41/4539 , C04B35/00 , C04B38/00
Abstract: A substrate, such as a glass, glass ceramic, ceramic or metal substrate, is provided with a thermocatalytically active coating on at least a part of the substrate surface. The thermocatalytic coating contains an inorganic lithium salt or organic lithium-containing compound in an amount that is equivalent to not less than 2 wt. % of lithium ions, based on total coating weight. The thermocatalytic coating has a glass, glass solder or sol-gel matrix in which the lithium salt or organic lithium-containing compound is introduced. Optional barrier and IR-reflecting layers are arranged between the substrate surface and the thermocatalytically active coating.
Abstract translation: 衬底，例如玻璃，玻璃陶瓷，陶瓷或金属衬底，在衬底表面的至少一部分上设置有热催化活性涂层。 热催化涂层含有相当于不小于2wt。％的量的无机锂盐或有机含锂化合物。 基于总涂层重量的锂离子的百分比。 热催化涂层具有引入锂盐或有机含锂化合物的玻璃，玻璃焊料或溶胶 - 凝胶基质。 可选的屏障和IR反射层布置在基板表面和热催化活性涂层之间。
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7.发明授权Process of and apparatus for leading an optical waveguide through a wall via a hermetic seal 失效用于通过气密密封件将光波导引导通过壁的过程和装置
公开(公告)号：US4904046A
公开(公告)日：1990-02-27
申请号：US320639
申请日：1989-03-08
Applicant: Hartmut Paschke , Gerd Kreutzmann , Hrabanus Hack
Inventor： Hartmut Paschke , Gerd Kreutzmann , Hrabanus Hack
CPC classification number: G02B6/4248
Abstract: To lead an optical waveguide through a housing wall, the optical waveguide is, in one section freed of its protective layer and hermetically connected in a bushing by glass soldering it to the bushing. In at least one load-relieving section leading out of the bushing, the optical waveguide is fastened by its protective layer to an extension of the bushing. The bushing is hermetically set into the housing wall.
Abstract translation: 为了引导光波导通过壳体壁，光波导在一个部分中没有其保护层，并且通过将衬套玻璃焊接到套管而在衬套中气密连接。 在从衬套引出的至少一个卸载部分中，光波导通过其保护层紧固到衬套的延伸部。 衬套被气密地设置在壳体壁中。
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8.发明授权公开(公告)号：US08008225B2
公开(公告)日：2011-08-30
申请号：US12545249
申请日：2009-08-21
Applicant: Inka Henze , Hrabanus Hack , Gerhard Weber , Hans-Joachim Schmitt , Wolfgang Schmidbauer , Torsten Gabelmann
Inventor： Inka Henze , Hrabanus Hack , Gerhard Weber , Hans-Joachim Schmitt , Wolfgang Schmidbauer , Torsten Gabelmann
IPC: B01J23/04
CPC classification number: C03C17/008 , B01J21/066 , B01J23/04 , B01J37/0215 , B01J37/0221 , B01J37/038 , C03C2218/113 , C04B41/009 , C04B41/5027 , C04B41/5042 , C04B41/87 , C04B2111/0081 , Y10T428/2982 , Y10T428/31678 , C04B41/4537 , C04B2103/0008 , C04B41/4539 , C04B35/00 , C04B38/00
Abstract: A substrate, such as a glass, glass ceramic, ceramic or metal substrate, is provided with a thermocatalytically active coating on at least a part of the substrate surface. The thermocatalytic coating contains an inorganic lithium salt or organic lithium-containing compound in an amount that is equivalent to not less than 2 wt. % of lithium ions, based on total coating weight. The thermocatalytic coating has a glass, glass solder or sol-gel matrix in which the lithium salt or organic lithium-containing compound is introduced. Optional barrier and IR-reflecting layers are arranged between the substrate surface and the thermocatalytically active coating.
Abstract translation: 衬底，例如玻璃，玻璃陶瓷，陶瓷或金属衬底，在衬底表面的至少一部分上设置有热催化活性涂层。 热催化涂层含有相当于不小于2wt。％的量的无机锂盐或有机含锂化合物。 基于总涂层重量的锂离子的百分比。 热催化涂层具有引入锂盐或有机含锂化合物的玻璃，玻璃焊料或溶胶 - 凝胶基质。 可选的屏障和IR反射层布置在基板表面和热催化活性涂层之间。
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公开(公告)号：US07172983B2
公开(公告)日：2007-02-06
申请号：US11087885
申请日：2005-03-23
Applicant: Jochen Alkemper , Joerg Schuhmacher , Hrabanus Hack , Oliver Sohr
Inventor： Jochen Alkemper , Joerg Schuhmacher , Hrabanus Hack , Oliver Sohr
CPC classification number: C03C3/06 , C03C2201/21 , C03C2201/42 , C03C2203/44 , C03C2203/50
Abstract: The invention discloses an SiO2—TiO2 glass, which is preferably made by flame-hydrolysis and which distinguishes itself by increased resistance to radiation, especially in connection with EUV lithography. By purposefully reducing the hydrogen content, clearly improved resistance to radiation and reduced shrinking is achieved.
Abstract translation: 本发明公开了一种SiO 2 -TiO 2 SiO 2玻璃，其优选通过火焰水解制备，并且通过增加的耐辐射性，特别是与EUV光刻相关联来自身区分。 通过有目的地降低氢含量，实现了明显改善的耐辐射性和减少的收缩。
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公开(公告)号：US5945177A
公开(公告)日：1999-08-31
申请号：US991920
申请日：1997-12-16
Applicant: Hrabanus Hack , Torsten Holdmann , Volker Paquet , Johannes Segner
Inventor： Hrabanus Hack , Torsten Holdmann , Volker Paquet , Johannes Segner
IPC: H05H1/46 , C23C16/455 , C23C16/50 , C23C16/511 , C23C16/515 , H01J9/20 , H01J37/32 , H01K3/00 , B05D3/06 , B05D5/06
CPC classification number: H01J37/32192 , C23C16/455 , C23C16/511 , H01J9/20
Abstract: A process for coating an exterior of a lamp is disclosed, which comprises performing the coating in a microwave reactor by a microwave plasma CVD process and coupling microwave radiation into the microwave reactor with a microwave power greater than or equal to a power threshold value at which a plasma with reduced microwave permeability is ignited in the microwave reactor.
Abstract translation: 公开了一种用于涂覆灯的外部的方法，其包括通过微波等离子体CVD工艺在微波反应器中进行涂覆，并将微波辐射耦合到具有大于或等于功率阈值的微波功率的微波反应器中， 在微波反应器中点燃具有降低的微波渗透性的等离子体。
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